CHKD/CHKG

x 110L x 115L x 120L x 125L x 130L x 135L x 140L x 145L x 170L x 195L x 220L x 245L x 270L CQ-M16 x 120L x 125L x 130L x 135L x 140L x 145L x 150L x 155L x 160L x 165L x 190L x 215L x 240L x 265L x 290L 80 85 90 95 100 105 110 115 120 125 150 175 200 225 250 85 90 95 100 105 110 115 120 125 130 155 180 205 230 255 100 105 110 115 120 125 130 135 140 145 170 195 220 245 270 120 125 130 135

CL

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

Table of Contents

150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80 120 160 200 Gripping point R (mm) Gripping point

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt C' D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 130 155 D 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 65 70

C95

8, 12, 16 175 170 175 + 55(n-4)/2 n = 4, 8, 12, 16 185 185 + 55(n-4)/2 n = 4, 8, 12, 16 130 130 130 130 + 100(n-2) n = 2, 4, 6, 8 130 + 100(n-2) n = 2, 4, 6, 8 135 135 135 135 + 100(n-2) n = 2, 4, 6, 8 135 + 100(n-2) n = 2, 4, 6, 8 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 120 120 + 55(n-4)/2 n = 4, 8, 12, 16 160 160 + 55(n-4)/2 n = 4, 8, 12, 16 250 10 200

MY1

Mass m Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 5mm 0mm 65mm 0.88kg 210 65 111 Z Wb 42.5mm 0mm 150mm 4.35kg 150 Wc 42.5mm 111mm 150mm 0.795kg Wd 42.5mm 210mm 150mm 0.5kg Y 42.5 5 n = a, b, c, d 3 Composite center of gravity calculation m = mn = 0.88 + 4.35 + 0.795 + 0.5 = 6.525kg 1 m X = x (mn x Xn) 1 6.525 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 0.5 x 150) = 138.5mm 1 m Y = x (mn x yn

Air Cylinder Series MB

177 202 51 25 12.5 25 150 227 89 37.5 50 75 100 125 102 114 127 152 177 202 51 25 12.5 25 150 227 37.5 50 75 100 125 101 114 126 139 164 189 214 56 29 12.5 25 150 239 175 200 264 289 37.5 50 75 100 125 101 114 126 139 164 189 214 61 29 12.5 25 150 239 175 200 264 289 125 10 75 27 20 30 40 60 80 100 120 130 140 150 170 190 210 120 230 270 140 160 180 200 250 290 310 With Mounting Bracket

Series VQ Metal Seal/Rubber Seal Body Ported

VQZ < >: AC Note 2) VQD Dimensions (mm) Equation L1=10.5n+14.5 L2=10.5n+25 n: Station (Max. 16) n L 1 16 15 182.5 193 262.5 273 14 172 182.5 250 260.5 13 161.5 172 237.5 248 12 151 161.5 225 235.5 11 140.5 151 212.5 223 10 130 140.5 212.5 223 9 119.5 130 200 210.5 8 109 119.5 187.5 198 7 98.5 109 175 185.5 6 88 98.5 162.5 173 5 77.5 88 150 160.5 4 67 77.5 150 160.5 3 56.5 67 137.5 148 2 46

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

V100

Lubrication Manual override Shock/Vibration resistance (2) Enclosure Non-locking push type 150/50 m/s2 Dustproof Note 1) Based on dynamic performance test, JIS B 8374-1981.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

0.44 0.41 [0.41] 0.41 0.34 0.38 [0.38] 0.36 0.19 0.19 0.23 [0.12] 0.12 0.11 [0.11] 0.11 3 position VFR 130 VP4 Note) [ ]: Denotes the normal position.

SQ1000/2000

CP VVQZ2000 (For P, J kits) SSQ1000 4 B P 1 150 For station 1

Pin Clamp Cylinders

135 136 137 138 139 140 145 146 147 148 149 150 Guide pin diameter [mm] 11.5 11.6 11.7 11.8 11.9 12.0 12.5 12.6 12.7 12.8 12.9 13.0 13.5 13.6 13.7 13.8 13.9 14.0 14.5 14.6 14.7 14.8 14.9 15.0 Applicable hole diameter of workpiece [mm] For 12 For 13 For 14 For 15 Guide pin shape Round type/Diamond type Symbol 155 156 157 158 159 160 175 176 177 178 179 180 195 196 197 198 199 200 Guide pin

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

CNA

Note 2) +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 10 162 15 CA1-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 10 181 15 Note 3) CA1-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 10 191 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 12 231 25 CA1-S08 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 12 255 25 9-7-19 20 Series CNA Accessory Bracket

Single Axis Electric Actuator Series LJ1H

15 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane Z section detail 8H8 depth 8 130 200 52 52.5 Stroke + 150 (table movement range) 53 190 Z section 92 3.3 55 90 82 A section 5.8 1.7 4.8 Stroke + 393 135 A section detail (Switch groove) 92 Stroke + 32 3-8H10 depth 5 11.5 20 67 90 (T-slot pitch) 45 62 92 58 30 8-6.6 9.4 4.5 10 Stroke + 216 18 T-slot

Cylinder with Lock

151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 12.5 25 37.5 50 75 100 125 150 175 40 56 41 23 12.5 25 37.5 50 75 100 125 150 175 200 50 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 63 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 225 250 100 76 61 29

Electric Actuator/Slider Type

630 420 210 1201 to 1300 540 360 180 1301 to 1400 470 310 150 1401 to 1500 410 270 130 Max. acceleration/deceleration [mm/s2] 20 (Refer to pages 45 to 47 for limit according to work load and duty ratio.)

Electric Actuator Triple Axis P&P Unit

Stroke+191 (23) Rreference plane (25) Stroke+15 130 21 63.5 Stroke+214 130 LG-240Z-Y 1 LG-240Z-Z 2 120 (23) 86 (90) Stroke+15 60 Stroke8 (For 100 to 150 strokes) 192 (For 200 to 1000 strokes) Stroke+191 Stroke+214 Select the unit specifications after confirming the Y and Z axes specifications. 1 ) For detailed dimensions and specifications, please refer to the body dimensions.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

W1 TY TF TT TH Z TR TS TO TE TX TC TA TU TD-H10 (Hole) TL CXW 40 50 63 80 100 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 62 60 45 12 17 93 9 10 17 119 85 102 10 60 80 15 CA1-S04 74 60 45 12 17 103 9 10 17 129 95 112 10 60 80 15 CXS CA1-S06 90 73 55 14 22 107 11 10 20 150 110 130 15 70 100 18 110 100 75 17 24 129 13.5 12 26 192 140 166 15 90 120 25 CA1-S08 CXT 130 100 75 17 24 135 13.5 12