Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

ZP

(mm) M10 x 1 M14 x 1 Mounting ZL 10, 20, 30, 40, 50 10, 20, 30, 50 Stroke (mm) 0 stroke 0 stroke 2.0 N 1.0 N ZY Spring reactive force Stroke end Stroke end 5.0 N 3.0 N ZQ Non-rotating specification With no non-rotating (J), With non-rotating (K) ZF Weight ZP (g) ZCU Vacuum entry port Pad dia.

ZP

(mm) 6 tube M14 x 1 20 to 50 8 tube Ball joint rotation 15 Buffer Type Pad dia. (mm) 10 to 16 20 to 50 M10 x 1 M14 x 1 Mounting 10, 20, 30, 40, 50 10, 20, 30, 50 Stroke (mm) 0 stroke 0 stroke Spring reactive 2.0 N 1.0 N Stroke end Stroke end force 5.0 N 3.0 N With no non-rotating (J), With non-rotating (K) Non-rotating specification Weight (g) Vacuum entry port Pad dia.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Table of Contents

(N specifications) Maximum operating pressure 1 MPa max.

ZP

Form w 1 Material e Vacuum inlet Construction p. 117 Adapter Assembly p. 121 10 13 21 2.5 M5 x 0.8 5 8 16 21.5 20 25 23 4 32 23.5 10 13 B5 21 2.5 M6 x 1 6 8 16 21.5 20 25 23 4 32 23.5 40 32 4.9 12 50 33 20 25 B8 B6 N S U F GN GS ZP T U 29 3.5 M8 x 1.25 8 12 32 29.5 40 32 6.6 50 33 10 13 27 2.5 16 27.5 20 25 29 3.5 32 29.5 40 32 7 50 33 Rc1/8 NPT1/8 NPTF1/8 12 B01 N01 T01 1 N: NBR, S: Silicone

IIIIIII

o F O F 5 73 lbs (2 6 kg) P T 0 216 in (5 5 mm) N T 0 039 in (1 mm) T T , 0 256 in (6 5 mm; A B c D E F G H J K M N 1.20 30.5' ).2, (6) 4.41 ' 1 1 2 ' 3 . 1 9 (81) 1 1 0 (28) 1.22 (31) 0.06 (1.5) 0.1: (3) 1 . 5 7 (40) 1.06 (27) 1 4 2 (36) 1 . 2 6 3.05 (77.5 Millimeters in Parentheses Millimeters in Parentheses "32) NVM430-N01-36 T U T 4 41 lbs (2 ks) T T 90' A B c D E F G H J K M N P 5.43

Mechanical Valves Series NVM, NVFM, NVZNI

o F O F 5 73 lbs (2 6 kg) P T 0 216 in (5 5 mm) N T 0 039 in (1 mm) T T , 0 256 in (6 5 mm; A B c D E F G H J K M N 1.20 30.5' ).2, (6) 4.41 ' 1 1 2 ' 3 . 1 9 (81) 1 1 0 (28) 1.22 (31) 0.06 (1.5) 0.1: (3) 1 . 5 7 (40) 1.06 (27) 1 4 2 (36) 1 . 2 6 3.05 (77.5 Millimeters in Parentheses Millimeters in Parentheses "32) NVM430-N01-36 T U T 4 41 lbs (2 ks) T T 90' A B c D E F G H J K M N P 5.43

CATALOG

2.48 1.75 4 7/8 2.19 1 1/8 9/16 3/8 325 (3.25) 1 1/8 3.9 1 1/2 1/2 3/8-24 3 3/4 0 1.57 1 1 1 3/8 1 1.18 4 1/4 2.72 2.34 5 53/64 2.76 1 1/2 3/4-16 7/8 1/2 400 (4) 1 1/8 4.7 1 1/2 1/2 3/8-24 4 1/2 0 1.57 1 1 1 3/8 1 1.18 4 1/4 2.72 2.34 5 53/64 3.32 1 1/2 3/4-16 7/8 1/2 D I M E N S I O N S C E N T E R T R U N N I O N T Y P E NC A1T 0 0.001 BA BORE (INCH) KK A AA B C DD E EA G TD TL WF MM D

Compact 5-Port Solenoid Valve

(Station 1) L = 16 x n + 41.5 n: Manifold stations 86.7 D D 75.7 73.2 E 3/5 3/5 E S 2 B 2 B 2 B 2 B 2 B 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY5-10F2-05DR-C12.

