Mounting: Both Ends Tapped, Bore Size: 32mm, Thread: Rc, Full Stroke: 50mm, First Stroke: 5mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

1

, 3/5(E) ports.

NCQ8

250 300 350 400 NCDQ8WB200-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8WB250-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #10-24UNC2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/4 3-1/2 3-3/4 4 4-1/2 5 5-1/2 6 #10-24UNC2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 3-3/8 3-5/8 3-7/8 4-1/8 4-5/8 5-1/8 5-5/8 6-1/8 1/4-20UNC2-5/8 2-3/4 2-7/8 3 3-1/8 3-1/4 3-3/8 3-5/8 3

Table of Contents

5.

Electric Actuators

6 12 LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5

2

to 50 Note 3) 5 to 50 Note 3) 5 to 50 5 to 55 Note 3) Ambient temperature (C) 5 to 50 5 to 55 Note 3) performance Components Standard performance conditions Range of operating conditions Outlet air atmospheric pressure dew point (C) 20 Inlet air flow rate (L/min [ANR]) Note 5) 586 1185 360 888 720 31 62 125 250 Outlet air flow rate (L/min [ANR]) 500 1000 300 750 600 25 50 100 200 Purge air

Battery-less

5 r t w q y !6 !

Table of Contents

6 12 LXFH5 Without brake Direct acting guide 5 phase stepper 210 2 5 6 12 Without brake 218 LXPB2 2 phase stepper 2 5 6 12 With brake 226 LXP Ball bushing 2 5 6 12 Without brake 234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5

CATALOG

5 3/8 1 3 3/8 3/8 3/4-16 7/8 3/8 3/8 2.13 5 1/8 250 (2.5) 1 1/8 3.1 1.5 1 1/8 1/2 5/16-24 3 0 1.3 1.06 2.19 4 5/8 1 3/8 2.48 5 1/2 1 3 7/8 3/8 3/4-16 7/8 3/8 3/8 2.59 5 7/8 325 (3.25) 1 5/8 3.9 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1.57 1.18 2.76 5 1/2 1 5/8 2.72 6 1/2 1 3/8 4 11/16 5/8 1-14 1/2 5/8 2.59 5 7/8 400 (4) 1 3/8 1 5/8 4.7 2 1 1/2 5/8 1 1/4 3/8-24 4 1/2 0 1.57 1.18 3.32 6 1/4 1 5/8

NCA1

8 1 3/8 2.09 2.40 5 5 3/8 250 (2.5) 1 3/4-16 1 1/8 3.1 1 1/2 1 1/8 1/2 7/8 5/16-24 3 0 3/8 3/8 3/8 1.30 1.06 2.19 3 7/8 4 5/8 1 3/8 2.13 2.48 5 1/8 5 1/2 325 (3.25) 1 3/8 1-14 1 5/8 3.9 2 1 1/2 5/8 1 1/4 3/8-24 3.75 0 1/2 5/8 5/8 1.57 1.18 2.76 4 11/16 5 1/2 1 5/8 2.59 2.72 5 7/8 6 1/2 400 (4) 1 3/8 1-14 1 5/8 4.7 2 1 1/2 5/8 1 1/4 3/8-24 4.5 0 1/2 5/8 5/8 1.57 1.18 3.32 5 7/16 6 1/4 1 5/

Electric Actuator/Slider Type

1000 500 250 505 to 600 800 400 200 800 400 200 605 to 700 600 300 150 600 300 150 705 to 800 500 250 125 500 250 125 Pushing speed [mm/s] Note 5) 30 or less Max. acceleration/deceleration [mm/s2] 5000 3000 5000 Positioning repeatability [mm] 0.02 Lost motion [mm] Note 6) 0.1 or less Screw lead [mm] (including pulley ratio) 20 10 5 5 (2.86) 20 10 5 Impact/Vibration resistance [m/s2] Note

