Lightweight and Compact

capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 8.4 [kW] HED V After 15 minutes, cool 32C down to 20C.

Tamper Proof and Flat Head Screw

JIS symbol 1/8, 5/32 3/16, 1/4 3/8 5/16 3/16, 1/4 1/4 3/16 1/4, 5/16 1/2 Inch sizes 3/8 5/32 Flow rate l/min (ANR) {Nl/min} 920 660 230 420 1390 290 460 1050 100 130 Controlled (Free) Effective area mm flow 14 10 3.5 6.5 21 4.5 7 16 2 1.5 1l/min=0.035SCFM 18mm2=1Cv Note 1) Flow rate values are at a pressure of 0.5MPa (72.5psi) and temperature of 20C (68F).

High Purity Fluoropolymer

is the value at 20C.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(Coil temperature: 20C, at rated voltage) SY3000 SY7000 With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa) With light/surge voltage suppressor Response time (ms) (at the pressure of 0.5 MPa) Type of actuation Without light/surge voltage suppressor 12 or less Type of actuation Without light/surge voltage suppressor 31 or less Type R, U Type S, Z 12 or less

80

Low temperature operation 1) The valve can be used in an ambient temperature of between 10 to 20C.

Digital Flow Switches

Flow rate conversion NO OFF n-2 n-1 High flow rate Basic state: 0C, 101.3kPa Standard state: 20C, 101.3kPa, 65%RH (ANR) Switchable between these states.

PF2A/PF2W

Flow rate conversion PF2 NO OFF n-2 n-1 High flow rate Basic state: 0C, 101.3 kPa Standard state: 20C, 101.3 kPa, 65%RH (ANR) Switchable between these states.

V

M km, 20C 5m VVZS3000-21A-3 x 24AWG * For other commercial connectors, use a 25-pole female connector made in conformity with MIL-C-24308.

3

(Variation: 10%) Note 2) The value at ambient temperature of 20C and when the rated voltage is applied. The value depends on the ambient environment. This is for reference. Note 1) The value at ambient temperature of 20C and when the rated voltage is applied.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

1048576 p/rev) 25APower consumption [W] Note 6) Horizontal 45 65 210 Vertical 145 175 230 LEC Standby power consumption when operating [W] Note 7) Horizontal 2 2 2 Vertical 8 8 18 LEC S Max. instantaneous power consumption [W] Note 8) 445 725 1275 Type Note 9) Non-magnetizing lock Lock unit specifications LEC SS-T Holding force [N] 78 131 255 131 197 385 220 330 660 Power consumption at 20C

Refrigerated Air Dryers

drain Float type (Normally closed) Float type (Normally open) Refrigerant R407C (HFC) IDF D Port size Rc3/8 Rc1/2 Rc3/4 Rc1 Weight [kg] 16 17 18 22 23 27 28 46 Coating color Body panel: White 1 Base: Gray 2 Applicable air compressor output [kW] (Reference) For screw type 0.75 1.5 2.2 3.7 5.5 7.5 11 15 Refrigerant R134a (HFC) IDU E *1 Air flow capacity under the standard condition (ANR) [20C

Compact 5-Port Solenoid Valve

Electrical characteristics Specified Layout Item Property Connector Manufacturers Example Conductor resistance h/km, 20C 65 or less Fujitsu Limited Japan Aviation Electronics Industry, Limited J.S.T. Mfg. Co., Ltd. HIROSE ELECTRIC CO., LTD. A mixture of single and double wiring can be specified on the manifold specification sheet.

HRX-OM-X037

[Example of setting] Circulating fluid SP: 20C (1) High Temp. CH1 circulating fluid temperature rise (AL10): 22C (2) Low Temp.

MHZ

0.7 MPa Pressure 0.7 MPa 50 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 400 0.6 MPa 0.6 MPa Gripping force (N) Gripping force (N) 0.6 MPa 0.6 MPa 0.6 MPa 0.5 MPa 0.5 MPa 40 300 0.5 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 200 20 0.3 MPa 0.3 MPa 0.25 MPa 0.25 MPa 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20C

MHZ

0.7 MPa Pressure 0.7 MPa 50 Pressure 0.7 MPa Pressure 0.7 MPa Pressure 400 0.6 MPa 0.6 MPa Gripping force (N) Gripping force (N) 0.6 MPa 0.6 MPa 0.6 MPa 0.5 MPa 0.5 MPa 40 300 0.5 MPa 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 200 20 0.3 MPa 0.3 MPa 0.25 MPa 0.25 MPa 100 10 0 10 20 30 40 50 60 0 20 40 60 80 100 120 Gripping point L (mm) Gripping point L (mm) MHZ2-20C

IDU/IDF

Note) l/min (ANR) is for reference conditions of 20C, 1 ATM and 65% relative humidity. Features 3 Model Selection Data A Correction factor for temperature/Series IDU Inlet air temp.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Specifications Grade 1 Note 1) Particulate generation grade Air, Nitrogen gas, Water (pure water) Note 2) Fluid 1MPa Note 3) Maximum operating pressure (20C) 100kPa Operating vacuum pressure Caution 3MPa Proof pressure (20C) 20C to 80C Ambient and fluid temperature Series KP is a line of special One-touch fittings for use in clean room blowing and washing lines.

0.4

Item Property Conductor resistance /km, 20C 65 or less Voltage limit V, 1 minute, AC 1000 Circular connector cable assembly Insulation resistance M/km, 20C Note) When using the negative COM specification, use valves for negative COM. 5 or more Assembly part no.

Plug-in Unit

Lead wire length 0 1 2 0.6 m 1.5 m 3.0 m Electrical characteristics Item Characteristic Sheath Colour: Urban white Conductor resistance /km, 20C 65 or less Withstand pressure V, 1 minute, AC 1000 Polarity Terminal no. Lead wire colour Dot marking Insulation resistance M/km, 20C 5 or more 1 () (+) Black None SOL. A 14 () (+) Yellow Black Station 1 SOL.

VS 8-2/VS 8-4

Insulation resistance M/km, 20C 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 5 or more Note) The minimum bending radius of the D-sub connector cables is 20 mm.