Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

1

n = 4 to 24 n = 1 to 3 n = 4 to 24 n = 1 to 3 42.3 62.5 n: Number of stations 3 5 4 3 2 1 1 3 1 2 3 4 5 n: Number of stations Pitch 10.5 Pitch P = 16 (SY5000) P = 19 (SY7000) Make sure to mount in the right direction. Make sure to mount in the right direction. (20) SY5000: SY50M-86-(N) SY7000: SY70M-86-(N) Name plate is the number of stations (1 to 24).

V

5 ~ 60C / 40 ~ 40F Temperature Rc(PT) 1/8, 1/4 Port Size 01: 25mm2 02: 27.5mm2 Effective Area Model Port Size NPT A B C NAK2000-N01, 02 18, 14 50 25 22 NAK4000-N02, 03, 04 14, 38, 12 67 36 36 NAK6000-N06, 10 34, 1 95 50 50 H O W T O O R D E R ( N ) A K 2 0 0 0 S E R I E S 000 (N)AK P O R T S I Z E M O D E L 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 P O R T T H R E A D 2 1/4 4 1/2 6 1 Nil Rc

I

R S E R I E S V Y D I M E N S I O N S S E E N E X T P A G E VY1 O O P T I O N T H R E A D B Bracket F Foot (A and 1 body sizes only) G Gauge (not available on D body) N Silencer P I L O T 0 Internal 1 External (not on VYID00) Nil Rc(PT) T NPTF F G(PF) N NPT) B O D Y S I Z E P O R T S I Z E Mounting Type Symbol Symbol P,A port R port Cv Hysteris Sensitivity Repeatability Notes: 1.

Vacuum

0 . 8 , M 6 x 1 Nr4 x 0.7, N,ls x 0.8 s1O-s16 M 5 x 0 . 8 , M 6 x 1 Mls x 0.8, M6 x 1 a20-a32 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 ..aAO=s5O', M 6 x 1 , M B x 1 M 6 x 1 , M 8 x 1 . 2 5 \4q,r'tirc How to Order ZPY Pad dia.

Vacuum

See example on page 14. 0 1 ^ oo7 J 005 fl o.oe E ,* c', 001 .F o.ooz d0.005 _a z I z 0.003 0.002 I it E 0 001 0.0007 0.0005 0 . 2 0 . 3 0 5 0 . 7 I 2 3 5 7 1 0 Length of Tube L (m) 0 5 1 0 1 5 m 0 1 2 3 4 5 6 Suclion Flow Rals \ !

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC

SMC Electronic Switch Series Variations

Water will not enter under stated conditions of pressure and time. water tight 7 Protection against indefinite immersion in water under a specified pressure. under water 8 Pressure Units Table 17 Units kPa MPa bar kgf/cm2 atm mmH2O or mmAq mmHg or Torr Pa (N/m2) PSI 1 X 103 1 X 106 1 X 105 1.0197 X 105 9.8692 X 106 1.0197 X 101 7.5006 X 103 1.4500 X 104 1 1.4503 X 101 1 X 103 1 X 103 1 X

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2, Number of Outputs: 1, Analog Voltage Output(V): [DC1-5V] 1-5V, Power Supply Type: DC, Power Supply Voltage(V): [24] 24±10%, Pipe Connection Direction: 2-way, Connecting Tube Diameter: -, Liquid contact parts material: Resin + Metal, Mounting Hole: Presence,

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

ZL3-OM00801

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Table of Contents

(N specifications) Maximum operating pressure 1 MPa max.

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

25

Symbol Nil N F Option Option Symbol Applicable actuation Built-in solenoid valve Air Operated PB1013A Air operated Port size Port size 1/8 Nil B N None With foot With silencer Symbol 01 When option is more than one, suffix in alphabetical order.