Tie-rod Type Hydraulic Cylinder

80 60 22.4 30 17 17 M10 x 1.5 22 12 25 M18 x 1.5 30 80 80 26 65 13 65 212 12 75 115 M12 x 1.75 32 8 100 100 75 28 32 22 20 26 14 29 M22 x 1.5 35 90 100 34 80 13 80 234 14 90 139 M27 x 2 M12 x 1.75 38 6.5 118 118 90 35.5 35 27 19 27 14 34 35 100 125 34 80 15 100 250 16 112 170 M14 x 2 M27 x 2 38 6.5 140 140 112 35.5 35 27 19 27 16 34 35 100 160 43 100 17 110 279 18 140 197 M16 x 2 M33 x 2

CLS

ML1C 125 140 160 180 200 250 Bore size (mm) Resistance (N) 962 1206 1576 1995 2463 3848 D3.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt D 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 Model C D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 Model C Model C D 65 70 75 80 85 90 95 100 105 130 155 70 75 80 85 90 95 100 105 110 135 160 80 85 90 95 100 105 110 115 120 145 170 Bolt CDQ2WB32-5D -10D

MXW

MXW8 MXW12 MXW16 MXW20 MXW25 Applicable slide table 0.98 2.94 5.88 19.6 58.8 Max. absorbing energy (J) MX 5 6 7 12 15 Stroke absorption (mm) 0.05 to 5 Max. collision speed (m/sec) Max. operating frequency (cycle/min) MTS Stroke adjustment 70 80 80 45 25 422 245 245 814 1961 Max. allowable thrust (N) MY 1.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

100 Load N 0 20 40 60 80 100 Load N 0 50 100 150 200 250 8-9-10 10 Air Slide Table Long Stroke Type Series MXY Construction @3 y w q r u #0 MX MTS !

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

stroke end) and its mounting height Operating range Auto switch mounting brackets/Part no. 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250 300, 350, 400, 450, 500, 600, 700 80: 1400 100: 1500 Note 1) Intermediate strokes not listed above are produced upon receipt of order.

XM, XY

209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal XMC, XYC Series How to Order Angle type M9N A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

NCQ8

Nil (Example) M9N 118in (3 m) . L M9NL 197in (5 m) .

CE

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 10-12-16 for details on other applicable auto switches than listed above.

CE

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 10-12-16 for details on other applicable auto switches than listed above.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 100 Non-lube Double acting, Double rod (40 to 63) 20 25 32 40 50 63 80 100 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20 25 32 40 50 63 80 100 Size Suction flow rate L/min (ANR) 20/25/32/40 50/63/80/100 1.5 MPa 1.0 MPa

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

A A F F A F L L L 6 6 6 L = 80 mm L = 80 mm L = 80 mm MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 MXP6-5 MXPJ6-5 MXP6-10 MXPJ6-10 0.05 0.05 0.06 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.04 0.04 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

CHKD/CHKG

85 90 95 100 105 110 115 120 125 150 175 200 225 250 85 90 95 100 105 110 115 120 125 130 155 180 205 230 255 100 105 110 115 120 125 130 135 140 145 170 195 220 245 270 120 125 130 135 140 145 150 155 160 165 190 215 240 265 290 55 60 65 70 75 80 85 90 95 100 125 150 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 110 135 160 185 210 75 80 85 90 95 100 105 110 115 120

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] Model L A B n C D E Without lock With lock 11-LEJS40S-200523.5 563.5 206 260 6 1 200 80 11-LEJS40S-300623.5 663.5 306 360 6 1 200 180 11-LEJS40S-400723.5 763.5 406 460 8 2 400 80 11-LEJS40S-500823.5 863.5 506 560 8 2 400 180 11-LEJS40S-600923.5 963.5 606 660 10 3 600 80 11-LEJS40S-7001023.5 1063.5 706 760 10 3 600 180 11-LEJS40S-8001123.5 1163.5 806 860 12 4 800 80 11-LEJS40S-9001223.5

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Nil (Example) M9N 1 m . M (Example) M9NM 3 m . L (Example) M9NL 5 m .

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

MXQ

120 20 40 60 80 100 20 40 60 80 100 Load (N) Load (N) Load (N) 8-5-12 13 Air Slide Table Series MXQ Table Displacement due to Pitch Moment Load Table Displacement due to Yaw Moment Load Table Displacement due to Roll Moment Load Displacement at A when a load is applied to F with the slide table retracted.

Stroke Reading Cylinder and Counter

LEFT RIGHT 35.5 A : B : C : D : t : 10 sec or more required 80 4 56 DOWN 2.5 sec or more required SEL.