Actuation: 2 [2 Position Double (Double Solenoid)], Seal: Rubber Seal, Function: D [2 Position Double (Double Solenoid Specification)], Voltage: 24VDC, Electrical Entry: Plug Connector w/o Connector, Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: Top Ported ø6 One-touch Fitting, Plug Mount Port: B [Port 2(B)], Manifold Block: w/Manifold Block, Built-in Back Pressure

Fieldbus System

m is number of I/O Units.

Compact 5-Port Solenoid Valve

2 1.5 m 3 3 m SI unit output polarity, End plate type (S6m) Refer to page 63.

Table of Contents

M D1 D1 D2 D2 L6 L6 L3 L4 AS H H ASP (Width across flats) (Width across flats) ASN D3 D3 AQ A1 A1 ASV L5 L5 A2 A2 AK ASS T T ASR ASF Model T H D1 D2 D3 L1 L2 L6 A2 M L5 A1 Weight (g) Note 5) MAX.

Environment

1000 1000 LC3F2 800 800 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] Bottom m Me 600 600 1000 1000 Y L5 400 400 500 500 200 200 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 1000 1000 800 800 1500 1500 L6 [mm] L6 [mm] L6 [mm] L6 [mm] L6 600 600 m Me 1000 1000 Z 400 400 500 500 200 200

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L dimension 1.5 m 3 m 5 m Part no. L dimension 1.5 m 3 m 5 m AXT100-MC26-015 AXT100-DS25-015 AXT100-MC26-030 AXT100-DS25-030 AXT100-MC26-050 AXT100-DS25-050 When a commercially available connector is required, use a 25 pin female connector conforming to MIL-C-24308. L L (60) 44 Approx. 10 8 16 14 25 1 13 47.04 55 Multi-core vinyl cable 0.3 mm 2 x 25C 2 x M2.6 x 0.45 Terminal no.

Battery-less

3000 2500 Horizontal (Wall) 1500 1500 Me 2000 L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1500 Y L5 1000 500 500 500 0 0 0 0 0.5 1 1.5 2 0 2 4 6 8 0 4 8 12 Work load m [kg] Work load m [kg] Work load m [kg] 1500 500 900 1250 750 400 1000 600 L6 [mm] L6 [mm] L6 [mm] L6 300 750 450 Z 200 m Me 500 300 100 250 150 0 0 0 0.5 1 1.5 2 0 0 4 8 12 Work load m [kg] 0 2 4 6 8 Work load m [kg] Work load m [

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

2000 1000 1000 LC3F2 800 800 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] Bottom m Me 600 600 1000 1000 Y L5 400 400 500 500 200 200 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 1000 1000 800 800 1500 1500 L6 [mm] L6 [mm] L6 [mm] L6 [mm] L6 600 600 m Me 1000 1000 Z 400 400 500 500 200

Compact

load [kg] Work load [kg] Work load [kg] Work load [kg] 500 500 500 500 m 400 400 400 400 Wall mounting L5 [mm] L5 [mm] L5 [mm] L5 [mm] L5 300 300 300 300 Y 200 200 200 200 100 100 100 100 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 0 0 2 4 6 8 10 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 300 300 300 300 L6 200 200 200 200 L6 [mm] L6 [mm] L6 [mm] L6 [mm] m Z 100 100 100

15

Motorless Motorless 400 500 200 LAT 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LZ Work load [kg] Work load [kg] 2000 1000 LC3F2 800 1500 L5 [mm] L5 [mm] Bottom m Me 600 1000 Y 400 L5 500 200 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] 2000 1000 800 1500 L6 [mm] L6 [mm] 600 1000 Z L6 400 m Me 500 200 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work

0.4

IP40 compliant PD0 PD1 PD2 PD3 Flat ribbon cable (26P) without cable Flat ribbon cable (26P) with 1.5 m cable Flat ribbon cable (26P) with 3.0 m cable Flat ribbon cable (26P) with 5.0 m cable IP40 compliant 1 to 12 stations (24) FD0 FD1 FD2 FD3 D-sub connector (25P) without cable D-sub connector (25P) with 1.5 m cable D-sub connector (25P) with 3.0 m cable D-sub connector (25P) with 5.0 m

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC24V, Specification: Lubrication Free, Valve Type: 5-Port Valve, Actuation: Double, Status at Power Off: Self-Retaining, Valve Positions: 2-Position Exhaust, Applicable Cylinder Diameter(Ø): 40 or less, Pipe Port Type: One-Touch Plumbing, Port Size: -, Connecting Tube Diameter: Ø6

Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 1 (Rubber Seal), Function: D [2 Position Double (Double Solenoid Specification)], Voltage: 5 (24VDC), Electrical Entry: L (Plug Lead Connector w/300mm Lead Wire, Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: C6 (Side Ported ø6 One-touch Fitting), Plug Mount Port: None, Manifold Block: w/o Manifold Block, CE

Actuation: 2 [2 Position Double (Double Solenoid)], Seal: 1 (Rubber Seal), Function: D [2 Position Double (Double Solenoid Specification)], Voltage: 5 (24VDC), Electrical Entry: L (Plug Lead Connector w/300mm Lead Wire, Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: L4 (Top Ported ø4 One-touch Fitting), Plug Mount Port: None, Manifold Block: MB (w/Manifold Block, Built-in

Actuation: 2 [2 Position Double (Double Solenoid)], Seal: Rubber Seal, Function: D [2 Position Double (Double Solenoid Specification)], Voltage: 24VDC, Electrical Entry: Plug Lead Connector w/300mm Lead Wire, Manual Override: Non-locking Push Type, Tool Required, Cylinder Port: Top Ported ø4 One-touch Fitting, Plug Mount Port: None, Manifold Block: w/Manifold Block, Built-in Back Pressure

Slider Type Ball Screw Drive/11-LEFS Series

For details about fixing method, refer to Wiring/Cables in the Electric Actuators Precautions. o Actuator cable length Nil Without cable 1 1.5 m 3 3 m 5 5 m 8 8 m* LER Nil: Left LEH LEY -X5 !0 Controller/Driver type*1 A 10 m* 11LEFS 11LEFS C 20 m* !

SZ3000

SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (1.5 m) With cable (1.5 m) G kit F kit F kit P kit J kit P kit J kit 2 to 24 2 to 24 2 to 16 2 to 16 With cable (3 m) With cable (3 m) With cable (3 m) stations stations stations stations With cable (5 m) With cable (5 m) With cable (5 m) T L kit (Serial transmission) kit (Circularconnector) S M kit (Terminal block box) kit

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (1.5 m) With cable (1.5 m) G kit F kit F kit P kit J kit P kit J kit 2 to 24 2 to 24 2 to 16 2 to 16 With cable (3 m) With cable (3 m) With cable (3 m) stations stations stations stations With cable (5 m) With cable (5 m) With cable (5 m) T L kit (Serial transmission) kit (Circularconnector) S M kit (Terminal block box) kit

Vacuum Unit

(Example -BJ) 6 Use a One-touch fitting or barb fitting (M-3AU-4) for piping.