Table of Contents

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

V

) NVR1220-N02 (1/4 NPT) VR1210-01 (1/8 PT) VR1220-02 (1/4 PT) (N)VR1210 (N)VR1220 Courtesy of Steven Engineering, Inc. !

0.01

Metal Case 1 10 SFD 1 02 Metal case suitable for an atmosphere exposed to organic solvents and chemicals HAA HAW AT Clean air filter Port size Connection size Rc 1/4 NPT 1/4 G 1/4 Symbol IDF IDU Size Max. flow rate 100 L/min (ANR) 02 N02 F02 Symbol 1 Specifications IDF FS The SFD2 is not applicable. The metal case is not available with a clean One-touch fitting.

A

1 Drain Port 3/4 3/4, 1 D I M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

Dual Speed Controller with One-touch Fitting Series ASD 1

Port size 10 8 6 12 1/8" 1/4" 3/8" 5/32" 3/16" 5/16" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 x 0.8 R 1/8 R 1/4 R 1/4 R 3/8 R 1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT 1/8 NPT 1/4 NPT 1/4 NPT 3/8 NPT 1/2 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure

ASD

Metric Inch Model Port size 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 X 0.8 R(PT)1/8 R(PT)1/4 R(PT)1/4 R(PT)3/8 R(PT)1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT1/8 NPT1/4 NPT1/4 NPT3/8 NPT1/2 Specifications Proof pressure 1.5MPa Max. operating pressure 1MPa JIS symbol

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

8 12.7 NPT 1/8 AS220-F01-SD G 1/8 AS220-01-SD Rc 1/8 12 14.3 R 1/8 14.6 7.2 18 34.7 13.2 1.2 31.6 33 AS220-N02-SD NPT 1/4 17.5 NPT 1/4 AS220-F02-SD G 1/4 AS220-02-SD Rc 1/4 17 18 R 1/4 19.5 7.2 27.2 40.2 17.5 1.2 36.7 72 AS320-N02-SD NPT 3/8 NPT 1/4 AS320-F02-SD G 3/8 AS320-02-SD Rc 3/8 19 22.5 R 1/4 24.3 9.8 30 54.8 21.9 1.2 49.3 123 AS320-N03-SD NPT 3/8 NPT 3/8 AS320-F03-SD G 3/8 AS320-

ISE70/75/75H

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

*1 M SI unit only*2 P Units selection function (Initial value psi)*1 Symbol Description N NPN open collector 1 output P PNP open collector 1 output *1 Under the New Measurement Act, switches with the units selection function are not permitted for use in Japan. *2 Fixed unit: kPa, MPa y Option 2 t Option 1 r Piping specification Symbol Description Nil None Symbol Description Nil Without lead

Booster Regulator/Air Tank

Description 1 Piston seal 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 Mounting screw 6 12 7 Cover C assembly 1 Grease pack 1 2 1 2 1 The grease pack has 10 g of grease.

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

PSE540/560

Port size ISA2 R 1/8 (With M5 female thread) R 1/4 (With M5 female thread) Rc 1/8 NPT 1/8 (With M5 female thread) NPT 1/4 (With M5 female thread) URJ 1/4 TSJ 1/4 01 02 C01 N01 N02 A2 B2 IS Option/Part No. Output specifications Part no. Note Connector for PSE200 Description ZS-26-E-4 ZSM Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 1 pc. ZS-28-C 1 pc.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size Model Port size Pilot port 6 8 10 12 1/4" 5/16" 3/8" 1/2" ASP330F-01 ASP430F-02 ASP530F-03 ASP630F-04 ASP430F-F02 ASP530F-F03 ASP630F-F04 ASP330F-N01 ASP430F-N02 ASP530F-N03 ASP630F-N04 R 1/8 M5 x 0.8 R 1/4 Rc 1/8 R 3/8 Rc 1/8 R 1/2 Rc 1/4 R 1/4 G 1/8 R 3/8 G 1/8 R 1/2 G 1/4 NPT 1/8 10-32 UNF NPT 1/4 NPT 1/8 NPT 3/8 NPT 1/8 AS NPT 1/2 NPT 1/4 Note

PSxx-OMG0005CN

2030 10 1% * -7No.PS-OMG0005CN-E 0 01 28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V) 01 R1/8(M5) 28 (420mA) 02 R1/4(M5) C01 Rc1/8 N01 NPT1/8(M5) N02 NPT1/4(M5) A2 URJ1/4 B2 TSJ1/4 ZS-28-C 1 Rc1/4 ZS-31-X175 1 NPT1/4 ZS-31-X186 1 Rc1/8 ZS-31-X188 1 NPT1/8 ZS-31-X189 1 15[V]F.S.=514[V] (1F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1K 1M A/D 5V A/D