Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

VFR

/4 0 1 0 1 0 1 0 1 0 1 0 1 0 1 0 1 2 position double: VFR521 -E, VFR521 -D(Z) 3 position closed center: VFR531 -E, VFR531 -D(Z) 3 position exhaust center: VFR541 -E, VFR541 -D(Z) 3 position pressure center: VFR551 -E, VFR551 -D(Z) [For Rc 3/4] Rc 1/8 External pilot port 209 100 116 [134] 47.5 [43.5] Rc 1/8 (PE port) 9 [20] Rc 1/8 (PE port) 8 Manual override (Non-locking) 2 11 [13] A B 2 [

VZS

M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

One-touch fitting: SYJ5120-l llG H C4 C6 10 10.6 2-M3 X 0.5 (Mounting screw) 3.5 4 11 2-2.6 15 (Mounting holes) 19.5 58.2 16 3.5 62.3 (GZ, GS: 63.3) [63.3] A B 10.6 2-One-touch fitting (A, B port) Apricable tube C4: T0425 C6: T0604 R1 P C4: (3) C6: (3.2) 32.3 R2 21 5-M5 X 0.8 (Piping port) [ ] for AC Other dimensions are the same as the grommet style

5 Port Solenoid Valve SY Series

One-touch fitting for 4 C4 SY3000 2 position double One-touch fitting for 6 C6 One-touch fitting for 4 C4 2 One-touch fitting for 6 C6 For DC SY5000 One-touch fitting for 8 C8 5 24 VDC 6 12 VDC SY9000 has no bracket.

SYJ300/500/700

C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct

Rubber seal 5 Port Solenoid Valve Series SYJ5000

2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 20 20 20 2-2.6 (For mounting) (2.3) (2.3) 20 (2.3) 23 23 23 23 27 Refer to the page 91 for dimentions with connector cable. 28 Series SYJ5000 2 Position Double [ ]: AC G H Grommet (G), (H): SYJ5220-M5 Built-in one-touch fitting: SYJ5220G H C4, N3 C6, N7 G: Approx. 300 H: Approx. 600 (Lead wire length) 87.2 [91.6] 43 3.5 11 5 B

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Manifold base) SYJ512-5LZ-M5 .2 pcs. (Valve) SYJ500-10-1A .1 pc. (Blank plate ass'y) VQ SS3YJ5-41R-03-C6 .1 pc. (Manifold base) SYJ514R-5G .2 pcs. (Valve) SYJ500-10-3A . 1 pc.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

) (3.6) (3.6) (3.6) (3.6) 2-3.2 (For mounting) 2-3.2 (For mounting) 25 25 25 28 28 28 28 Refer to the page 91 for dimentions with connector cable. 52 Series SYJ7000 2 Position Double [ ]: AC G H G H C6, N7 C8, N9 Grommet (G), (H): SYJ7220-01 Built-in one-touch fitting: SYJ7220G: Approx. 300 H: Approx. 600 (Lead wire length) 107.4 [111.8] 63 3 13 B A B A Manual override 17 35 17 2-3.2 (For

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

C6 1/8 Note) The values are for individually operated 2 position type manifold bases.

Fieldbus System

/5 E B 2 B B 2 B 2 B 2 2 40.2 13.2 21.6 A 4 A 4 A 4 A 4 A 4 18 10.6 13.6 (For DIN rail mounting) (17.8) One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.: 8, 5/16" (Pitch) P = 10.5 11.8 18.3 15.5 Note 1) These figures show the SS5Y3-10S6Q32-05D-C6.

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

A

X B 5 _ C D N R O D T H R E A D R O D B O R E S I Z E S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 6 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/8 2 2-1/2 Inches Example: 04 = 4 Stroke E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z S T R O K E Hundredths Of An Inch

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

How to Order Manifold Assemblies (Example) Double solenoid (24VDC) SY3260-5G-C6 (2 sets) Cylinder port size M5: M5 x 0.8 Example Single solenoid (24VDC) SY3160-5G-M5 (2 sets) Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) SS5Y3-60-04U R D side Port R C8: With 8 One-touch fitting P Stations 1 2 n Port P C8: With 8 One-touch fitting U side SS5Y3-60-04U 1 set (type

3 Port Solenoid Valve Metal Seal Series VZ200 1

length 2-2.8 mounting hole VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP VG VP S070 Pilot EXH Locking type manual override VQ VKF VQZ 1 2 DIN terminal: VZ2 2-D(Z)-M5 1 2 L plug connector: VZ2 2-L(Z)-M5 VZ 300 (Lead wire length) VS VFN With light/surge

smcmaintenancepartslist

Contents Contents @1 @2 @3 @4 Piston seal MGP12-Z-PS MGP16-Z-PS MGP20-Z-PS MGP25-Z-PS MGP32-Z-PS MGP40-Z-PS MGP50-Z-PS MGP63-Z-PS MGP80-Z-PS MGP100-Z-PS 12 16 20 25 32 40 50 63 80 100 Rod seal Set of left nos. @1, @2, @3, @4 Set of left nos. @1, @2, @3, @4 NBR Gasket A Gasket B Seal kit includes @1 to @4. Order the seal kit, based on each bore size.

VZ100/300/500

40-2 40R-1 40-1 Model Manifold type Single base/B mount 21R-1 P(SUP)/R(EXH) Common SUP/Common EXH Valve stations 2 to 20 stations A port porting specifications Location Valve Bottom Top Rc Base Direction 1(P), 3(R) port Side 1 8 Rc 1 8 Rc 1 8 M5 x 0.8 M5 x 0.8 M5 x 0.8, Rc 1/8, C4 (One-touch fitting for 4), C6 (One-touch fitting for 6) M5 x 0.8 M5 x 0.8 Port size 2(A) port 1 8 X port Note

Secondary Batteries

+ t Note 2) Note 2) Note 2) Note 2) Nil Z Note 2) Pressure unit c Name plate and caution plate for bowl in imperial units: MPa Name plate and caution plate for bowl in imperial units: psi, F Note 1) A bracket is not assembled and supplied loose at the time of shipment.

SZ3000

Stations...3 2 1 Serial unit (D side mounting) SS5Z3-60SRID-05U-C6 . 1 set (manifold part number) SZ3160-5LOZ-C6. 2 sets (single solenoid part number) SZ3260-5LOZ-C6. 3 sets (double solenoid part number) The symbol indicates built-in.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(Example) SS3YJ5-20-03 . 1 set (manifold base) SYJ512-5LZ-M5 . 2 sets (valve) SYJ500-10-1A . 1 set (blanking plate assembly) SS3YJ5-41R-03-C6 . 1 set (manifold base) SYJ514R-5G . 2 sets (valve) SYJ500-10-3A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.