Title not found

,oox'o''"n' ar3oro 60 Nole 2) Drain guide is G1i 4 (app cable 10 AF30lo 60) Nore 1) Wlhoul a valve name plate and caulion A F 1 0 1 0 6 0 Port size Symbol Port 1 0 20 30 40 50 60 Symbol Descrlption Applicable M5 a 1 B O AF20 to 60 1t4 a a a 3a a a 1t2 a g4 a a 1 a a auto dlain (N C.)

Direct Solenoid

(OptionsT& POnly) ParlNo, Portin9 No. of Ports "xx" sP01 'r 1 %,,NPTFSidE 5 4 1 sP0112 %"NPTFSidE 42 sPot 13 /s' NPTF SidLe (5); %" NPTF Ebtlom 1 0 43 sP0114 Ya" N PTF Bottom 5 44 sP0115 3,6" N PTF Side 5 45 MBA4010-02Y." NPTF Side 2 1 2 MBA40r r -02 %" NPTF Sid; 7." Bottom 1 4 MBA4210-02 %" NPTF Side (2); 7."

V

Eg: AQ1510-01 *S (mm2 ) is Effective Orifice Figure given for A-R Direction (Exhaust Flow) Model Port Size A B C D Model Port Size A B C D E F G H J K (N)AQ2000-N01, 02 1/8, 1/4 45 40 10 45 (N)AQ1500-M5 M5x0.8 23 20 14 3 12.5 12 15 5.5 6.5 3.1 (N)AQ3000-N02, 03 1/4, 3/8 56 50 12.5 56 (N)AQ1510-N01 1/8 45 33 25 4 21 15 25 8 11 4.3 (N)AQ5000-N4, 06 1/2, 3/4 85 75 18 85 Courtesy of Steven Engineering

PSxx-OMM0006CN

64No.PS-OMM0006CN-E A 01/N01 W1/WF1 -65No.PS-OMM0006CN-E B W1/WF1 -66No.PS-OMM0006CN-E D 01/N01 W1/WF1 -67No.PS-OMM0006CN-E 01/N01 W1/WF1/M5/C4/C6 -68No.PS-OMM0006CN-E + 01/N01 W1/WF1/M5/C4/C6 -69No.PS-OMM0006CN-E 36n +4n -1 -70No.PS-OMM0006CN-E 01/N01 (M8(3 )) 5 4 -71No.PS-OMM0006CN-E M8(3 ) V100-49-13 1 4 (L) V100-49-1-1 300 mm V100-49-1-2 500 mm V100-49-1-3 1000 mm V100

Table of Contents

OFF n-3 Accumulated flow rate Note 1) n Note 1) Output mode is set to inverted output at the factory before shipment.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 24 or more Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less Multiple (2 pcs. or more) secure mounting Panel fitting dimensions (Bottom ported) Individual mounting 36 x n pcs. + 4 x (n pcs. 1) 360.3 360.3 360.3 4 x R3 or less 4 x R3 or less 33 ZSE20(F)/ISE20 Series Function Details

Compact and Lightweight

-04 24 24 142.6 74.9 44.1 Rc1/2 Rc1/2 Metric ZH05DA-N01-N01-N01 12.7 12.7 12.7 67 42.5 27 26 NPT1/8 NPT1/8 NPT1/8 ZH07DA-N01-N01-N01 70.2 ZH10DA-N01-N01-N01 76.4 ZH13DA-N01-N02-N02 17.46 17.46 90.8 51 29.5 36.3 NPT1/4 NPT1/4 ZH15DA-N02-N03-N03 17.46 22.23 22.23 108.2 63.3 34.3 37.1 NPT1/4 NPT3/8 NPT3/8 ZH18DA-N03-N03-N03 22.23 131 73.6 41.1 39 NPT3/8 ZH20DA-N03-N04-N04 23.81 23.81 142.6 74.9

VM

8 NPT N01 1 8 Be sure to read before handling.

VM

8 NPT N01 1 8 Be sure to read before handling.

44

KFG2H0122-N01 KFG2H0122-N02 KFG2H0325-N01 KFG2H0325-N02 KFG2H0704-N01 KFG2H0704-N02 KFG2H0906-N01 KFG2H0906-N02 KFG2H0906-N03 KFG2H1163-N02 KFG2H1163-N03 KFG2H1163-N04 KFG2H1395-N02 KFG2H1395-N03 KFG2H1395-N04 KQ2 16.2 19.4 16.2 19.4 17.9 21.1 20.1 22.3 23.6 25.3 25.6 27.1 27.1 27.2 28.7 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 12 14 12 14 12 14 19.4 23.8 19.4 23.8 21.1