IR1000/2000/3000

For IRV2000, IRV3000 Zero position Heaven Zero position Ground Fig. (2) Fig. (1) 14-5-16 16 Vacuum Regulator Series IRV1000/2000/3000 Standard Specifications F.R.L.

IR1000/2000/3000

Example 1) 0.4MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2MPa setting 2pcs., 0.4MPa setting 2pcs., 0.8MPa setting 1pc. with 5 stations IRM20-5G-021221 Copper-free specifications Ozone Resistant Specifications 3 Accessory (pressure gauge) Nil None Fluoro rubber is used for rubber seal materials.

Precision Regulator

With digital pressure switch ARX Switch output specifications Example 1) 0.4 MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2 MPa setting 2 pcs., 0.4 MPa setting 2 pcs., 0.8 MPa setting 1 pc. with 5 stations IRM20-5G-021221 AMR Output specifications NPN open collector 1 output PNP open collector 1 output NPN open collector 1 output + Analog voltage output NPN open collector 1 output

VM

Frequency Port size (Nominal size) Piston style 0.15 to 1.0MPa 5 to 60C (No freezing) VM/VR Red Green Orange Rc(PT) (6A) 40g VH 300 c.p.m or less R(PT) (6A) 1 8 1 8 Weight 6g Construction/Component Parts Construction/Component Parts w q Description Aluminum alloy Material Notes No. w q Description Brass Material Notes No.

Direct operated poppet valve construction , Seal material: FKM , Body material: C37, stainless steel , Port size: Rc 1/8, Available in body ported or based mounted styles, SUB PLATE FOR PVQ33, VALVE, PVQ PROPORTIONAL VALVE, 21, PVQ NO SIZE RATING, .00000 lb

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPTF, Port Size: 1/8, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing: Sub-Base

Base Mounted), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 16 (1.6mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: T (NPTF), Body/Seal Material: H (Body SUS, Seal FKM)

Solid State Switch with Prewired Connector Series D– mmPC

Applicable standards Cord length Connector type JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 0.5m 1.0m 3.0m M83 pin M84 pin M124 pin S M L A B D Impact resistance 300m/s {30, 6G} Enclosure IP-67 (standard IEC529) Note) Series D-P5DW is available with type D only. Withstand voltage Note) L is available for series D-P5DW only.

Table of Contents

VS4 16 stations Max. 16 stations.

VFS

16 14 16 17 14 16 17 9.0 9.0 9.0 VFS600 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 15 16 17 15 16 17 14 16 16 14 16 17 14 16 18 9.0 9.0 9.0 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 3 8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100

VFR

AXT625-4-1 AXT625-5 AXT625-17 AXT625-16 18 x 15 x 1.5 10.5 x 7.5 x 1.5 8 x 5 x 1.5 AXT625-28-1A Material Steel plate Steel plate NBR NBR NBR NBR NBR No. Description Material Part no. AXT625-28-3A For 01T For 01T1 For 01C For 01F For 01SU Junction cover assembly AXT625-28-7AStations o VVF2000-26-5AStations AZ738-10AStations For 01T For 01SU AXT623-22 NBR Rubber plug !

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(3.5) 21.5 N7T: One-touch fitting for 1/4" N9T: One-touch fitting for 5/16" 01T: 1/8 NPTF U side n A 2 A 2 Manual override 5 SMC SMC 4 (L4) (L3) L2 L1 P=16 P=16 15.5 3 2 1 18 Station 5 D side 50.5 22.5 300 (Lead wire length) 3 70 Cover diameter 1.4 Cross sectional area 0.2mm2 59 PE port (30) R 3 1 P 25.5 11 M5 x 0.8 External pilot port 1/4 NPTF 20 12.5 (Only external pilot type (R)) P(SUP

CATALOG

2.36 1 15/16 9/32 2 1/4 4 3/4 9/16 3/8 5/8 1 1/4 7/16-20 1 1/8 1 1/8 5/16-24 5/16-18 200 (2) 3/4 2.6 3/8 2 1/2 0.3 1.26 1.06 1 1.71 5/8 3 5/8 2.4 1 15/16 7/16 2 1/4 4 3/4 9/16 3/8 7/8 1 1/2 7/16-20 1 1/8 1 1/8 5/16-24 3 3/8-16 1 1/4 250 (2.5) 3/4 3.1 3/8 0 1.3 1.06 1 1.75 5/8 3 3/4 2.48 1 15/16 19/32 2 3/8 4 7/8 9/16 3/8 1 7/8 325 (3.25) 1 1/8 3.9 1 1/2 1 1/2 1/2 3/8-24 3 3/4 0 1.57 1.18

V

Model A L D Applicable Fitting Size d KQP-04 16 32 6 4mm KQP-03 16 32 6 5/32 KQP-06 18 35 8 6mm KQP-07 18 35 8 1/4 KQP-08 20.5 39 10 8mm KQP-09 20.5 39 10 5/16 KQP-10 22 43 12 10mm KQP-11 22 43 12 3/8 BRACKET ASSEMBLY NUMBER (IF ORDERED SEPARATELY) F1 Type SX3/5/7000-16-2A (With Mounting Screw) F2 Type SX3/5/7000-16-1A (With Mounting Screw) Courtesy of Steven Engineering, Inc. !

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPTF, Port Size: 1/8, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing: Direct Plumbing

Body Ported), Voltage: 6 (12VDC), Electrical Entry: G (Grommet), Orifice Size: 16 (1.6mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: T (NPTF)

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC12V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: -, Port Size: -, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing

Valve Type: N.C. Base Mounted, Voltage: 12VDC, Electrical Entry: Grommet, Orifice Size: 4mm, Port Size: -, Thread Type: -, Body/Seal Material: -, Option: -

Valve Type: 33 (N.C. Base Mounted), Voltage: 6 (12VDC), Electrical Entry: G (Grommet), Orifice Size: 23 (2.3mm)

Valve Type: 33 (N.C. Base Mounted), Voltage: 6 (12VDC), Electrical Entry: G (Grommet), Orifice Size: 40 (4mm)