For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Series P port/Thread VV2Q22-05 1 set Manifold part No. 2 3 VQ20 VQ30 Rc3/8 NPT3/8 NPTF3/8 G3/8 VQ21M1-5G-C6 00N 00T 00F 4 sets Valve part No. (Stations 1 to 4) Stations VQ21M1-5G-C8 1 set Valve part No.

VCW

Valve For VCW20 OR-1860-120Nil: NBR F: FKM E: EPDM P: PTFE OR-2380-130For VCW30 Nil: NBR F: FKM E: EPDM P: PTFE OR-2600-180For VCW40 e Nil: NBR F: FKM E: EPDM P: PTFE Manifold For VCW20 r OR-1400-178Nil: NBR F: FKM E: EPDM P: PTFE OR-2670-178When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

Precision Regulator

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 P362030-201 Bracket P36201023 P36202028 Pressure gauge234 G33-2-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 G33-4-01 G43-4-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

Series VCL

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

ZQ-OM01401

0.15 22 20 17 32 3.2 0.25 31 29 24 46 0.35 44 39 31 60 0.45 54 48 38 74 0.05 11 11 9 16 0.15 24 22 18 33 4 0.25 34 32 27 48 0.35 46 42 35 62 0.45 57 52 44 76 0.05 12 11 9 16 0.15 25 24 20 33 6 0.25 37 34 30 47 0.35 49 45 39 63 0.45 61 56 48 77 3 39 - No.ZQ-OM01401-B 12. 12.1 12.2 0 40 - No.ZQ-OM01401-B 12.3 Assy ZQ VQ100 3 2 Assy Assy Assy () ZQA-K15LO--2 ZQA-K25LO--2 ZQA-J15LO--

100

G Pressure gauge*7 E Vacuum pressure switch (Vacuum 2 outputs) F Vacuum pressure switch (Compound pressure 2 outputs) !

ZL3-OM00801

ZL3/ZL6 SY100-30-A *x2 17 No.ZL3-OM00801-A ZL3/ZL6 ZS-39-5G ZL3-LW1-N-A 1 1) N NPN P PNP 2 ZL3/ZL6 ZL3-EJ1-H-A 1 2) 1) M 0.35 MPa H 0.50 MPa 4 M4x110 2)1 :0.760.84Nm V * 1 3 ZL3 ZL3-SC1-A 4 ZL3 ZL3-SE1-A 1 2 18 No.ZL3-OM00801-A 5 ZL6 ZL6-SC1-A () * 6 ZL3/ZL6 ZL3-EP1-1 -A 1 1 Rc F G N NP 7 ZL3/ZL6 GZ33-K1K-01-X56 (kPa ) GZ33-K1K-01-X56 (inHg/psi ) * *inHg/psi 8

IR1000/2000/3000

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020 / 2120 IR3000 IR3010 IR3020 / 3120 Bracket P36201023 P36202028 P36203018 Pressure gauge G33-2-01 G33-4-01 G43-4-01 G43-4-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-10-01 Accuracy 3% (full span) 2 Series IR1000/2000/3000 Construction IR1000 IR2000 IR3000 Fixed throttle SUP side passage OUT side passage SUP side passage SUP side passage

3M/SMseries

++t&F Eft!

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

3 Way,3 Port Solenoid Valve NVZ Series

Bhmk Pbtc Ass'U Manifold Base Diference Behoeen NVZ77O andNWT3O Screw with o ,3 Botly Ported Type inch (mm) crommet//NVZIOO.OG NVZTOO-OH G11.81(300) L type plug connector.,'NVZOO.OL : M type plug connector//Nvzl OGOM f : With indicator light and surge voltage suppressol o 01.20 Manifold.,/ Top Ported crommeVNW3Z-01-(OG) Nvv3ZI-01-(OH) L VPe plug connector /NvvSz1-01-(OL) M type plug connecior

NVZseies

Bhmk Pbtc Ass'U Manifold Base Diference Behoeen NVZ77O andNWT3O Screw with o ,3 Botly Ported Type inch (mm) crommet//NVZIOO.OG NVZTOO-OH G11.81(300) L type plug connector.,'NVZOO.OL : M type plug connector//Nvzl OGOM f : With indicator light and surge voltage suppressol o 01.20 Manifold.,/ Top Ported crommeVNW3Z-01-(OG) Nvv3ZI-01-(OH) L VPe plug connector /NvvSz1-01-(OL) M type plug connecior

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

lVFl 10

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

60, 4 station manifold base part number) SY3260-5G-C6 2 sets (double solenoid part number) SY3160-5G-M5 ... 2 sets (single solenoid part number) Enter the part numbers of valves and options to be mounted under the manifold base part number, in order, starting from station No. 1 as shown in the drawing.

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: [Rc (R)] Rc, Port Size: 1/8, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing: Direct

Body Ported), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 16 (1.6mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)]

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction