Electric Actuator/Slider Type

T4 = 0.05 [s] T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 2000 2000 2000 2000 2000 2000 Minimum Stroke for Auto Switch Mounting 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700,

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

T4 = 0.05 [s] T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

CLS

V (mm/s) Graph (7) Graph (4) 0.5 MPa ) P 0.5 MPa ) P 250 4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting, Single Rod

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

6 (Slide bearing type) 5 800 st 700 st 4 600 st 3 500 st 2 300 st 400 st st: Stroke (mm) 1 200 st 100 st 0 0 20 40 60 80 100 120 140 160 Allowable end load F (N) MGGM50Stroke 8 (Slide bearing type) 7 Deflection Y (mm) 6 1000 st 5 900 st 4 800 st 700 st 3 600 st 2 400 st 500 st st: Stroke (mm) 100 st 200 st 300 st 0 1 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Allowable end load F

CNS

MPa P 3000 3000 2000 2000 160 140 125 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-8-7 8 Cylinder with Lock Double Acting, Single Rod Series CNS 125, 140, 160 How to Order 125 125 100 100 Y7BW CDNS D CNS D L Without

240

0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 200 200 250 250 160 160 Me 200 200 L3 [mm] L3 [mm] L3 [mm] L3 [mm] 120 120 m L3 150 150 Z 80 80 100 100 40 40 50 50 0 0 0.2 0.4 0.6 0.8 1 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0.0 0.4 0.8 1.2 1.6 2.0 0 0 0.2 0.4 0.6 0.8 1 Work load [kg] Work load [

TABLE OF CONTENTS

NPT PORTS NPT PORTS WT. 0.25 300 300 1/32 1/32 .024 .024 33GG5XGV 33GG5XCV K33GGX 175 175 3/64 1/16 .052 .095 33HJ5XGV 33HJ5XCV K33HJX 125 125 1/16 1/16 .095 .095 33JJ5XGV 33JJ5XCV K33JJX 3-WAY NORMALLY CLOSED GROMMET 75 75 3/32 3/32 .160 .160 33KK5XGV 33KK5XCV K33KKX 50 50 1/8 3/32 .275 .160 33NK5XGV 33NK5XCV K33NKX 3-WAY NORMALLY CLOSED CONDUIT SERIES 50MODEL 53 VALVE NUMBER MAX.

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

CM2

301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 68 81 93 106 131 156 12.5 25 37.5 50 75 100 143 156 168 181 206 231 19 36 20 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 147 160 172 185 210 235 260 19 36 25 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 149 162 174 187 212

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

C95

Bore size (mm) Max. stroke Standard stroke (mm) 32 2560 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 2540 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 2520 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 2510 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 2430 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 2470 25, 50, 80, 100, 125, 160

LJ1H

empty weight deflection 2 2 Lateral empty weight deflection Lateral empty weight deflection 1 1 0.5 0.5 0.2 0.2 0.1 0.1 200 300 500 1000 100 Load point distance mm 200 300 500 1000 100 Load point distance mm 146

Series VQ Base Mounted Metal Seal/Rubber Seal

See p.1.10-160 for details. VFS VS Note) Use negative COM valves for negative COM specification manifolds. (See p.1.10-160) VS7 How to Order Valve How to Order Manifold Ass'y Specity valve and option nos. below the manifold base no.

Cylinder with Lock

63 300 80 300 100 300 *1 The maximum rod length of the MWB32-XC68 is 1800 mm.

MGG

st: Stroke (mm) 1 100st 200st 300st 0 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 320 340 360 380 400 Allowable end load F (N) 80MGGM Stroke 8 (Slide bearing type) 7 6 Deflection Y (mm) 5 1200st 1100st 4 1000st 900st 3 800st 700st 2 600st st: Stroke (mm) 400st 500st 1 100st 200st 300st 0 0 50 100 150 200 250 300 350 400 450 500 550 600 Allowable end load F (N) MGGM 100Stroke

5

D-X 211 Smooth Cylinder CS2Y Series 125, 140, 160 How to Order L CS2 Y 160 300 L M9BW CDS2 Y 300 160 With auto switch With auto switch (Built-in magnet) Number of auto switches Nil 2 pcs. S 1 pc. 3 3 pcs. n n pcs. Smooth cylinder Made to Order Refer to page 213 for details.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Grommet L plug connector MN: Without lead wire WO: Without connector cable G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) D, Y: With connector Coil type + + Standard Nil T With power saving circuit (24, 12 VDC only) + + + + + + Power saving circuit is not available for D, Y, DO, YO or W types.

V100

Note) Standard lead wire length: 300 mm.