PSxx-OMU0005CN

-15No.PS-OMU0005CN-C (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -16No.PS-OMU0005CN-C (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S/-

Dual Speed Controller with One-touch Fitting Series ASD 1

8 w @1 !4 !3 !8 w @1 !4 !3 !8 w @1 !4 !3 r e o y !5 !6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Note Description U seal U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Gasket Spacer ASD230F only Material HNBR HNBR POM, Stainless steel (1) Description No. !1 !2 !3 !4 !5 !6 !7 !8 !

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-06 AS121FG-U10/32-07 18.3 23.1 11.7 13.5 18.1 22.9 11.6 12 6 1/4" 13.5 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 14.3 13.5 20.4 27.5 11.6 6 5/32" 14.2 31.1 36.1 12 32.1 27.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 12.7 14.3 23.1 30.2 19 18.5 25.3 32.4 15.2 11.4 36.1 8 3/16" 31.1 32.1 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01

100

ZL1 Series RoHS How to Order ZL 1 12A Without valve ZL 1 5 M Z D A M L 12A K1 With valve Max. suction flow rate: 100 L/min (ANR) q w t o u i e r y !0 !1 !

Vacuum Pad: Ball Joint Type

Pad diameter 10 10 Vacuum entry port (Refer to Table (1) for applications.) 13 13 16 16 20 20 Table (1) Vacuum Entry/Mounting 25 25 32 32 Mounting 40 40 10 to 16 20 to 50 Pad dia. 50 50 M10 x 1 M14 x 1 Thread dia./ Port size Connection Symbol A10 A14 B5 M5 x 0.8 Pad type B01 Rc 1/8 Female thread Vacuum entry F Ball joint type N01 NPT 1/8 T01 NPTF 1/8 04 4 tube Material One-touch fitting

ARJ1020F

1 !5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

IR1000/2000/3000

VE Ozone resistant VY1 IRM 10 3 G 4 For High/Low Temperature Environments Set pressure and quantity Stations G 0 1 2 0.2 MPa setting 1 to n pcs. 0.4 MPa setting 1 to n pcs. 0.8 MPa setting 1 to n pcs. 2 2 stations Standard model no.

ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

IR10-OM00007

/ M Pa/ m M Pa/ ( S) () m 2 1 1 m N MPa M Pa N m (A) / N ( B) /N () m 2 ( A) m 2 N -5- 1 SUP OUT 2 %F.S. 3 , 4 R B(P36201023) G 2 3 Rc,F N IR1000G33-2-01 G33-P2-N01-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Description Material Note q w e r t y u i o !0 !1 !2 !3 !4 !

IR30-OM00013

Rc1/8 [2 ] 0.64 (1) (0.1MPa) (2) IR3000:0.2MPa (3)2 ON-OFF () (4) 4- (C) (C) (A) (A) (C) (A) (C) BLEED SUP OUT SU P N/ M Pa/ ( S) N N m 1 1 M Pa/m ( ) m 2 M Pa M Pa (A) /N (B) / ( ) m 2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03

•

W~igh L2 L..3, ~L ~ "A1 '" , 'A2 oM II'. I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M ..

ASD

8 w @1 !4 !3 !8 w @1 !4 !3 !8 w @1 !4 !3 r e o y !5 !6 q r i o e y !5 !6 !0 y i o e u r !9q !7 !0 !1 i !2 t u !7 @0 !1 q !2 t !6 !5 !7 !2 t !0 !1 Component Parts Component Parts Note Description U packing U packing Cassette Packing O ring O ring O ring O ring O ring Gasket Spacer ASD230F only Material NBR NBR Description No. !1 !2 !3 !4 !5 !6 !7 !8 !

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: -, Liquid contact parts material: Resin + Metal, Mounting Hole: Presence,

Miniature Regulator Series ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

NARM Series

stations) Regulator (Except manifold) (80 X n) + 23 Common IN 1 8 1 8 .13 (57) NARM1000 (79 X n) + 25 Individual IN 1 8 1 8 Common IN (188 X n) + 43 1 4 1 8 .3 (136) NARM2000 Individual IN (187 X n) + 45 1 8 1 8 Space Saving How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.