CL

/4 40 50 63 80 100 125 140 160 207 3.2 3.2 3.2 4.5 6.0 8 9 9 70 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 244 36 45 45 60 60 75 75 75 252 42 50 59 76 92 100 112 118 27 30 31 37 40 35 35 39 16.5 16.0 16.0 18.0 18.0 40 40 40 84 90 98 116 126 98 98 106 59 66 66 80 81 133 133 141 8 0 0 0 0 27 27 34 44 43 45 45 50 13 13 16 21 22 20 30 25 51 58 58 71 72 110

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

10 12 9.5 142 65 55 36 36 11 4.5 10 161 163 36 72 9 55 90 20 10 145 52 28 28 12 15 12 160 75 68 45 45 12 5.5 10 170 175 45 90 9 70 110 25 12 155 60 32 32 12 15 12 170 80 80 50 50 12 5.5 10 185 190 50 100 9 80 120 25 12 170 70 40 40 16 20 16 190 90 100 63 63 14 6.5 12 210 215 63 126 12 100 153 30 16 190 90 50 50 16 20 16 210 110 120 75 71 16 6.5 14.5 220 230 75 150 14 120 178 35 16 205 110

15

NZ M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NY M4 x 0.7 8 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NX M5 x 0.8 9 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NW M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 9 NV M4 x 0.7 8 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NU M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 11 NT M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 12 NM2 M4 x 0.7

MB

Z Bore size (mm) Z B DA DB DL DU DC DX DE DR DO DT DS DH DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 32 40 50 63 80 100 125 32 40 50 63 80 100 125 33 33 45 45 65 65 75 46 52 65 75 95 114 136 32 32 43 43 64 64 78 22 22 30 30 45 45 60 10 10 11.5 11.5 14 14 15 44 44 60 60 86 86 110 14 14 20 20 30 30 32 62 62 81 81 111 111 136 6.6 6.6 9 9 11 11 13.5 15 15 18 18 22 22

1

9 45 8 50 55 65 50 55 65 55 65 80 55 65 80 16 9 8 49 9 39 8 44 49 59 54 59 69 59 69 84 69 79 94 20 9 55 8 45 9 8 50 55 65 60 65 75 55 65 80 65 75 90 25 11 61 10 51 10 11 56 61 71 66 71 81 61 71 86 71 81 96 32 13 12 65 55 12 13 60 65 75 70 75 85 65 75 90 75 85 100 Dimensions except mentioned above are the same as standard type. 6-17-90 72 Made to Order Common Specifications: -XC35: With

CM2

8 41 20 33.5 5.5 M10 X 1.25 1to450 19.5 17 32 37 6 8 M26 X 1.5 120 40 10 15 30 62 22 13 41 7 4 60 25 75 8 45 26 34.5 37.5 5.5 M10 X 1.25 1to450 19.5 17 32 37 6 8 M26 X 1.5 122 40 12 15 64 22 13 41 7 4 60 32 75 8 45 26 21 47.3 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1to500 22 41 8 10 154 52 14 88 24 16 45 7 5 66 40 36 82 11 50 32 With rod boot (mm) ZZ Symbol h l Stroke f e Bore 1 to 50 1 to

Battery-less

Dimensions [mm] Dimensions [mm] Model G H LEFS25E-50 100 30 LEFS25E-100 100 45 LEFS25E-150 100 45 LEFS25E-200 220 45 LEFS25E-250 220 45 LEFS25E-300 340 45 LEFS25E-350 340 45 LEFS25E-400 340 45 Model G H LEFS25E-450 460 45 LEFS25E-500 460 45 LEFS25E-550 580 45 LEFS25E-600 580 45 LEFS25E-650 580 45 LEFS25E-700 700 45 LEFS25E-750 700 45 LEFS25E-800 820 45 38 LEFS Series Battery-less Absolute

Modular F.R.L. Unit

75 C 73 86 92 93 B 160 201 239 242 A 40 53 70 75 G 80 80 105 105 1/8, 1/4 1/4, 3/8 AW20K AW30K AW40K AW40K-06 1/4, 3/8, 1/2 3/4 Optional specifications With barb fitting With drain guide Metal bowl Metal bowl with level gauge Model Port size B 160 214 251 255 AA 38 45 45 B 234 272 272 B 208 246 249 B 209 247 250 1/8, 1/4 1/4, 3/8 AW20K AW30K AW40K AW40K-06 1/4, 3/8, 1/2 3/4 64 Mist Separator

CL

/4 40 50 63 80 100 125 140 160 244 36 45 45 60 60 75 75 75 252 207 3.2 3.2 3.2 4.5 6.0 8 9 9 70 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5 16.5 16.0 16.0 18.0 18.0 40 40 40 42 50 59 76 92 100 112 118 27 30 31 37 40 35 35 39 59 66 66 80 81 133 133 141 84 90 98 116 126 98 98 106 8 0 0 0 0 27 27 34 44 43 45 45 50 13 13 16 21 22 20 30 25 51 58 58 71 72 110

