Electric Actuator/Slider Type

50 (30) 30 (20) 24 (1.5) 32 1.5 (0.5) 40 0.5 (0.16) * The values in ( ) are for a closely-mounted driver. 9 Electric Actuator/Rod Type Series LEY Specications Model LEY25 (Top/Parallel)/LEY25D (In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250, 300, 350, 400 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250, 300, 350

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

MG

MGP MGPA12-150 MGP MGPA12-100 MGPA -200 32 40 MGPA -150 32 40 MGPA -100 32 40 MGPA -200 32 32 40 40 0.2 0.4 MGP MGPA12-75 MGPA12-75 MGPA -150 32 32 40 40 0.15 0.3 MGPA -100 32 32 40 40 0.1 0.2 MGPA12-50 MGPA12-50 MGPA -50 32 40 MGPA -50 32 32 40 40 0.05 0.1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

5 Port Solenoid Valve Series SY3000/5000/7000/9000

3) Exhaust throttle SQ Series 38 1 4 1 8 M5 38 1 2 1 2 1 4 1 8 M5 VFS Bracket C4 C6 C8 C10 C12 N3 N7 N9 N11 VFR VQ7 SY3 20 SY5 20 SY7 20 External Pilot (Note 2) External Pilot (Note 2) External Pilot (Note 2) DIN terminal (EA, EB) (P) M8 connector SY9 20 SY3 40 SY5 40 SY7 40 External pilot Sub-plate External pilot External pilot DIN terminal M8 connector SY9 40 Standard Option Made to order

CM2

150 J Without auto switch MB1 CA2 With auto switch DM2 C W L H F A J 40 H7BW 150 CS1 Stroke (mm) Number of auto switches Bore size Built-in magnet 20 25 32 40 C76 (Refer to Standard Stroke on page 64-26.) 20 mm 25 mm 32 mm 40 mm 2 pcs. 1 pc. n pcs.

Floating Joint

150 10 16 20 32 40 63 Be sure to read this before handling the products.

LJ1H

Work piece mounting reference plane Rc 1/4 Vacuum suction port Rc 1/4 Vacuum suction port 80 Stroke + 115 (table movement range) 7.5 194 (249) 41 46 58 2-T-slot 1 57 65 69 90 95 9.3 44 40 (T-slot pitch) 2-T-slot 2 Stroke + 350 (405) 17 28 23 (78) 40 36 Body mounting reference plane 3-5H10 depth 5 3.3 5.8 1.7 5.3 T-slot 1 dimensions (switch groove) 11.5 45 27 (82) 40 80 Stroke + 145 9.4 4.5

MGP

Values) Horizontal load Note: 1N = 0.2248 lbf 1in = 25.4mm Displacement MGPA32, 40 MGPA12 0.4 0.8 MGPA -400 32 40 32 40 MGPA12-250 MGPA12-250 MGPA -400 0.35 0.7 Plate displacement mm Plate displacement mm 0.3 0.6 MGPA -300 32 40 MGPA -300 32 40 0.25 0.5 MGPA12-150 MGPA12-150 MGPA12-100 MGPA -200 32 40 MGPA12-100 MGPA -200 32 40 0.2 0.4 MGPA12-75 MGPA12-75 MGPA -150 32 40 MGPA -100 32 40

MB

, 175, 200, 250, 300, 350, 400, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

10

Series 32, 40, 50, 63, 80, 100 RoHS How to Order MBKW 150 L Z 32 MDBKW L Z 32 150 M9BW With auto switch With auto switch (Built-in magnet) Nil 2 pcs.

Cylinder with Lock

-10-125 JA40-12-125 JA50-16-150 JA50-16-150 JAH50-20-150 JAH50-20-150 32 Load mass [kg] 50 30 40 *1 Order two foot brackets per cylinder. * Accessories for each mounting bracket are as follows.

Table of Contents

40 50 50 55 55 65 85 , Misc.

