Voltage: 6 (12VDC), Electrical Entry: M (M Plug Connector), Lead Wire: Lead Wire, Orifice Size: 08 (0.8mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)
Model H G A B C J* K E D F 16.5 MXS-AT6 5 MXS 6 7 21 19 8 5 10.5 2.5 M2.5 X 8 M5 X 0.8 * MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 25 9 6 12.5 3 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 32 13 8 18.5 4 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 40 15 10 23 5
(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100
(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100
1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.
In the case of 0.8MPa, when port A is a vacuum, port P can be pressurized to 0.8MPa (7kgf/cmG).
t r r , " . . a : r i . . . , r i a , r . .
t r r , " . . a : r i . . . , r i a , r . .
Symmetric mounting Working principle A + A A Series CXS 6, 10, 15, 20, 25, 32 Reverse mounting Piston seal A A A R H R H 1. When the piston is retracting, air is exhausted through both A and A until piston seal H passes air passage A. 2. After piston seal H has passed air passage A, air is exhausted only through A.
Working principle A + A A Series CXS 6, 10, 15, 20, 25, 32 Reverse mounting Piston seal A A A R H R H 1. When the piston is retracting, air is exhausted through both A and A until piston seal H passes air passage A. 2. After piston seal H has passed air passage A, air is exhausted only through A.
HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.
HS D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NT D-F7BAL 40, 50 25, 32 Approx. 30.5 A A Approx. 22 A A Approx. HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.
Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC12V, Specification: Standard / Low Vacuum Compatible, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: -, Port Size: -, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet,
Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC12V, Specification: Standard / Low Vacuum Compatible, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: -, Port Size: -, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet,
Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector), Lead Wire: Lead Wire, Orifice Size: 06 (0.6mm), Port Size: w/o Sub-Plate w/Mounting Screw, Body/Seal Material: A (Body C36, Seal FKM)
Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector), Lead Wire: Lead Wire, Orifice Size: 04 (0.4mm), Port Size: w/o Sub-Plate w/Mounting Screw, Body/Seal Material: A (Body C36, Seal FKM)
Voltage: 6 (12VDC), Electrical Entry: L (L Plug Connector), Lead Wire: Lead Wire, Orifice Size: 03 (0.3mm), Port Size: w/o Sub-Plate w/Mounting Screw, Body/Seal Material: A (Body C36, Seal FKM)
P/As seal material has undergone a high vacuum degassing process. Orifice conductance In the case of a A (cm2) hole in an ultra-thin plate, the conductance C results from V the average velocity of the gas, R the gas constant, M the molecular weight and T the absolute temperature.