C95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

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Discontinued Products and Equivalent Products Discontinued Product equivalent External dimension of a product Width x Depth x Height 76 x 76 x 178 122 x 122 x 259 160 x 160 x 311 220 x 220 x 461 63 x 63 x 159 76 x 76 x 172 (178) 90 x 90 x 204 (210) 122 x 122 x 259 160 x 160 x 311 63 x 63 x 159 76 x 76 x 172 (178) 90 x 90 x 204 106 x 106 x 225 122 x 122 x 259 160 x 160 x 311 76 x 76 x 152

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100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

1

st or less Over 200 st Over 50 st to 100 st E HT A Bore size (mm) 32 40 50 63 Over 100 st to 200 st 128 128 144 144 50 st or less Over 200 st Over 50 st to 100 st 21.5 15 21 16 Over 100 st to 200 st 91 91 103 103 108 108 124 124 150 150 171 171 38.5 32 42 37 58.5 52 62 57 80.5 74 89 84 110 118 146 160 25 st or less Over 200 st Over 25 st to 50 st E HT A Bore size (mm) 80 100 Over 50 st to

A

282 328 86 MHL2-25D2 138 142 160 120 200 320 366 104 Courtesy of Steven Engineering, Inc. !

CL

Bore e f 1 to 50 68 72 72 77 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 185 185 190 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 1 to 50 12.5 12.5 12.5 12.5 20 25 32 40 68 72 72 77 35 35 35

Electric Actuators

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) Main circuit

CL

G59F Z73 A54 A33C A34C A44C A59W Y59A Y7P J51 Y59B G39C K39C Y7NW Y7PW Y7BW Y7BA F59F Relay, PLC 100 V Grommet Reed switch Solid state switch Relay, PLC PLC 40 to 100 Yes Yes 100 V, 200 V 12 V 2-wire 24 V PLC 100 V 200 V Terminal conduit 40 to 160 40 to 100 Relay, PLC DIN terminal Diagnostic indication (2-color indication) 40 to 160 40 to 100 Grommet 3-wire (NPN) 3-wire (PNP) 24

Smooth Cylinder/Low Speed Cylinder

D-X 1227 Smooth Cylinder Series CS2Y 125, 140, 160 How to Order 160 CS2 Y L 300 L 300 160 M9BW CDS2 With auto switch Y With auto switch (Built-in magnet) Number of auto switches Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs. Smooth Cylinder Made to Order Mounting For details, refer to page 1229.

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Refer to pages starting with 140 for mounting. 18 T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire LC1-1B1H1100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230

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320 0.7 MPa 500 CEP1 0.7 MPa 280 0.2 MPa 0.3 MPa 0.4 MPa 0.5 MPa 0.6 MPa 0.7 MPa 0.6 MPa 0.6 MPa 160 CE1 0.5 MPa 240 0.5 MPa 400 0.4 MPa 0.4 MPa CE2 0.3 MPa Lateral load F (N) Lateral load F (N) Lateral load F (N) 200 0.3 MPa 120 0.2 MPa ML2B 300 0.2 MPa 160 C J G5-S 80 120 200 CV 80 40 MVGQ 100 40 CC 40 120 100 80 60 180 140 100 60 240 200 160 120 80 RB Point of application L (mm) Point

CL

125 to 160 Note) 125 to 160 with auto switch type is not available.

Air Cylinder

201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 30 36 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 143 156 168 181 206 231 256 25 32 36 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 147 160 172 185 210 235 260 32 32 36 72 85 97 110 135 160 185

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 2000 2000 2000 2000 2000 2000 Minimum Stroke for Auto Switch Mounting 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700,

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3120-C6 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5120-01 800 700 600 500 400 300 200 100 0 SY7120-02 800 700 600 500 400 300 200 100 0 SY9120-03 Base Mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load

Aluminum High Vacuum Angle Valve

A XL Series Case Model Weight (kg) A (mm) Conductance (L/s) XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 B (mm) 40 103 0.25 5 50 113 0.45 14 65 158 1.1 45 Little heavy metal contamination 70 170 1.6 80 88 196 2.9 160 90 235 5.0 200 The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination

5

D-X 211 Smooth Cylinder CS2Y Series 125, 140, 160 How to Order L CS2 Y 160 300 L M9BW CDS2 Y 300 160 With auto switch With auto switch (Built-in magnet) Number of auto switches Nil 2 pcs. S 1 pc. 3 3 pcs. n n pcs. Smooth cylinder Made to Order Refer to page 213 for details.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

center Pressure center Single Double Closed center Exhaust center Pressure center 2 position 2.3 2.8 0.57 0.37 0.71 0.45 Rc 1/8 Rc 1/8 1.9 1.2 3.3[0.85] VZ540--01 2.1 3.4[1.3] 2.1 0.48 0.35 0.78[0.25] 0.46 0.36[0.57] 0.45 0.57 0.86[0.41] 0.56 0.36 0.48 0.43[0.54] 3 position 240(160) 200(120) 240(160) 2 position 2.9 0.61 0.35 0.74 0.41 2.3 VK 1.9 1.3 3.6[0.83] VZ540--02 2.2 3.7[1.4] 2.1 0.50

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200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80

Applicable Auto Switch Model

Cylinder series Bore size (mm) Technical Data 20 25 32 40 CDM2, CDBM2 CDLM2 BM3 020 BM3 025 BM3 032 BM3 040 Part No. of auto switch mounting band Cylinder series Bore size (mm) 20 25 32 40 50 63 80 100 125 140 160 180 200 CDA1, CDBA1, CDV3 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M CDVS, CDLA, CE2, CNA CDL1 BS1 -125 BS1 -140 BS1 -160 CDS1 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1