Table of Contents

: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Applicable connector: Flat ribbon cable connector (20P) (Conforming to MIL-C-83503) VQZ D side n Stations 8 7 6 5 4 3 2 1 U side VQD P P A A A A A A A A 2-C6 P (SUP port) 24.5 (11) 13.5 B B B B B B B B R R 7 P = 11 19.2 2-C6 R (EXH port) (7.5) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting

SZ3000

] 4-One-touch fitting (P, R ports) Applicable tube O.D.: 8 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 17.8 36.7 16.2 17 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n-One-touch fitting 2-One-touch fitting (A,B ports) Applicable tube O.D.: 4 6 (X,PE ports) Applicable tube O.D.: 6 (L4) L3 U Side D Side Applicable connector

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A) 2 (A) 2 X X 1 (P) 3 (R) 1 (P) 3 (R) 2.2-47

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Effective area (Cv) (1) 0.8MPa 0.15MPa 5 to 50C 18mm2 (1.0) 180 c.p.m SUP side pressure (P1) To CYL port Note 1) As per JISB8375-1981 (Supply pressure: 0.5MPa) Max. operating frequency Dimensions 17.5 37.5 (1.5) Valve Manifold 25 45 4 4 4 2 2 2 A A A 4 B B B 2 A 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting ass'y for 6 C8: One-touch fitting ass'y for 8 B 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

133 14 8 173 162.5 143.5 15 9 185.5 175 154 16 10 198 187.5 164.5 17 L1 L2 L3 L4 L1 L2 L3 L4 25 Series SZ3000 Dimensions/SZ3000: Non-plug-in Stations SS5Z3-60 B Scale: 37% [With external pilot] 4-One-touch fitting (P, R ports) Applicable tube O.D.: 8 24 13.3 (Pitch) P = 10.5 13.3 24 16.2 17.8 Approx. 300 16.2 17 36.7 34 B 2 B 2 PE 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 P 1 P

VQC

Blanking plate VVQ1000-10A-1 Individual SUP spacer VVQ1000-P-1-C6 SUP shutoff position: Specify 2 positions. Individual EXH spacer VVQ1000-R-1-C6 EXH shutoff position: Specify 2 positions.

Series VQ Metal Seal/Rubber Seal Body Ported

VQ VQ4 Note) R block valve is mounted in the blocking position when ordering an individual EXH spacer incorporated with a manifold. When separately ordering an individual EXH spacer, separately order a R block valve. VQZ P R PR 1 2 0 1 P R PR Block valve VQD VQ 4 --Valve No.

4/5 Port Air Operated Valve Series SYJA3000

5 port 4 port 3 position exhaust center 5 3 position pressure center 2 position single 2 position single (B) 2 (B) 2 (A) 4 (A) 4 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) How to Order Manifold Base 2 position double 2 position double (B) 2 (A) 4 (B) 2 (A) 4 Same manifolds as series SYJ3000 are prepared. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) SS5YJA3 Fill the same as SS5YJ3 3 position closed center 3 position

SZ3000

SZ3B60 [N.C. valve x 2 pcs.] 4(A) 2(B) r t !0 !1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8, 5/16" [With External Pilot Specifications] 13.3 25 (Pitch) P = 10.5 25 13.3 16.2 16.2 17 36.7 34 34 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 A 4 A 4 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4"

5 Port Solenoid Valve, Series VQC

3 4 5 6 7 Stations D-side 8 U-side C10 3(R) port 2-G3/4 Conduit port 2-C12 3(R) port DIN rail clamp screw 77.5 49.5 30 25 10 12 13.5 25 C10 1(P) port (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting (mm) Formulas: L1 = 16n + 57, L2 = 16n + 163 n: Stations (maximum 20 stations) n L L1 L2 L3 L4 1 73 179 200 210.5 2 89 195

Vacuum System Peripherals:

Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22 1 3 to 1 8 1 2 2.4 to 9.8 Internal pilot solenoid valve 24 1 2 to 2 3

Fieldbus System

Output Unit 8 D side U side Station 7 6 5 4 3 2 1 n DIN rail clamping screw C8: 8 One-touch fitting C8 [3(R) EXH port] DIN rail clamping screw (12) 30 56.6 8 R R 11.5 63.5 62.5 3 3 12 X 12 X 40.5 B B B B B B B B P P 25 1 A 1 A A A A A A A 18.5 7.5 9.5 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch

SYJ300/500/700

SYJ72R is only for manifold use. 4-4-38 39 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ700 Construction q e r t w y q e r t w y N.C. N.O. (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) i i V100 3 (R) 1 (P) 3 (R) 1 (P) SY u u SYJ VK Component Parts Replacement Parts VZ No.

3 Port Air Operated Valve Series SYJA300

Bottom Side Top Direction 1/8 1/8 1/8 P, R port M5 x 0.8, 1/8, C4 (One-touch fitting for 4), , C6 (One-touch fitting for 6) M5 x 0.8 1/8 Port size M5 x 0.8 A port M5 x 0.8 X port Note) M5 x 0.8 M5 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv SYJ52

VFR

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

42

(A) 4 (B) 2 VP4 VQ 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 4/5 VQ 4/5 q w e q w VQC 1/2 VQC 4/5 VQZ SQ (A) 4 (B) 2 VQ5251 VQ5250 (A) 4 (B) 2 VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR r e q w e r q w VQ7 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(B) 2 (A) 4 (B) 2 (A) 4 Effective area (mm2) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) (B) 2 (A) 4 JIS Symbol 1 3 position pressure center 3 position pressure center (B) 2 (A) 4 (B) 2 (A) 4 3 (R) 1 (P) (Single) 0 (Fully open) (Fully closed) 1 2 3 4 5 6 7 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) How to order valve with built-in speed controller SYJ5 5 When using SYJ553 model the speed controller must be opend