HRS100/150

Pump Capacity HRS100/150-Am-20/40-m HRS100/150-Wm-20/40-m 0.5 50 Circulating fluid pressure [MPa] HRS Circulating fluid outlet (60 Hz) Usable range (50 Hz) 0.4 40 HRS 090 Pump head [m] 0.3 30 Usable range (60 Hz) HRS 100/150 HRS 100/150 Circulating fluid outlet (50 Hz) 0.2 20 HRSH 090 Circulating fluid return port 0.1 10 HRSH 0 0 0 10 20 30 40 50 60 70 HRSE Circulating fluid flow rate [L

CM2

45 40 60 25 40 26 34.5 37.5 M10 X 1.25 19.5 17 32 6 M26 X 1.5 15 5.5 12 22 9 13 10 8 40 45 40 60 32 40 26 21 M14 X 1.5 21.5 M32 X 2 44.5 42.5 46.5 22 41 8 7 14 24 10 16 11 11 53 50 53 77 40 32 Dimensions by stroke Boss-cut Built-in One-touch fitting (mm) (mm) Stroke Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore 20 25 32 40 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250

MGP

Values) Horizontal load Note: 1N = 0.2248 lbf 1in = 25.4mm Displacement MGPA32, 40 MGPA12 0.4 0.8 MGPA -400 32 40 32 40 MGPA12-250 MGPA12-250 MGPA -400 0.35 0.7 Plate displacement mm Plate displacement mm 0.3 0.6 MGPA -300 32 40 MGPA -300 32 40 0.25 0.5 MGPA12-150 MGPA12-150 MGPA12-100 MGPA -200 32 40 MGPA12-100 MGPA -200 32 40 0.2 0.4 MGPA12-75 MGPA12-75 MGPA -150 32 40 MGPA -100 32 40

Smooth Cylinder/Low Speed Cylinder

(Nil) UZ Rod side trunnion style CM2X L 40 150 C L With auto switch 40 M9BW 150 CDM2X Number of auto switches With auto switch (Built-in magnet) Thread type Nil S n 2 pcs. Nil TN TF Rc 1 pc. Low speed cylinder NPT Bore size n pcs.

SY

Valves to drive cylinders of sizes 6 to 200 Pressure: 0.5MPa, Load factor: 50% Cylinder bore size mm Series CJ2 Series CM2 Series MB/CA1 6 10 16 20 25 32 40 40 50 63 80 100 Series CS1 Cylinder speed mm/s Base mounted (sub-plate) Cv 125 140 160 180 200 150 300 450 600 750 150 300 450 600 750 150 300 450 600 750 0.3 SY3000 0.7 SY5000 1.2 SY7000 150 300 450 600 750 SY9000 2.8 The speed of CJ2

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Rod clevis (ISO 8140) Piston rod ball joint (ISO 8139) Floating joint GKM KJ JA Bore size (mm) Supplied with clevis pin and safety device. 32 40 50 63 80 100 125 GKM10-20 KJ10D JA30-10-125 GKM12-24 KJ12D JA40-12-125 GKM16-32 KJ16D JA50-16-150 GKM16-32 KJ16D JA50-16-150 GKM20-40 KJ20D JAH50-20-150 GKM20-40 KJ20D JAH50-20-150 GKM30-54 KJ27D JA125-27-200 Refer to page 83 for dimensions.

1

135 40 73 80 106 35 60 27 5.5 6 8 4 16 134 150 102 118 9 9 85 140 M8 35 25 75, 100, 125 149 16 170 50 93 95 134 50 75 34 6.5 9 10 7 19 170 186 134 150 9 9 105 175 M8 45 32 150, 200, 250 149 16 170 50 93 95 134 50 75 34 6.5 9 10 7 19 170 186 134 150 9 9 105 175 M8 45 40 300 182 19 194 55 103 115 152 56 90 38 7 11 12 7 21 190 210 140 160 11 12 115 200 M10 50 Long Stroke Bore size (mm) Bore

Integrated Controller

30 3000 mm/s2 10 20 5 10 10 mm/s2 5000 mm/s2 0 0 50 100 150 200 250 300 350 0 0 Speed: V [mm/s] 100 200 300 400 500 Speed: V [mm/s] 400 EQFS25HC/Ball Screw Drive Horizontal/Lead 3 Vertical/Lead 3 120 40 35 30 25 20 15 10 5 0 50 100 150 200 100 Work load: W [kg] Work load: W [kg] 80 3000 mm/s2 60 3000 mm/s2 40 5000 mm/s2 20 10 mm/s2 0 0 0 Speed: V [mm/s] 50 100 150 200 250 Speed: V [mm/s]