CXS

25 5 10 30 8 48 10 10 M6 x 1.0 x 5 CXS15 Strokes Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 25 20 15 100 80 10 30 35 40 45 50 60 70 75 80 90 100 10 15 20 25 30 35 40 45 50 60 70 75 80 90 Model 30 40 50 100 105 115 125 130 65 70 75 80 85 90 95 CXS10 97 92 87 82 102 107 112 117 122 132 142 147 99 94 179 89 109 114 119 124 129 139 149 154 159 169 104 25 35

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Series Port size 45-A 45 Mounting screw tightening torques 41 41P 42 42P 45 Nil Rc 45-NA G F SY3000 SY5000 SY7000 SY3000-120-2A(-Q) M5 x 0.8 N NPT M2: 0.16 Nm M3: 0.8 Nm M4: 1.4 Nm SY5000-75-1A(-Q) 1/8 NPTF T SY7000-73-1A(-Q) 1/4 Note) The port on a spacer can be directed to the pilot valve side or end plate side.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

133 20 273 75 40 273 296 Lube Non-lube Air-hydro Lube Non-lube Air-hydro 0.2 stroke Up to 1400 110 306 98 188 184 98 45 75 40 133 30 283 283 306 0.2 stroke Up to 1400 120 322 106 206 204 106 50 40 141 25 301 75 301 322 0.2 stroke Up to 1500 135 354 115 235 228 111 60 85 45 153 30 336 340 358 Lube Non-lube 0.2 stroke Up to 998 Lube Non-lube 135 354 120 240 257 111 60 30 336 90 45 153 345

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

22.4 9 19 60 280 M20 x 1.5 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 337.5 35 32 28 11 24 70 327.5 M24 x 1.5 0.030 0.076 +0.062 0 80 80 65 55 M39 x 1.5 60 57 45 15 41 95 382.5 45 42 35.5 13 30 80 367.5 M30 x 1.5 0.030 0.076 0.036 0.090 100 100 80 65 M48 x 1.5 75 72 56 16 50 115 431 60 57 45 15 41 100 416 M39 x 1.5 15 Series CH2E/CH2F/CH2G/CH2H JIS Standard Hydraulic Cylinder Double Acting

ISO Cylinder

45 + 45 (n 2) (n = 2, 4, 6) 10 15 45 45 + 15 (n 2) (n = 2, 4, 6) (n 2) 2 15 + 45 Band mounting Band mounting (n 2) 2 15 + 40 D-C7l D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6) D-C7l D-C80 10 15 50 50 + 20 (n 2) (n = 2, 4, 6) (n = 2, 4, 6) (n = 2, 4, 6) D-H7l D-H7lW D-H7BA D-H7NF D-H7l D-H7lW D-H7BA D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6) 10 15 60 60 + 22.5 (n 2

Table of Contents

(PD port) Common EXH port Pitch = 21 M5 (or M6) Individual vacuum supply port (PV port) Common vacuum supply port (PV port) Common supply port for vacuum switch valve (PS port) Stations (mm) 8 7 180 192 197 6 159 171 176 5 138 150 155 4 117 129 134 3 96 108 113 2 75 87 92 1 54 66 71 Symbol L1 33 45 50 L2 L3 13-2-56 56 Vacuum Module: Vacuum Pump System Series ZX (In the case of individual

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

28 FL Z H H2 H1 S P I F C2 A ZZ 66 60 60 60 75 75 75 11 8 8 8 13.5 10.5 10.5 10.5 7 5.5 5.5 5 40 32 25 20 24 22 22 18 154 122 120 116 22 17 17 13 41 32 32 26 50 45 45 41 6 6 5 8 8 8 1/8 88 64 62 62 45 41 41 37 42.5 34.5 30 24 47.3 37 37 30 M26 x 1.5 M26 x 1.5 M20 x 1.5 21 19.5 19.5 15.5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 26-0.033

V100

DXT201-19-1A Note With screw (For VZ52) Refer to pages 4-6-34 to 4-6-45 for manifold use.

Table of Contents

1 to 60 0.9 to 75 0.8 to 90 0.7 32 D400 K 8cos + 2 (5.1 + Lo) sin Angle coefficient (k): k = [to 45 (= )] = 1, [to 60] = 0.9, [to 75] = 0.8, [to 90] = 0.7 Lo: Distance from mounting surface to load center of gravity (cm) 40 20 36 10 5.25 6 2.55 15 17.5 Bore size (mm) -X Allowable load weight (WA) (kg) 1.9 + Lo 2.2 + Lo 2.7 + Lo 2.9 + Lo 205.

C95

50 63 75 16 20 25 25 30 35 10 10 12 12 16 16 130 145 155 170 190 205 7 9 9 9 12 14 10 12 12 16 16 20 65 75 80 90 110 140 12 15 15 20 20 25 142 160 170 190 210 230 45 52 60 70 90 110 26 28 32 40 50 60 26 28 32 40 50 60 9.5 12 12 16 16 20 32 36 45 50 63 75 10 11 12 12 14 16 4.5 4.5 5.5 5.5 6.5 6.5 144 163 175 190 215 230 142 161 170 185 210 220 32 36 45 50 63 71 7 10 10 10 12 14.5 17 22 22