Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

A 63 bore size is selected. 50 150 40 100 32 25 20 50 0 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 Operating pressure P (MPa) 8-25-7 7 Non-rotating Double Power Cylinder Series MGZ 20, 25, 32, 40, 50, 63, 80 How to Order MGZ 100 40 Z Z73 Mounting style Number of auto switches Bore size Nil L F G Basic style Transaxial foot style Front flange style Rear flange style Nil S 2 pcs. 1 pc. 20 25 32

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Table displacement due to yaw moment load Displacement at A when load is applied at F . Table displacement due to roll moment load Displacement at A when load is applied at F .

JIS Standard Hydraulic Cylinder

25 32 M20 x 1.5 31 M5 x 0.8 16 F J E +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 CHK B-series +0.1 0 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 +0.1 0 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 CHN H 0.1 0.4 D +0.1 0 50 40 185 145 57 79 M48 x 1.5 76 40 M8 x 1.25 +0.07 0 25 16 76 60 25 32 M16 x 1.5 26 16 M5 x 0.8 CHM C +0.084 0 31.5 20 90 70 30 40 M20 x 1.5 31 20 M5

Tie-rod Type Hydraulic Cylinder

CHA 40 100 L L CHDA 40 100 M9BW Without Auto Switch With Auto Switch With auto switch (built-in magnet) Mounting type Without auto switch Nil Auto switch type Bore size 40 50 63 80 100 Number of auto switches B L F G C D T U Basic type Axial foot type Rod flange type Head flange type Single clevis type Double clevis type Center trunnion type Rod trunnion type 40 mm 50 mm 63 mm 80 mm 100 mm

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces, Same surface) With 1 pc. 70 75 80 85 95 100 15 D-A9 70 + 40 (n 4)/2 n = 4, 8, 12, 16 80 + 40 (n 4)/2 n = 4, 8, 12, 16 85 + 40 (n 4)/2 n = 4, 8, 12, 16 95 + 40 (n 4)/2 n = 4, 8, 12, 16 100 + 40 (n 4)/2 n = 4, 8, 12, 16 15 + 40 (n 2)/2 n = 2, 4, 6, 8 75 + 40 (n 4)/2 n = 4, 8, 12, 16 With n pcs. With 2 pcs.

Rotary Actuator

Note) Flange type F is not available. Air cushion Number of auto switches Nil None C With air cushion Shaft type Nil 2 pcs. S 1 pc.

Environment

of gravity of the workpiece] Load: F [N] F LEY63 LEY32 10 Workpiece LEY25 Center of gravity 1 0 100 200 300 400 500 600 700 800 900 1000 Stroke [mm] 236 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40 Refer to page 38 for model selection.

Compact Cylinder with Solenoid Valve/

CQM CVQM C B Tap mounting A Through-hole mounting (mm) C B A Bore size 32 9.5 59 49.5 40 10 57 67 12 71 83 50 13 97 84 63 Features 1 Compact Cylinder with Solenoid Valve/ Guide Rod Type 32, 40, 50, 63 Series CVQM How to Order CVQM 32 30 M9BW 5 M Port thread type 32 40 Bore size 32 40 50 63 M5 x 0.8 Nil 32 mm 40 mm 50 mm 63 mm Rc G NPT 50 63 F N Piping Nil P Standard Axial Cylinder stroke

XLAQ/XLDQ

U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17 26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release

2

F F E E B C Cross spacer E D A F: Without pipe thread Model Note) E (Port size) A B C D Applicable model Y14-M5-A M5 x 0.8 23 16 14 25 AC10l-A Y24-l01-A 1/8 40 40 22 40 AC20l-A Y24-l02-A 1/4 Y34-l01-A 1/8 49 43 28 48 AC25l-A, AC30l-A Y34-l02-A 1/4 Y44-l02-A 1/4 60 48 36 54 AC40l-A Y44-l03-A 3/8 Y54-l03-A 3/8 72 62 40 62 AC40l-06-A Y54-l04-A 1/2 Caution on Mounting 1.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

MXQ

F F A Lr 6 6 6 Lr = 40 mm MXQ6-30 MXQ6-30 0.015 0.03 0.05 MXQ6-30 MXQ6-50 MXQ6-10 MXQ6-10 MXQ6-20 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 MXQ6-40 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-50 MXQ6-40 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-50 0.04 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

RY RT [mm] Bore size [mm] Stroke range [mm] A AL B B1 BN BP BQ C D E F GA GB GC GD GL GR Without rod boot With rod boot 40 Up to 800 20 to 800 30 27 60 22 96 1/4 1/4 44 16 32 10 85 15 26 54 10 10 50 Up to 1200 20 to 1200 35 32 70 27 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 63 Up to 1200 20 to 1200 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 80 Up to 1400 20 to 1400 40 37 102 32

Stopper Cylinder

2 x P (Rc, NPT, M thread) Stroke A + 2 stroke B + Stroke V H + Stroke Width across flats K T 0 0.1 Y M Q F D E A + 2 stroke B + Stroke V H + Stroke Width across flats K M T 0 0.1 D E 2 x P (Rc, NPT, G) A + 2 stroke B + Stroke V H + Stroke Width across flats K M Q F Z Stroke 2 x P (Rc, NPT, G) M E J Q F Z Stroke 32 40 50 RSQB -DZ (Double acting) Bore size: 32, 40, 50 M E J 2 x P (Rc, NPT,

MK

stroke (Basic) (mm) U S R K L Oh9 Q F E C B A Model MKB20 MKB25 0 0.052 0 0.052 0.15 0.15 4 31 62 72.5 24.5 48 36 46.8 36 13.5 0.15 0.15 7.5 20 5 32 63 73.5 27.5 53.8 40 52 40 16 8 23 Note 1) Above figure is for D-A73/A80.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

) 258-9200-www.stevenengineering.com F S + Stroke F CX ZZ + Stroke D-X H 20B E G Mounting nut Data NN NA F N CY3B15 (mm) B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Note) ( ): Denotes the dimensions for long stroke. 726 Air Cylinder CG1-Z 2122CG1-Z/ 1011Rod Flange (F): CG1F, CG1F 10112122With rubber bumper FT F 4 x FD FX0.15 E 0 0.05 B FX0.15 H B (mm) FT 6 7 7 8 50 63 80 100 FD 5.5 5.5 6.6 6.6 FX 28 32 38 46 F 2 2 2 2 E 12 14 18 25 B 40 44 53 61 Bore size 20 25 32 40 30 32 2 2 58 70 9 11 9 9 40 3 82 11 11 50 3 100 14 14 76 92 104 128 Note) End boss is

CJ2X/CUX/CQSX/CQ2X/CM2X

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

CJ2X/CUX/CQSX/CQ2X/CM2X

, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

Cylinder with Lock

no. a (Max.) b c (Min.) d e f H9 (Hole) f h11 (Shaft) l1 32 GKM10-20 20 10+0.5 +0.15 20 40 M10 x 1.25 10 10 52 40 GKM12-24 24 12+0.5 +0.15 24 48 M12 x 1.25 12 12 62 50, 63 GKM16-32 32 16+0.5 +0.15 32 64 M16 x 1.5 16 16 83 80, 100 GKM20-40 40 20+0.5 +0.15 40 80 M20 x 1.5 20 20 105 * Supplied with clevis pin and clevis pin bracket Rod end: KJ (ISO 8139) l l3 [mm] Bore size Part no. b1 h12