Table of Contents

Refer to pages starting with 140 for mounting. 18 T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire LC1-1B1H1100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 Stations 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 8 223 212.5 200 11.5 9 248 237.5 216 16 10 260.5 250 232 14 L1 L2 L3 L4 (mm) Stations 11 273 262.5 248 12.5 12 298 287.5

MY1

M M M m m m 140 240 180 300 140 240 200 320 140 220 200 320 50 63 MY1HT The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke range (mm) Bore size (mm) AP AL AK AJ AI AH AG AB AA V U T S N M L K J I B A O P 63 60 12 14 180 158 250 228 25 25 108 192 30 72 100 66 180 135 117 65 228 200 Rc 1/4 M12 x 1.75 depth 23 75, 100, 125 150, 200, 250 300 80 70 16 14 200 178 284 262 27 30 128 224 35 89 115 76 214 160 138 75 262 230 Rc 3/8 M12 x 1.75 depth 28 100 80 16 16 226 200 326 300 30 32 143 262 40 110 125 80 245 190

Electric Actuator with Integrated Guide

Motor output (W) Motor model Compatible driver model Power supply voltage (V AC) Motor dimension (mm) 100/115 MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 95 MSM022P1A 200 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation 89 200 HC-PQ23 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yasukawa Electric Corporation 96.5 200/230 SGDE-02AP SGME-02AF12 Refer

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

CRQ2 L H Shock absorber for low energy Shock absorber for high energy MSQ Port location/Rotation MRQ Standard type 180 2 3 4 5 Rotation 180 90 90 180 D3: Standard type, 90 2: Standard type, 180 Symmetric type 90 Standard type Connecting port Connecting port Refer to the table to the right. 20Connecting port position 5: Symmetric type, 90 4: Symmetric type, 180 Symmetric type Connecting port

Rotary Table/

L H Low energy shock absorber High energy shock absorber Connecting port position and rotation Port location/Rotation Standard type 180 2 3 4 5 Rotation 180 90 90 180 3: Standard type, 90 2: Standard type, 180 Symmetric type 90 Standard type Connecting port Connecting port Refer to the table to the right.

MGG

(mm) Bore size (mm) Stroke range (mm) AL AK AP AJ AI AH AG N AB M AA L K J I V B U T A O P S 63 80 100 12 14 60 180 158 250 228 100 25 66 25 180 135 117 65 108 228 192 30 M12 x 1.75 depth 23 Rc 1/4 200 72 75, 100, 125 150, 200, 250 300 16 14 70 200 178 284 262 115 27 76 30 214 160 138 75 128 262 224 M12 x 1.75 depth 28 Rc 3/8 35 230 89 16 16 80 226 200 326 300 125 30 80 32 245 190 153 85

Applicable Auto Switch Model

Cylinder series Bore size (mm) Technical Data 20 25 32 40 CDM2, CDBM2 CDLM2 BM3 020 BM3 025 BM3 032 BM3 040 Part No. of auto switch mounting band Cylinder series Bore size (mm) 20 25 32 40 50 63 80 100 125 140 160 180 200 CDA1, CDBA1, CDV3 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M CDVS, CDLA, CE2, CNA CDL1 BS1 -125 BS1 -140 BS1 -160 CDS1 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1

TABLE OF CONTENTS

300) 200 (200) 150 (200) 100 (125) 100 35 (40) N.O.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

( ) are the dimensions for rotation of 180 and 190.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

( ) are the dimensions for rotation of 180 and 190.

CA2

Bore size (mm) Standard stroke (mm) 2040 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Intermediate strokes not listed above are also available.

Table of Contents

For 90 and 180, refer to page 11-2-9.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3120-C6 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5120-01 800 700 600 500 400 300 200 100 0 SY7120-02 800 700 600 500 400 300 200 100 0 SY9120-03 Base Mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load

MY1

300 400500 1000 1500 100 200 300400 500 1000 1500 Piston speed (mm/s) 100 200 300400500 1000 1500 Piston speed (mm/s) 100 200 300400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) 8-11-7 8 Series MY1 Precautions Be sure to read before handling.

energy saving effect

Page 180 Air-cooled 200 V wCaster Adjuster-foot Kit . Page 180 Water-cooled 200 V HEA eElectric Conductivity Control Set . Page 181 Air-cooled 400 V IDH rBypass Piping Set . Page 181 Water-cooled 400 V Cooling Capacity. Page 170 tSnow Protection Hood . Page 182 Pump Capacity . Page 171 yParticle Filter Set . Page 183 Dimensions . Page 172 uWired remote controller .

LG1H

Refer to pages starting with 181 for mounting. 95 95 100 8(4)-6.2 B () () (170) 110 20 95 95 A () () (150) A B 100 200 300 400 Stroke Model LG1H212NA-100-F LG1H212NA-200-F LG1H212NA-300-F LG1H212NA-400-F 60 160 260 80 180 280 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

CL

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.