Air Slide Table

30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height

LX

F A A Lr Lr = 150mm L X F 60 Table displacement (m) Table displacement (m) Table displacement (m) 10 40 LXFH-100 50 LXFH-100 LXFH-100 8 40 30 LXFH-75 LXFH-75 6 30 20 LXFH-50 LXFH-50 LXFH-75 4 20 LXFH-25 LXFH-25 10 LXFH-50 2 10 LXFH-25 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 0.5 1 1.5 2 2.5 3 0 Weight (kg) 0 Weight (kg) 0 Weight (kg) Displacement at the section indicated by the arrow when a load

MG

100 200 1 20 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 30 30 20 20 50, 63 50, 63 Load weight m (kg) Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 50, 63 32, 40 10 10 32, 40 5 20 25 25 26 26 50 76 75 100 200 5 20 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 40 40 100 100 30 30 80 Load weight m (kg) Load weight m (kg)

Air Cylinder

Rod End (mm) Bore size LD LF LG LH LP LT LV LY LZ 20 6.8 15 30 30 37 3.2 18.4 59 152 25 6.8 15 30 30 37 3.2 18.4 59 156 32 9 15 40 40 50 4 28 75 174 40 9 15 40 40 50 4 28 75 203 Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 103 25 8 20 M5 x 0.8 103 32 12 20 M6 x 1 111 40 13 21 M8 x 1.25 136 * When female thread is used, use a thin wrench when tightening the piston rod. * When female thread is used

MXQ

-10 MXQ20-20 MXQ20-30 MXQ20-50 MXQ20-50 MXQ20-50 MXQ20-75 MXQ20-40 0.12 MXQ20-40 MXQ20-40 MXQ20-40 MXQ20-150 MXQ20-150 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXQ20-40 MXQ20-75 MXQ20-40 MXQ20-40 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-75 MXQ20-30 MXQ20-30 MXQ20-75 MXQ20-30 0.06 MXQ20-40 MXQ20-40 MXQ20-100 MXQ20-125 MXQ20-150

CJ2

, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes are available by the 1 mm interval with no stroke adjustment by spacer.

Electric Actuator/Slider Type

Duty ratio: 75% 0 0 0 5 10 20 30 15 25 0 5 10 15 Work load [kg] Work load [kg] LEJS40 A LEJS63 A 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 50% Duty ratio: 25% 10 10 Duty ratio: 100% 5000 5000 Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 10 20 30 0 10 20

CV/MVGQ

= 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69/Y7PV D-Y7WV (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Data 10-15-77 78 Valve Mounted Cylinder: Non-rotating Rod Type Double Acting, Single Rod

CV/MVGQ

+ 100 (n 2) n = 2, 3, 4 Different sides MI W S n 100 + 100 (n 2) n = 2, 4, 6, 8 Same side CEP1 75 80 90 100 100 100 75 80 90 10 35 55 1 Different sides CE1 2 Same side 35 + 30 (n 2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n

TABLE OF CONTENTS

70 50 35 30 40 35 30 30 30 20 215 120 40 30 25 120 40 30 25 40 30 25 30 25 25 135 65 30 20 15 65 30 20 15 30 20 15 20 15 15 G 132 G 132 DE-ENERGIZED ENERGIZED G 132 H 364 G 132 J 116 G 132 V 564 G 132 K 332 H 364 H 364 H 364 J 116 H 364 V 564 H 364 K 332 J 116 J 116 J 116 V 564 J 116 K 332 V 564 V 564 V 564 K 332 K 332 K 332 Model LW53 3 Way Normally Closed Piped Exhaust LW53GG8XGB LW53GH8XGB

MGP

100 200 1 20 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 30 30 50, 63 20 20 50, 63 50, 63 Load weight m (kg) 32, 40 50, 63 50, 63 32, 40 32, 40 32, 40 50, 63 32, 40 10 10 32, 40 5 20 50 76 75 100 200 5 20 25 25 26 26 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 40 40 100 100 30 30 80 80 Load weight m (kg) 20 20 10 10 5 20 50 100 200 5 20 50

