10

50 75 100 125 40 56 41 23 12.5 25 37.5 50 75 100 125 50 64 51 25 12.5 25 37.5 50 75 100 125 150 63 64 51 25 12.5 25 37.5 50 75 100 125 150 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 [mm] Rubber Bumper Bore size [mm] h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301

Solid State Auto Switches

CE marking Precautions Caution D-A44C Relay, PLC 100 VAC 5 to 25 mA q Built-in 2.4 V or less (Up to 20 mA)/3.5 V or less (Up to 50 mA) Red LED illuminates when turned ON. CE marking 24 VDC (3) 5 to 50 mA 200 VAC 5 to 12.5 mA 1. Use cable whose O.D. is within the size in the figure to maintain water resistant performance. 2.

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Air Slide Table

1.5 V = 100 V = 100 2.5 2.5 1.0 1.0 V = 200 V = 200 2.0 2.0 V = 300 V = 300 Load mass m [kg] Load mass m [kg] 0.5 0.5 V = 500 V = 500 0.3 0.3 1.5 1.5 V = 100 V = 100 0.0 0.0 30 30 0 10 20 40 50 60 70 80 90 100 0 10 20 40 50 60 70 80 90 100 1.0 1.0 L3: Overhang Allowable range: 100 mm L3: Overhang Allowable range: 100 mm Allowable overhang L [mm] Allowable overhang L [mm] V = 200 V = 200

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0.9 1 Operating pressure P (MPa) Operating pressure P (MPa) -X Selection Graph (6) to (8) (Horizontal mounting) 20Data Graph (6) l: 100 mm or less Graph (7) l: 101 to 200 mm Graph (8) l: 201 to 300 mm 300 100 200 100 100 Load weight m (kg) Load weight m (kg) Load weight m (kg) 80 80 80 10 10 10 63 63 63 50 50 50 40 1 1 1 25 20 25 20 40 32 40 32 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000

Rotary Actuator/Vane Type

V 5 V, 12 V, 24 V, 100 V 90A Oilproof heavy-duty cord V V V Reed auto switch No 2-wire Yes 97 Vinyl parallel cord V V V 100 V 93A Oilproof heavy-duty cord V V V XC4 Change the rotation range W, J M9NV M9N 3-wire (NPN) V V V v v IC circuit XC5 Change rotation range between 0 and 200 W, J 5 V, 12 V D3-wire (PNP) M9PV M9P V V V v v 2-wire 12V M9BV M9B V V V v v Solid state auto

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63/10 to 100 80, 100/25 to 100 7-6-142 Air-hydro (Bore size 20 to 100) Clean Series (Bore size 12 to 63) Built-in One-touch fittings (Bore size 32 to 63) Foot/Flange style Double clevis style Copper-free 7-6-1 2 Compact Cylinder: Standard

MHZ

100 150 Misc.

MHZ

MPa 0.6 MPa 0.6 MPa 0.6 MPa Gripping force (N) 300 Gripping force (N) 40 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MPa 0.4 MPa 250 0.4 MPa 0.4 MPa 0.4 MPa 30 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MPa 20 150 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MPa 100 10 50 0 10 20 30 40 50 60 0 50 100 150 200 Gripping point L (mm) Gripping point L (mm) MHZ2-20D/MHZL2-20D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping

Compact

] 500 500 500 500 400 400 400 400 m L3 [mm] L3 [mm] L3 [mm] L3 [mm] 300 300 300 300 L3 Z 200 200 200 200 100 100 100 100 0 0 0 0 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 200 200 200 200 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] m X 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work

CQS

75, 100, 125, 150 175, 200 75, 100, 125, 150 175, 200, 250, 300 25 Standard Non-rotating Rod Anti-lateral Load Reed switch D-A90/A90V D-A93/A93V D-A96/A96V Series CQSW 12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

0 Driver type*6 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to 230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 11LEJS 11LEJS 25Au Vacuum port

Auto Switch Guide

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D-J51: 5 ms or less Except D-J51 (1 mA or less at 100 VAC, 1.5 mA or less at 200 VAC), D-M5NW/M5PW/M5BW, D-F9BAL, D-P5DWL (1 mA or less at 24 VDC).

ISO Standard Hydraulic Cylinder

IC circuit Table 1 Manufacturability Check List by Mounting Type and Port Position Yes 100 V 100 V or less No Yes No Yes IC circuit Mounting bracket B LA CB TA FY FZ Grommet 12 V Relay PLC Port position 2-wire 100 V, 200 V 24 V A64 200 V or less Nil A B C D E A59W Diagnostic output (2-color indicator) Water resistant type auto switches can be mounted on the above models, but in such case

Environment

230 S1 LECSS1-S 100 to 120 S2 LECSS2-S 200 to 230 LEC !

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

1000 25 150 200 300 400 500 600 700 800 900 1000 50 100 150 200 300 400 500 600 700 800 900 32 40 50 63 80 100 125 313 288 250 263 225 238 200 213 175 188 150 163 125 138 23 100 113 36 75 100 48 54 12.5 37.5 50 75 88 313 288 250 263 225 238 200 213 175 188 150 163 125 138 23 100 113 36 75 100 54 54 12.5 25 37.5 50 75 88 300 250 275 225 250 200 225 175 200 150 175 125 150 25 100 125 51 75

Table of Contents

200 203 Series CDQ2 With Auto Switch.