A

8 2.36 5 4 5/8 9/16 3/8 3/8 5/16 3/4 2.6 3/8 2 1/2 0.3 1.26 1.06 1.84 1 1.71 200 (2) 7/16-20 1 1/8 1 1/8 5/16-24 3 3/8 4 1/8 5/8 2.4 5 4 5/8 9/16 3/8 3/8 3/8 7/16-20 3/4 3.1 1 1/8 1 1/8 3/8 5/16-24 3 0 1.3 1.06 2.19 3 7/8 4 5/8 1 1.75 250 (2.5) 5/8 2.48 5 1/8 4 3/4 9/16 3/8 3/8 3/8 1 1/8 3.9 1/2 3 3/4 0 1.57 1.18 2.76 1 3/8 2.34 1 1/2 1 1/2 3/8-24 4 11/16 5 1/2 325 (3.25) 1 2.72 6 1/4 5 5

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Plug-in: For SS5Y -45 3 5 VQC VQZ SQ 5 5 SY 5 1 FU Single solenoid: VFS 5 SY 5 1 5C FU Double solenoid: VFR Series CE-compliant VQ7 3 SY300 5 SY500 Nil Q CE-compliant Type of actuation Manual override 1 Normally closed (N.C.) 2 Normally open (N.C.)

LJ1H

10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting 143

MG

5 @3 !0 !

NCA1

5/8 2.40 2 1/4 5 1/8 1 3/4-16 1 1/8 2.6 1 1/2 1 1/8 1/2 250 (2.5") 1 3/4-16 1 1/8 3.1 1 1/2 1 1/8 1/2 7/8 5/16-24 3 0 3/8 3/8 1.30 1.06 2.19 19/32 3/8-18 1 1/4 1 3/8 2 5/16 2.13 3 3/4 2.48 2 3/8 5 1/4 325 (3.25") 1 3 1 3/8 1-14 1 5/8 3.9 2 1 1/2 5/8 1/4 3/8-24 3/4 0 1/2 5/8 1.57 1.18 2.76 5/8 1/2-13 1 1/2 1 5/8 2 11/16 2.59 4 1/4 2.72 2 5/8 6 5/64 400 (4") 6 5/64 5/8 1 1/4 3/8-24 3 3/4 0

NCA1

3/4-16 1 1/8 2.6 1 1/2 1 1/8 1/2 7/8 5/16-24 2.5 0.3 3/8 3/8 3/8 1.26 1.06 1.84 3 3/8 4 1/8 1 3/8 2.09 2.40 5 5 3/8 MB1 250 (2.5") 1 3/4-16 1 1/8 3.1 1 1/2 1 1/8 1/2 7/8 5/16-24 3 0 3/8 3/8 3/8 1.30 1.06 2.19 3 7/8 4 5/8 1 3/8 2.13 2.48 5 1/8 5 1/2 325 (3.25") 1 3/8 1-14 1 5/8 3.9 2 1 1/2 5/8 1 1/4 3/8-24 3.75 0 1/2 5/8 5/8 1.57 1.18 2.76 4 11/16 5 1/2 1 5/8 2.59 2.72 5 7/8 6 1/2 400 (4"

Made to Order

5 6 6 6 6 6 9 18 17 22 22 26 26 34 41 6 7 9 8.5 11 11 14 16 5 6 6 6 6 6 8 9 5 5 5 5 5 5 6 6 20 25 32 40 50 63 80 100 120 119.5 139.5 139.5 160.5 160.5 190.5 200.5 0 0 15.5 9 16.5 11.5 8 10.5 24.5 24 34 27.5 37.5 32.5 35 35.5 57 56 70 63.5 78.5 73.5 84 74.5 80 93 110 118 146 160 199 236 87.5 87.5 103.5 103.5 119.5 119.5 141.5 161.5 MGPL, MGPA (Ball bushing bearing) A, E, HT Dimensions (mm)

ISO Cylinder

5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9l D-A9lV 5 10 10 + 15 (n 2) (n = 4, 6) D-A7l D-A80 D-A73C D-A80C D-M9lV D-F7lV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9lV*2 5 10 10 + 15 (n 2) (n = 4, 6) D-A7l D-A80 D-A73C D-A80C Rail mounting 5 10 15 + 10 (n 2) (n = 4, 6) 5 10 15 + 10 (n 2) (n = 4, 6) D-A7lH

Compact Cylinder Series NCQ8

175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #4-40UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-