HRX-OM-M005

) Table 8-1 Specification for fluorinated fluid (wide temperature) double inverter (HRZD020-WS-WS) Model HRZD020-WS-WS Channel 1 2 Cooling method Water cooled refrigerant type Temperature control system PID control PID control Cooling capacity*1 kW 9.5 (Circulating fluid at 20C) 9.5 (Circulating fluid at 20C) Operating temperature range C -30 to 90 -30 to 90 Temperature stability C 0.1*2

Large Capacity Compressed Air Filters Series AFW

175 D Flanged Models Threaded Models 1/4 N/A 5.5 1-1/4 5.91 18.11 1.65 4.80 476 AFW275-N12D-WS 280 1/4 N/A 5.5 1-1/2 5.91 18.11 1.65 4.80 545 AFW325-N14D-WS 320 1/4 N/A 8.8 1-1/2 7.09 18.98 2.05 5.75 680 AFW400-N14D-WS 400 A 1/4 N/A 8.8 2 7.09 18.98 2.05 5.75 1,189 AFW700-N20D-WS 700 1/4 N/A 18.7 2-1/2 7.87 23.43 2.64 8.27 1,445 AFW850-N25D-WS 850 B 1/4 N/A 18.7 3 7.87 23.43 2.64 8.27 2,550

Refrigerated Thermo-chiller

fluid temperature (C) Heating Capacity HRZ010-WS/010-W1S/010-W2S 7 HRZ010-WS 6 Heating capacity (kW) 5 HRZ010-W1S 4 3 HRZ010-W2S 2 1 0 20 10 0 10 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) Pump Capacity (Thermo-chiller Outlet) HRZ010-WS HRZ010-W1S 1 0.5 [Outlet port: Max.]

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

HRX-OM-I051

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Circulating fluid disposal. 1-16 1.7.3 System disposal . 1

SGC200-OMJ0004

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) , 1. 2. 3. 1. 2. 3. 4. 2 SGC200*-OMJ0004-A / / / / 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 3) 3) 3) 3) 1 1 1 1 1 1 1 1 () 3 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / ( ( ( ( ) ) ) ) () IP65 IP65 IP65 IP65 80100 ( ) 1) 1) 1) 1) 2) 2) 2) 2) 5 3) 3) 3) 3) , , , , 4) 4)

Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B d M6 x 1.0 M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 4 8 8 10

Basic type / Direct mount type Series CY3B/CY3R

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B DH 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

CY1

7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

Basic Type/Direct Mount Type

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

Profile Design ISO/VDMA Air Cylinder Series CP95

(1+ ) FB allowable L1 L2 FB1 allowable 32 62.5 34.5 + st 80 N 40 74.0 39.0 + st 125 N 50 76.0 44.5 + st 195 N 63 91.0 44.5 + st 310 N 80 93.0 53.0 + st 500 N 100 104.0 57.5 + st 785 N e.g. 63mm bore, 100mm stroke, Ws = 20N Ws = (2kgs) 20N 144.5 91 FB1 = 20 (1+ ) = 51.76N Replacement parts: Seal kits 32 includes order No. from to , 40 100 includes from to FB1 = 51.76N 310N (from table)

REA/REB

Nil 1 pc.

Sine Rodless Cylinder Series REA/REB

PW QW W N X WS Q Z L T M Nil TN TF REAR10 19.5 15 39.5 14 20 68 80 8 M3 x 0.5 4.5 3.5 26 M5 x 0.8 4 38 9 REAR15 21 18 54.5 18 25 98 84 7 M4 x 0.7 6 4.3 32 M5 x 0.8 5 53 14 REAR20 20.5 22 64 40 17 NPT 1/8 107 95 7 M4 x 0.7 7 5.6 38 Rc 1/8 5 62 11 REAR25 21.5 28 72 40 20 NPT 1/8 105 7 117 M5 x 0.8 6.5 5.6 43 Rc 1/8 G 1/8 6 70 15 REAR32 24 35 79 26 50 NPT 1/8 116 130 7 M6 x 1 8.5 7 54

REA/REB

72 97 REAS20 Rc 1/8 40 70 90 90 38 73 16.5 25.5 87 115 REAS25 Rc 1/8 40 70 100 90 42 73 16.5 25.5 0.5 1 97 115 REAS32 Rc 1/8 40 75 122 110 50 91 18.5 28.5 0.5 1 119 138 REAS40 Rc 1/4 65 105 145 120 64 99 20.5 35.5 1 1 142 155 PA dimensions are for split from center. 10-2-34 34 Sine Rodless Cylinder Slider Type: Slide Bearing Series REAS Proper Auto Switch Mounting Position (Detection at

REA/REB

72 97 REAS20 Rc 1/8 40 70 90 90 38 73 16.5 25.5 87 115 REAS25 Rc 1/8 40 70 100 90 42 73 16.5 25.5 0.5 1 97 115 REAS32 Rc 1/8 40 75 122 110 50 91 18.5 28.5 0.5 1 119 138 REAS40 Rc 1/4 65 105 145 120 64 99 20.5 35.5 1 1 142 155 PA dimensions are for split from center. 10-2-34 34 Sine Rodless Cylinder Slider Type: Slide Bearing Series REAS Proper Auto Switch Mounting Position (Detection at

/

port 2 port 1 port 2 port 1 port 2 port r r r !

155

2 3/4 1 3/8 1/2 3/4 1 3/8 1/2 3/4 1 4.6 6.5 11.8 18.3 3.5 4.8 7.1 11.0 1.25 2.7 4.5 7.3 0.5 MPa 1.0 MPa 1.6 MPa ( ): Mass including the bracket Add the mass of an auto switch additionally.

•

17 1 0 1 0 Pin: ;12d9 :g. ~ Hole: 12HS +Cg27 Clevis width + 0.3 78.5+StrOke 34.5 L CKS1A:16.5 0 40 ZZ+Stroke + 0 7 ..'2.7 CKSIB. 1 9.5+0.3 i/ Plug across flats 19 / IA .,B w WC WS I ZZ *L N S F GA GS l* H Bore (mm) I 5 37.5 37.5 225 52 47 97 52 53.5 40 44 55 69 30 8.5 52 52 52 , 97 i 49 58.5 7 43.5 43.5 I 225 60 58 30 8.5 r50 63 T 5.5 49.5 495 I 225 74 72 97 49 56.5 30 10.5 ~ Possible 1