MY1

) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

Auto Switch Guide

Note 3) Load voltage is 100 VAC. Use the contact protection box in any of the above listed situations. The contact point life may decrease. (Refer to page 6-16-7 for contact protection box.) Most sensitive position ( ): dimensions for D-A93.

Compact Cylinder

10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 55 60 65 70 75 80 85 90 95 100 110 130 150 55 60 65 70 75 80 85 90 95 100 110 130 150 M6 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110

CATALOG

12 16 110 20 210 90 50 50 16 63 14 6 215 210 100 120 75 35 16 205 14 20 140 25 230 110 60 60 20 75 16 6 230 220 Diameter AH AB I1 XV TL TD TM UW TF UF E2 32 32 7 18 73 12 12 50 49 64 79 50 40 36 9 22 82.5 16 16 63 58 72 90 55 50 45 9 24 90 16 16 75 71 90 110 70 63 50 9 28 97.5 20 20 90 87 100 120 80 80 63 12 34 110 20 20 110 110 126 153 100 100 71 14 40 120 25 25 132 136 150 178 120 Courtesy

A

12 16 110 20 210 90 50 50 16 63 14 6 215 210 100 120 75 35 16 205 14 20 140 25 230 110 60 60 20 75 16 6 230 220 Diameter AH AB I1 XV TL TD TM UW TF UF E2 32 32 7 18 73 12 12 50 49 64 79 50 40 36 9 22 82.5 16 16 63 58 72 90 55 50 45 9 24 90 16 16 75 71 90 110 70 63 50 9 28 97.5 20 20 90 87 100 120 80 80 63 12 34 110 20 20 110 110 126 153 100 100 71 14 40 120 25 25 132 136 150 178 120 Courtesy

Rotary Actuator

Size: 30, 50, 63, 80, 100 Size: 30, 50, 63, 80, 100 90, 180 90, 180, 100, 190 90, 180 90, 180, 100, 190 30 50 to 100 30 50 to 100 Rotating angle Lightweight body by changing the body and the cover shape.

Auto Switch Guide

Note 3) Load voltage is 100 VAC. Use the contact protection box in any of the above listed situations. The contact point life may decrease. (Refer to page 10-20-7 for contact protection box.) Most sensitive position ( ): dimensions for D-A93.

Auto Switch Guide

Note 3) Load voltage is 100 VAC. Use the contact protection box in any of the above listed situations. The contact point life may decrease. (Refer to page 9-15-7 for contact protection box.) Most sensitive position ( ): dimensions for D-A93.

Auto Switch Guide

Note 3) Load voltage is 100 VAC. Use the contact protection box in any of the above listed situations. The contact point life may decrease. (Refer to page 8-30-7 for contact protection box.) Most sensitive position ( ): dimensions for D-A93.

CHKD/CHKG

140 145 150 155 160 165 190 215 240 265 290 55 60 65 70 75 80 85 90 95 100 125 150 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 110 135 160 185 210 75 80 85 90 95 100 105 110 115 120 145 170 195 220 245 12.4 15.5 CHKGB25 CHKGB63 10.4 16 CHKGB32 CHKGB80 10.5 22 CHKGB40 CHKGB100 13.5 26.5 282 Compact Hydraulic Cylinder: 16 MPa CHKG Series Specific Product Precautions

Auto Switch Guide

Note 3) Load voltage is 100 VAC. Use the contact protection box in any of the above listed situations. The contact point life may decrease. (Refer to page 8-30-7 for contact protection box.) Most sensitive position ( ): dimensions for D-A93.

Auto Switch Guide

Note 3) Load voltage is 100 VAC. Use the contact protection box in any of the above listed situations. The contact point life may decrease. (Refer to page 8-30-7 for contact protection box.) Most sensitive position ( ): dimensions for D-A93.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt C' D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 130 155 D 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 65 70

Applicable Auto Switch Model

40, 50, 63, 80, 100 * Can not be used for lube type.

Auto Switch Guide

voltage 100 VAC 24 VDC 4 to 8 VDC 1.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

10

1) 75 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 85 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 95 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 100 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 105 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 110 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 125

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

Note 3) Load voltage is 100 VAC. Use the contact protection box in any of the above listed situations. The contact point life may decrease. (Refer to page 11-11-5 for contact protection box.) ( ): dimensions for D-A93.

REA/REB

PA Model HS PW LD M N PB L JK NN P MM HT J High Precision Guide Type REBH Order Made Auto Switches REAL15 REAL20 REAL25 REAL32 REAL40 7.5 70 95 8 45 9.5 75 5.6 M5 x 0.8 M6 x 1.0 M5 x 0.8 M8 x 1.0 21 25 120 5.6 10 10 50 90 86 10 M10 x 1.0 Rc 1/8 M6 x 1.0 31 10 M6 x 1.0 11 100 130 10 60 10 86 7 Rc 1/8 M8 x 1.25 M6 x 1.0 M14 x 1.5 10 39 160 9.2 12 11.5 70 120 100 15 M20 x 1.5 Rc 1/8 M8 x 1.25

CQS

Thus, it can be used in a Class 100 clean room.