Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal
Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector), Lead Wire: Lead Wire, Orifice Size: 06 (0.6mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)
Voltage: 24VDC, Electrical Entry: M Plug Connector, Lead Wire: Lead Wire, Orifice Size: 0.6mm, Port Size: w/Sub-Plate M5x0.8, Body/Seal Material: Body C36, Seal FKM
Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector), Lead Wire: Lead Wire, Orifice Size: 03 (0.3mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)
a1 B c d d1 e e LECSS2-T5LECSS2-T7 LECSS2-T8 6 6 1560.5 6 M5 b LECSS2-T9 c 12 12 1560.5 6 420.3 M5 d a 4.9 /LECS / 1./ YES [ ]NO [ ] 2.
When air with high purity is required, please either mount the above separator on the outlet side or use a made-to-order product (refer to page 14-19-50), which is provided with a micro mist separator (Series AWD) instead of a regulator. 3.
Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer
4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2-One-touch fitting 2-One-touch fitting 2n1-M5 x 0.8 (A, B ports) (A, B ports) Applicable tube O.D.: 4 6 (X, PE ports) Applicable tube O.D.: 6 (L4) L3 Applicable connector: D-SUB equivalent { } JIS-X-5101 MIL-C-24308 Connector case attachment lever (both sides) (3.2) 101.2 9 3.1 Lateral connector entry 8 36.3 5.5 35 6.5 18 28.8 34
07 09 1 1 1 3 06 08 1 0 1 2 1 6 ;il H,r ,u x,N 1 2 m m Double universal male elbow 10 32 UNF Thread 1/16" NPT 1/8' NPT l+ trtpr H L' w' T' Y U' E Hex. socket head universalelbow 33 34 Extended Different dia. branch "Y" Double branch "Y" M5 M6 01 02 03 04 M5 x 0.8 N46 x 1.0 PT1/8 PI1/4 PT3/8 Pr1/2 a a a a a a a a a a a a a a a a a a a a a a r ) a a a a a a a a The use of compact spacer with
(A) 2 Port size {2(A) port} 1 1 (P) 3 (R) One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 M5 thread C3 C4 C6 M5 Note) Refer to p.2.10-18 for inch-size One-touch fitting.
a guide, use a solenoid valve with a large effective area for the unlocking solenoid.
Cable length: 2 to 5m Note) The controller unit includes a controller connector for use with CN1 and CN2.
D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away
VFN 4-14-13 Body Ported 14 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ12Stations C Grommet (G) (5.5) (35) (11) 27.5 2-4.5 mounting hole n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P = 10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations Courtesy
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard / Low Vacuum Compatible, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard / Low Vacuum Compatible, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal
Voltage: 6 (12VDC), Electrical Entry: M (M Plug Connector), Lead Wire: Lead Wire, Orifice Size: 04 (0.4mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)
Voltage: 12VDC, Electrical Entry: M Plug Connector, Lead Wire: w/o Lead Wire, Orifice Size: 0.4mm, Port Size: w/Sub-Plate M5x0.8, Body/Seal Material: Body C36, Seal FKM
Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector), Lead Wire: Lead Wire, Orifice Size: 04 (0.4mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)