MB

+ 30 (n2) n = 2, 4, 6, 8 70 + 50 (n2) n = 2, 4, 6, 8 75 + 30 (n2) n = 2, 4, 6, 8 80 + 30 (n2) n = 2, 4, 6, 8 85 + 30 (n2) n = 2, 4, 6, 8 75 + 50 (n2) n = 2, 4, 6, 8 80 + 50 (n2) n = 2, 4, 6, 8 85 + 50 (n2) n = 2, 4, 6, 8 90 + 30 (n2) n = 2, 4, 6, 8 90 + 50 (n2) n = 2, 4, 6, 8 90 n (Different sides) D-A44 n (Same side) 1 2 (Different sides or Same side) 1 70 75 80 85 105 80 110 115 115 60

10

85 D-M9lAV n 55 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 65 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 70 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 75 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 85 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface) 1 70 75 80 85 95 100 D-A9l n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 75

CL

MLGC Front flange CNA Bore (mm) B BZ FT FD FX FZ FY CB 20 25 32 40 57.5 69 69 76 5.5 5.5 6.6 6.6 6 7 7 8 52 60 60 66 38 45 45 52 65 75 75 82 25 30 30 36 Rear flange/CLG1GN Front flange/CLG1FN CV/MVG CXW Refer to p.3.1-30 for long stroke dimensions.

Modular F.R.L. Unit

75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4

Cylinder with Lock

surfaces) 70 + 30 (n 2) (n = 2, 4, 6, 8)*1 75 + 30 (n 2) (n = 2, 4, 6, 8)*1 80 + 30 (n 2) (n = 2, 4, 6, 8)*1 85 + 30 (n 2) (n = 2, 4, 6, 8)*1 D-A44 n (Same surface) 70 + 50 (n 2) (n = 2, 4, 6, 8)*1 75 + 50 (n 2) (n = 2, 4, 6, 8)*1 80 + 50 (n 2) (n = 2, 4, 6, 8)*1 85 + 50 (n 2) (n = 2, 4, 6, 8)*1 Double Acting, Single Rod Double Acting, Double Rod 1 70 75 80 85 D-F5m D-J59 D-F5mW

1

110 30 100 30 30 CP95 40 90 120 6 59 30 124 30 110 30 30 50 120 160 6 75 34 156 34 140 34 34 NCM 63 160 200 7 89 42 188 42 170 42 42 Series MXH Series MGC/MLGC Series MGG Table material: Aluminum Front plate material: Steel Front plate material: Steel NCA 2-D A B 2-C 2-E DMounting side Connecting port side Mounting side Connecting port side -X 20Data D LX B C D A 4-C2 Dimensional Range Not

CXS

10 2-M4 x 0.7 with depth 6 2-M5 x 0.8 with depth 8 38.5 58 20 56 18 9 2-M5 x 0.8 45 25 5 10 30 8 48 10 10 M6 x 1.0 x 5 CXS15 Strokes Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 25 20 15 100 80 10 30 35 40 45 50 60 70 75 80 90 100 10 15 20 25 30 35 40 45 50 60 70 75 80 90 Model 30 40 50 100 105 115 125 130 65 70 75 80 85 90 95 CXS10 97 92 87 82 102 107 112

Table of Contents

C 48 73 86 92 93 D 25 52 59 75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 281 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Duty ratio: 75% 0 0 0 5 10 20 30 15 25 0 5 10 15 Work load [kg] Work load [kg] LEJS40A LEJS63A 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] The value of 50% or less is the same as duty ratio 50% Duty ratio: 50% 15000 15000 Duty ratio: 50% Duty ratio: 25% 10 10 Duty ratio: 100% 5000 5000 Duty ratio: 100% Duty ratio: 75% Duty ratio: 75% 0 0 0 10 20 30 0 10 20 30