5

Applicable bore size (mm) A1 A2 E1 L1 MM NDH10 NX RR1 U1 Low Speed I-12A 125 8 54 46 100 M30 x 1.5 25 +0.084 0 32 0.1 0.3 27 33 IY-12 125 25 0.065 0.117 79.5 69.5 5 4 4 x 40 I-14A 140 8 54 48 105 M30 x 1.5 28 +0.084 0 36 0.1 0.3 30 39 IY-14 140 28 0.065 0.117 86.5 76.5 5 4 4 x 40 MQ I-16A 160 8 60 55 110 M36 x 1.5 32 +0.1 0 40 0.1 0.3 34 39 IY-16 160 32 0.080 0.142 94.5 84.5 5 4 4 x 40 *

ZR

(Individual spacer) Fill the number With reference from valve side, the third station from right side 13-3-28 28 Series ZR Large Size Vacuum Module: Ejector System Manifold/System Circuit Example When not using individual air pressure supply When using indivisual air pressure supply Ejector 1 Ejector 2 ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

17

D 40 55 74 H 3.2 4.5 4.5 J 35 40 47 MM 5.5 6.5 6.5 A 63 76 92 B 78 94 112 C 39 47 56 F 100 124 144 Ea 1 1 1 Eb 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 55 60 72 22 22 32 M6 x 1 M6 x 1 M8 x 1.25 5.5 5.5 6.5 12 12 16 9.5 9.5 11 Mounting direction (2) B1 28 40 44 Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Applicable cylinder MY1B25 MY1B32 MY1B40 A2 B2 C2 D2 F2 K2 Q2 Part

CRQ2

Q1= M L1 (3 x P) C1 = C C2 = C Y = C2 Y = L2 = C2 = C L2 = L2 (3 x P) L1 = X = Q2 = M D2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 D2 Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 L2 max Y Y Y 6 to 9 7.5 to 10 Size 10 15 Size 10 15 Size 10 15 L1 max X 2 X 2 X 8 to 18 9.5 to 20 L2 max Y Y 3.5 to 4.9 3.5 to 5.9 11-8-13 14 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern

MXW Series Long Stroke Slide Table

My Mp W W L2 B2 W C2: Correction value for moment center distance L1 A2 L3 C2 My (mm) A2: Correction value for moment center distance MXW 8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 B2: Correction value for moment center distance (mm) Mr (mm) W Mp 10 10 14 20 28 W MXW 8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 MXW 8 MXW12 MXW16 MXW20 MXW25 W Dynamic moment Moment due to impact of load at end

Electric Actuator/Slider Type

T1 = V/a1 = 300/3000 = 0.1 [s], a1 a2 T3 = V/a2 = 300/3000 = 0.1 [s] T = T1 + T2 + T3 + T4 [s] Time [s] T2 = L 0.5V(T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

MXW

Mr My Mp W L2 B2 W W C2: Moment center position distance compensation amount My L1 A2 L3 C2 (mm) B2: Moment center position distance compensation amount MXW8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 A2: Moment center position distance compensation amount Mr (mm) (mm) W Mp MXW8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 MXW8 MXW12 MXW16 MXW20 MXW25 10 10 14 20 28 W W 8-7-2 3 Long Stroke Slide Table

Air Slide Table Series MXW

Mr My Mp W L2 B2 W W C2: Moment center position distance compensation amount (mm) L1 A2 My L3 C2 A2: Moment center position distance compensation amount (mm) B2: Moment center position distance compensation amount (mm) MXW8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 Mr W MXW8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 Mp MXW8 MXW12 MXW16 MXW20 MXW25 10 10 14 20 28 W W 148 Series MXW Air Slide Table

Environment

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Rotary Actuator/Vane Style Series CRB2

(If not specifying dimension C2, indicate instead.)

CRBU

(If not specifying dimension C2, indicate instead.)

A

28 80 22 Courtesy of Steven Engineering, Inc. !

1

Stopper ZZ d c a b Bore size (mm) Available for use stroke Bore size (mm) G ML MK MI MA MT MH L A B CA2 40 50 63 80 100 M14 x 1.5 181 46 22 32 12 16 20 25 32 40 50 63 80 100 14 19 7 25 11 5 24 3.5 (37.4) 57.7 (64.9) 30.2 5 to 30 206.5 58.5 28 42 14 19 7 28 11 5 24 3.5 (41) 58.5 (68.5) 31 M18 x 1.5 CS1 210 54 28 42 20 22.5 10 36 17 8 29 4.5 (46) 67.5 (79.5) 34 Stroke c + Stroke 257 70 35 55

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

90

Note) When ordering ejector without valve, select Nil for mounting. 04 KJH C2 Port size 04 06 03 07 !

Slider Type Ball Screw Drive/11-LEFS Series

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time [s] T = T1 + T2 + T3 + T4 [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

Vacuum Unit Ejector / Vacuum Pump System

Common EXH port Common PS/PD port Application ZZK2-A1 Yes PS = PD Ejector complex exhaust PV = PS = PD ZZK2-A1-D Yes PS PD Ejector complex exhaust PV = PS PD Ejector individual exhaust PV = PS = PD ZZK2-A2 ZZK2-P2 None PS = PD Vacuum pump system PV PS = PD Ejector individual exhaust PV = PS PD ZZK2-A2-D ZZK2-P2-D None PS PD Vacuum pump system PV PS PD When PS = PD, the common PS/PD

Vacuum Unit Ejector / Vacuum Pump System

Common EXH port Common PS/PD port Application ZZK2-A1 Yes PS = PD Ejector complex exhaust PV = PS = PD ZZK2-A1-D Yes PS PD Ejector complex exhaust PV = PS PD Ejector individual exhaust PV = PS = PD ZZK2-A2 ZZK2-P2 None PS = PD Vacuum pump system PV PS = PD Ejector individual exhaust PV = PS PD ZZK2-A2-D ZZK2-P2-D None PS PD Vacuum pump system PV PS PD When PS = PD, the common PS/PD

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(If not specifying dimension C2, indicate instead.)

Air Fittings & Tubing

17.46 12.7 14.29 17.46 1 4 28 13.2 10 20.5 17 4.6 30 28 30 5 16 15.2 12 23.5 18.5 6 31.5 31.5 6 32.5 17.46 17.9 17 25.5 21 3 8 34 7 36.5 22.23 36.5 9 17.46 38.5 21.7 17 28 1 2 22 9.6 40 22.23 Reference dimensions after NPT thread installation.