LEC-OM07605CN

a1 B c d d1 e e LECSS2-T5LECSS2-T7 LECSS2-T8 6 6 1560.5 6 M5 b LECSS2-T9 c 12 12 1560.5 6 420.3 M5 d a 4.9 /LECS / 1./ YES [ ]NO [ ] 2.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(A) 2 Port size {2(A) port} 1 1 (P) 3 (R) One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 M5 thread C3 C4 C6 M5 Note) Refer to p.2.10-18 for inch-size One-touch fitting.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Dimensions A B VQD A VQZ1000 VQZ2000 VQZ3000 67 81 93 35 43 52 VZS VFS Individual EXH spacer VVQZ1000-R-5-M5 VVQZ2000-R-5-01 VVQZ3000-R-5-02 VS M5: VQZ1000 Rc(PT)1/8: VQZ2000 Rc(PT)1/4: VQZ3000 VS7 B Used to form a separate exhaust port for an interior manifold station or stations.

Title not found

07 09 1 1 1 3 06 08 1 0 1 2 1 6 ;il H,r ,u x,N 1 2 m m Double universal male elbow 10 32 UNF Thread 1/16" NPT 1/8' NPT l+ trtpr H L' w' T' Y U' E Hex. socket head universalelbow 33 34 Extended Different dia. branch "Y" Double branch "Y" M5 M6 01 02 03 04 M5 x 0.8 N46 x 1.0 PT1/8 PI1/4 PT3/8 Pr1/2 a a a a a a a a a a a a a a a a a a a a a a r ) a a a a a a a a The use of compact spacer with

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VFN 4-14-13 Body Ported 14 Series VQZ100/200/300 Dimensions: VQZ100 VV3QZ12Stations C Grommet (G) (5.5) (35) (11) 27.5 2-4.5 mounting hole n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread (4.5) (7.5) 20 DIN rail clamp screw 5.5 U side n Manual override 5 A 2 A 2 A 2 A 2 4 P = 10.5 (L4) (L3) L1 L2 3 2 1 16.5 Stations Courtesy

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal

Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector), Lead Wire: Lead Wire, Orifice Size: 04 (0.4mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)

Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector), Lead Wire: Lead Wire, Orifice Size: 03 (0.3mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)

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a guide, use a solenoid valve with a large effective area for the unlocking solenoid.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread Grommet (G) U side n Manual override 5 SY B 4 4 SMC SMC 2 A SYJ (L4) (L3) L2 L1 5 18 P=16 B B B 4 4 4 3 SMC SMC 2 2 2 A A A SX 2 SMC SMC SMC VK 1 SMC VZ Stations D side VF 6 6 8.3 8.3 23.5 54.5 84.5 (Single) 109 (Double) VFR (C4, C6) VP7 10 122 (3 Position) 300 (Lead wire length) VP4 Cover diameter 1.6 Cross section

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

ZP

: -U4 ZP3-Y10B: -04 ZP3-Y13B: -04 ZP3-Y16B: -04 10 22 A B Square 8 M5 x 0.8 Buffer Applicable Pad List Width across flat 7 Width across flat 8 4 15 (12.5) (17.8) M-5AU-4-X83 [Weight: 1.6 g] 2 KJH04-M5 [Weight: 2.4 g] 2 Mounting Adapter Part No. 17 16 11.4 1.8 2 ZP3-Y10B: -U6 ZP3-Y13B: -U6 ZP3-Y16B: -U6 ZP3-Y10B: -06 ZP3-Y13B: -06 ZP3-Y16B: -06 Dimensions (per stroke) Weight (g) A B Model

Vacuum Pad

: -U4 ZP3-Y10B: -04 ZP3-Y13B: -04 ZP3-Y16B: -04 10 22 A B Square 8 M5 x 0.8 Buffer Applicable Pad List Width across flat 7 Width across flat 8 4 15 (12.5) (17.8) M-5AU-4-X83 [Weight: 1.6 g] 2 KJH04-M5 [Weight: 2.4 g] 2 Mounting Adapter Part No. 17 16 11.4 1.8 2 ZP3-Y10B: -U6 ZP3-Y13B: -U6 ZP3-Y16B: -U6 ZP3-Y10B: -06 ZP3-Y13B: -06 ZP3-Y16B: -06 Dimensions (per stroke) Weight (g) A B Model

Table of Contents

Symbol A R P Symbol 2 Body class 2 Orifice dia. LVQ Metric sizes 4 04 06 4 6 N.C.

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

F

L A N T S C O N F I G U R AT I O N H Straight L Elbow T Tee J Straight plug U Y Connector E Bulkhead S With sealant (all male threads except M5) C O N N E C T I O N T H R E A D M5 M5 01 1/8 02 1/4 03 3/8 04 1/2 00 Same dia. tube 99 Stem fitting P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R T U B E O.D. 04 4mm 06 6mm 08 8mm 10 10mm 12 12mm KCH S T R A I G H T P L U G KCH F O

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Nil M5 x 0.8 R1, R2 port 20 20 stations + + + + + + + Nil Rc Applicable solenoid valve 10-SYJ343-(-Q) Single solenoid pilot valve is on same side as the A, B port. P P P S F G A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A A, B port size B B B A, B port M5 x 0.8, C4 A N NPT Applicable blanking plate assembly M5 M5 x 0.8 T NPTF C4 4 One-touch fitting Refer to page 302.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

C6 :One-touch fitting 6 VVQZ200-10A-5 2.10-33 VQZ100/200/300 Base Mounted Dimensions: VQZ100 VV3QZ15C Station Port size (35) 27 (11) Grommet(G) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3,C4,C6,M5 (5.5) 20 (7.5) 2-4.5 Mounting holes (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Maual override 5.5 A 2 A 2 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4