PSxx-OMU0002CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -19No.PS-OMU0002CN-D Z/ISE20A(F)-S/-R () DC(+) NPN 2 Max.28 V80 mA 1 V R15 V OUT1 1 k OUT2 S420 mA DC(-) 12 V 300 24 V 600 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -20No.PS-OMU0002CN-D -V/-T () DC(+) PNP 2 Max.80 mA 1 V T15 V OUT1 1 k OUT2 V420 mA DC(

ZSE30A(F)/ISE30A

(Refer to Copy function on page 41.) 36 2-Color Display High-Precision Digital Pressure Switch ZSE30A(F)/ISE30A Series Dimensions Z/ISE30A(F) Piping specifications ZSE20 ISE20 ZSE30 ISE30 ZSE30 ISE30 01 N01 / ZSE40 ISE40 25 8 9.5 1.5 30 200.1 2 x M3 x 0.5 thread depth 4 Lead wire with connector ZSE10 ISE10 ISE70 M5 x 0.8 10 ZSE80 ISE80 200.1 30 01: R1/8 N01: NPT1/8 PS ISA3 Width across flats

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

VM

port Bottom ported 3 port 2 port Side ported 3 port 2 port One way roller lever Bottom ported 3 port 2 port Toggle lever Side ported 3 port 2 port Bottom ported 3 port 2 port Side ported 3 port 2 port Bottom ported 3 port 2 port Green Green Green Green Black Black Black Black Red Red Red Red Bottom ported 3 port 2 port Push button Side ported 3 port 2 port Bottom ported 3 port 2 port Side

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

100

They depend on atmospheric pressure (weather, altitude, etc.) and the measurement method. *2 10 to 500 Hz for 2 hours in each direction of X, Y, and Z (De-energized, Initial value) *3 3 times in each direction of X, Y, and Z (De-energized, Initial value) ZL1 Series ZL3/ZL6 Series With pressure switch ZL6 Model ZL6Mmm ZL6Hmm Nozzle size [mm] 1.9 x 2 1.5 x 2 Standard supply pressure [MPa]

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover]

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

•

I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M .. Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!

ZP

2.5 R 1 R 2 2 1.2 6 8 2 6.7 8.8 3 Applicable pad B06MU/B08MU/B10MU/B15MU ZP2-B10MU ZP2-B15MU 9 8 6 6 4 4 R 4 2 2 1.2 2 2 2 8 R 7 2 2 4 2 2 6 15 10 Note) R part has to be smooth with no corners.

PSxx-OML0002CN

M38 L(2) (ZS-27-C) +(ZS-27-D) M3X8L ( ) (ZS-27-C/D) 90 2 -16No.PS-OML0002CN-G 1. 2. 1)0.1 mm 2)0.1 mm 3)+0.15 mm -0.2 mm -17No.PS-OML0002CN-G ,FG () () DC(+) 5 OUT1 4 OUT2 3 (FUNC) 2 DC(-) 1 -18No.PS-OML0002CN-G Z/ISE30A(F)--DC(+) OUT -N NPN 1 Max.28 V80 mA 1 V FUNC DC(-) DC(+) OUT -P PNP 1 Max.80 mA 1 V FUNC DC(-) DC(+) OUT1 OUT2 -A NPN 2 Max.28 V80 mA 1 V FUNC

Vacuum Pad: Ball Joint Type

Adapter z 2. Place a new pad on the adapter, and after confirming that the O-ring is in place, retighten the screw with the hexagon wrench. Pad O-ring inside x Hexagon wrench Pad diameter: 40, 50 1. Pull the lock ring upward, and after lifting it to the adapter, remove the old pad by pulling it downward. 2.

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

PFxx-OMJ0005CN

0.835.3 1.888.3 4177 8353 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 CO2 0.817.6 1.844.1 488 8176 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 N2Ar 0.837.1 1.892.7 4186 8371 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 / CO2 0.818.5 1.846.3 493 8185 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 -2 0.1 CFM10 -2 1 CFM10 -2 1 CFM10 -2 / 0.1 CFM10 / 0.09.0 0.09.9 09 09 310 -1 310 -1 310 -1 310 -1 ft ft ft ft 310 -1 0.1 ft