CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

Air Fittings & Tubing

T (M) L2 L1 M Nylon Urethane 1 4 13 13 M12 X 1 3.2 KQ2E23-02 3.4 2.9 17 14 14 31.5 15 15.5 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 M12 X 1 4 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 15 35 KQ2E04-02 17 KQ2E06-01 11 28 31.5 30 15 17 M14 X 1 19 KQ2E06-03 17 33.5 29 KQ2E06-02 15 6 13.1 10.4 17 17 17 KQ2E08-01 7.5 27.5 28 26.1 18.0 8 18.5 19 KQ2E08-02 13 33 27 17 M16 X 1 19 KQ2E08

smcmaintenancepartslist

) 04 T-interface Note 6) Note 7) Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Note 1) in part numbers for a round

A

28 80 22 Courtesy of Steven Engineering, Inc. !

KJ

KQ2L07-03S KQ2L09-01S KQ2L09-02S KQ2L09-03S KQ2L11-02S 27.5 29.5 24.5 28.5 30.5 29.5 20.5 13.2 10 28 29.5 28 30 31.5 32.5 14 17 12 14 17 17 3 8 Connection thread Applicable tubing 1 8 1 4 3 8 5 16 23.5 15.2 12 6 18.5 1 4 3 8 KQ2L11-03S 31.5 17.9 34 17 33 59 28 3 8 7 21 25.5 17 1 2 1 4 KQ2L11-04S KQ2L13-02S 35.5 31.5 36.5 36.5 22 9 17 1 2 22 3 8 KQ2L13-03S 33.5 21.7 38.5 36 62 28 17 9.6

SY

Grommet (G), (H): SY3240(R)-01 Scale: 35% G H With interface regulator 141 15 68.5 [75] 65.6 68 32.5 24.5 With plug (12.5) (37) 41 L type plug connector (L): SY3240(R)-L-01 M type plug connector (M): SY3240(R)-M-01 Grommet .

Table of Contents

-ASD330F-01-08 10-ASD230F-M5-06 2.

F

21 7 64 1/2 1/4 KQY13-35S 17.46 21.7 17 28 31.5 36.5 22 9 34 1/2 3/8 KQY13-36S 17.46 21.7 17 28 33.5 38.5 22 9.6 43 1/2 1/2 KQY13-37S 22.23 21.7 17 28 37.5 40 22 9.6 69 Courtesy of Steven Engineering, Inc. !

VFS

Description Material Connection fitting A Connection fitting B Gasket A Gasket B O-ring O-ring O-ring Adapter plate Adapter plate assembly AXT625-7A AXT625-28-3A For 01 For 01T For 01T1 For 01C For 01F For 01SU For 01 01T 01SU Steel plate AXT625-4-1 AXT625-5 AXT625-17 AXT625-16 18 x 15 x 1.5 10.5 x 7.5 x 1.5 8 x 5 x 1.5 AXT625-6 AXT625-28-1A (Terminal section with adapter plate) AXT625-28

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

SX

SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02 AN110-01 SZ Conditions [When using SGP (Steel pipe)] Base mounted Series MB

Speed Controller with Indicator

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

Modular F.R.L. Unit

AC20C G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 Y200 IS1000M-20 Model Description AC25C G36-10-01 GC3-10AS G36-2-01 GC3-2AS AC30C G36-10-01 GC3-10AS G36-2-01 GC3-2AS AC40C G46-10-02 GC3-10AS G46-2-02 GC3-2AS AC40C-06 G46-10-02 GC3-10AS G46-2-02 GC3-2AS Round Square embedded type 1.0MPa Note 1) Note 2) Pressure gauge Attachments Accessories Round Square embedded type N.O.

ARM10/11

x n)+36 18 28 28 5.3 F.R.L.

ARM10/11

x n)+36 18 28 28 5.3 F.R.L.

VQZ1000/2000/3000

AN110-01 AN200-02 AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 2-7-5.

2/3 Port Valve

L 108 117 130 135 N 93 102 N 79.5 87.5 1 4 3 8 , 50 63 80 90 35 35 40 40 52 60 68 73 25.5 33 41 44 11 14 18 21 6 7 7 7 89 97 112 117 25 25 28 28 67 75 87 92 40 52 65 70 7.5 8.5 9 9 22 28 36 42 5.5 6.5 6.5 6.5 24 33 42 47 1.6 2.3 2.6 2.6 26 30 38 43 14 17 22 22 23 23 25.5 25.5 28 35 43 45 1 2 3 4 1 101.5 115.5 106.5 120.5 4.1-82 VXZ22/23 Conduit: C FN.C.E Normally closed EN.O.F Normally open

LEC-OM02704CN

C 1. ##0064 ## 00 01 1 02 2 03 3 62 62 63 63 64 64 2. $$$0255 3. ** 4.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

5/16" 35 36 + 28 25 16.1 31.5 [38.5] 21 1.6 P R2 R1 18 1.6 (PE port) 1/8 (P, R1, R2 port) 27.2 L plug connector (L): SYJ7220-L-01 M plug connector (M): SYJ7220-M-01 DIN terminal (D): SYJ7220-D-01 M8 connector (W0): SYJ7220-W0-01 Approx. 300 (Lead wire length) 65 31.5 [38.5] Max. 10 57.5 16.1 46.2 31.1 M8 x 1 36 18.5 Approx. 300 (Lead wire length) 42.6 [49.6] 2-3.2 (For mounting) 2-3.2 127.2

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC VZ L plug connector (L): SYJ7l2-lLll-01 M plug connector (M): SYJ7l2-lMll-01 VS 11 23.5 11 23.5 13 1.5 13 1.5 A A 25.5 49.7 25.5 49.7 66.9 70.9 [72.2] 300 80.5 (Lead wire length) (Lead wire length) 2-3.2 (Mounting holes) 300 2-3.2 11 23.5 (Mounting holes) 11 23.5 45.1 [51.6] 34 [40.5] 31.1 31.1 21.6 21 28 25 28 21 25 15 15 65.7 10 18 65.7 10 18 [ ] for AC Other dimensions are