Hydraulic

155 180 95 100 105 110 115 120 125 130 135 160 185 100 105 110 115 120 125 130 135 140 165 190 105 110 115 120 125 130 135 140 145 170 195 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 7 30D (M) 35D (M) 15.5 35D (M) 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) M5 x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 140l CH QB32 5D (M) 100D (M) M10

LJ1H

MSM021P1A Main circuit of switch MSM022P1A 200 Output Black lead wire 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation HC-PQ23 200 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yaskawa Electric Corporation Blue lead wire 200/230 SGDE-02AP SGME-02AF12 H S For motor mounting dimensions, refer to the dimensions for series LJ1 30 on page 143 as a reference for mounting

10

239 264 289 125 120 130 140 150 170 190 210 230 250 270 290 310 Bore size [mm] S ZZ 32 90 141 40 90 145 50 102 164 63 102 164 80 124 200 100 124 200 125 132 235 Model without air cushion is designed to include rubber bumpers.

Air Cylinder

to 200 201 to 300 301 to 400 401 to 500 20 12.5 25 37.5 50 75 100 125 63 76 88 101 126 151 176 143 156 168 181 206 231 256 23.5 10.5 25 12.5 25 37.5 50 75 100 125 67 80 92 105 130 155 180 147 160 172 185 210 235 260 23.5 10.5 32 12.5 25 37.5 50 75 100 125 67 80 92 105 130 155 180 149 162 174 187 212 237 262 23.5 10.5 40 12.5 25 37.5 50 75 100 125 71.5 84.5 96.5 109.5 134.5 159.5 184.5 181

MG

to 400 st 32 40 50 63 300 171 42 4 96 4.5 44 3 110 6 M8 x 1.25 78 16 98 21 63 48 124 200 45 83 121 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 300 172 50 4 104 4.5 44 3 118 6 M8 x 1.25 86 16 106 22 72 48 124 200 46 84 122 300 174 66 5 130 6 60 4 146 8 M10 x 1.5 110 20 130 24 92 48 124 200 48 86 124 300 174 80 5 130 6 70 4 158 8 M10 x 1.5 124 20 142 24 110 52 128 200 50 88 124

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

(3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63 50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P

MGP

to 275 st Over 275st Over 275st 75st or less 45 11 7.5 Rc 1/8 32 15 34 30 96 44 110 78 98 63 48 300 83 121 171 32 46 11 7.5 Rc 1/8 38 18 38 30 104 44 118 86 106 72 48 124 200 300 84 122 172 40 48 14 9 Rc 1/4 34 21.5 47 40 130 60 146 110 130 92 124 200 300 48 86 124 174 50 14 9 Rc 1/4 39 28 55 50 130 70 158 124 142 110 52 128 200 300 50 88 124 174 63 MGPM (slide bearing)/Dimensions A, DB,

ISO Standard Hydraulic Cylinder

24 26 25 42 16 18 11 41 74 1/2 33 63 25 to 800 90 90 64.3 14 84 12 M27 x 2 M12 x 1.25 13 117 36 65 36 145 30 23 32 50 16 17 13 39 80 1/2 33 80 25 to 800 115 115 82.7 18 96 16 M33 x 2 M16 x 1.5 9 149 45 83 45 180 41 26 41 60 20 20 17 46 93 3/4 40 100 25 to 1000 130 130 96.9 18 113 16 M42 x 2 M16 x 1.5 10 162 56 97 56 200 50 25 52 72 22 20 19 45 101 3/4 40 Bore size (mm) RD ZZ S Y Z V SS -

C95

130 130 130 + 100(n-2) n = 2, 4, 6, 8 130 + 100(n-2) n = 2, 4, 6, 8 135 135 135 135 + 100(n-2) n = 2, 4, 6, 8 135 + 100(n-2) n = 2, 4, 6, 8 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 120 120 + 55(n-4)/2 n = 4, 8, 12, 16 160 160 + 55(n-4)/2 n = 4, 8, 12, 16 250 10 200 10 125 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 20 + 55(n-2)

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

Table of Contents

200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80

CL

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

Table of Contents

mm/sec Cylinder stroke: 200 mm AQ The set pressure can be either fixed or variable.

MY1

(400) 200 l l MY1HT63 MY1HT50 100 2.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 Stations 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 8 223 212.5 200 11.5 9 248 237.5 216 16 10 260.5 250 232 14 L1 L2 L3 L4 (mm) Stations 11 273 262.5 248 12.5 12 298 287.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Model C Mounting bolt Mounting bolt D 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 50 55 60 65 70 75 80 85 90 95 130 155 Model C Mounting bolt D 45 50 55 60 65 70 75 80 85 90 125 150 55 60 65 70 75 80 85 90 95 130 155 55 60 65 70 75 80 85 90 95 130 155 C' D' 40 45 50 55 60 65 40 45 50 55 60 65 40 45 50 55 60 65

V100

Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Push type (Tool required) Push down on the manual override button with a small screwdriver until it stops. Release the screwdriver and the manual override will return.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

LB LC LD LE LF LH LT Model LA F H MM U FD FT FX FY ZX ZY Model M 6 x 1.0 depth 12 200 (233) 224 (257) CRA1L50 CRA1F50 41 62 9 4 39 44 108 4.5 114 9 13 90 50 110 81 M 6 x 1.0 depth 12 235 (273.5) 263 (301.5) CRA1L63 CRA1F63 48 76 11 5 45 55 127 5 136 11.5 15 105 59 130 101 M8 x 1.25 depth 16 274 (318) 316 (360) CRA1L80 CRA1F80 58 92 13 5 55 67 154 6 165 13.5 18 130 76 160 119 M10 x 1.5 depth

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

LB LC LD LE LF LH LT Model LA MM U FD FT FX FY ZX ZY F H Model M 6 x 1.0 depth 12 200 (233) 224 (257) CRA1L50 CRA1F50 41 62 9 44 4 39 108 4.5 114 9 13 90 50 110 81 M 6 x 1.0 depth 12 235 (273.5) 263 (301.5) CRA1L63 CRA1F63 48 76 11 55 5 45 127 5 136 11.5 15 105 59 130 101 M8 x 1.25 depth 16 274 (318) 316 (360) CRA1L80 CRA1F80 58 92 13 67 5 55 154 6 165 13.5 18 130 76 160 119 M10 x 1.5 depth