Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

-02-08 21 8 15.2 36.4 20 41 27.2 36 18.5 63 15.2 29.5 5/16" 1/4 23 21.8 48.8 37.8 42.8 43.8 AS221F-02-11 AS321F-02-10 21 18.5 43.2 20 10 33.9 43.3 17.9 36 21 67 31.8 3/8" AS321F-02-07 AS321F-02-12 20.9 12 44.3 17 39.3 27.8 22 69 32.8 60 13.2 1/4" 19 AS321F-02-09 AS321F-03-06 12.8 6 39.3 18.5 63 15.2 41 29.5 17 55 27.8 23 43.8 21.8 48.8 42.8 37.8 5/16" AS321F-02-11 AS321F-03-08 31.8 15.2 41

Table of Contents

(ZX1A) K1 [82] K5 [73] D1 [77] D2 [100] D3 [41] D2 [100] None K3 [132] K2 [73] K6 [58] K4 [119] J2 [100] J1 [77] J3 [41] Release valve None [ ]: Weight (g) How to Order Refer to page 13-2-4 for details.

reduces flow setting time

, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

VM

16.5 26 VHK-06F-01S VHK-06F-02S VHK-06F-03S 60.4 62.4 36.1 38.1 31 54 56 17 14 41 1 8 1 4 3 8 18 41 1.2 6 8 18 41 62.2 26.2 36 16.5 3.5 18.7 11 9.7 1.2 31 58 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-08F-01S VHK-08F-02S VHK-08F-03S 65.2 66.2 39 40 32 59 60 19 22 40 1 8 1 4 3 8 10 22 46 73.8 30.5 43.3 21.5 4 20.8 14 16.1 3.2 49 VHK-B2A 49 17 1 30 25 21.5 31 VHK-10F-02S VHK-10F-03S VHK-10F-

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Installation 17 Wiring 17 Setting and Adjustment 18 LED Display 22 Specification 25 Specifications 25 Dimensions 26 End Plate Model Indication and How to Order 27 Summary of Product parts 28 Mounting and Installation 30 Wiring 30 Specification 32 Specifications 32 Dimensions 33 IO-Link Master Unit Model Indication and How to Order 40 Summary of Product parts 40 Mounting and Installation 41

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 05, 06, 07, 08, 09, 10 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

Speed Controller with

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tube O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

F

19 17 8.9 23.3 14.5 1/4 5/32 18.5 17.2 32.5 NAS221F-U02-03 31.1 32 26.6 39.4 34.4 11.4 24.9 16.5 3/16 34.2 NAS221F-U02-05 32.4 17 13.2 25.2 1/4 34.5 NAS221F-U02-07 32.9 15.2 27.2 18.5 5/16 36.4 NAS221F-U02-09 33.6 19 17.9 33.9 21 3/8 3/8 23 19 43.2 NAS321F-U02-11 35.3 13.2 27.8 17 1/4 19.4 39.3 NAS321F-U03-07 53.9 37.6 32.6 45 40 15.2 29.5 18.5 5/16 41 NAS321F-U03-09 54.9 21 17.9 31.8 3/

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

pressure: 0.5 MPa Inlet pressure: 0.5 MPa 05, 06, 07, 08, 09, 10 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure

SZ3000

Double wiring specification Double wiring specification Connector entry direction 04 05 09 10 4 stations 9 stations 1: Vertical connector 2: Horizontal connector 5 stations 10 stations Specified wiring (up to 19 solenoids possible) Specified wiring (up to 9 solenoids possible) ... ... ... ... 09 19 9 stations 19 stations Note 1) Double wiring specifications: Single, double and 3 position

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

39.3 17 41 29.5 18.5 8 15.2 79 77 R 3/8 19 23 9.8 1.2 47.4 19.8 52.6 AS321F-N03-09SD AS321F-03-10SD NPT 3/8 19 23 9.8 1.2 47.4 5/16" 15.2 29.5 41 18.5 43.3 31.8 21 10 18.5 81 79 19.8 52.6 AS321F-N03-11SD AS321F-03-12SD 3/8" 44.3 17.9 31.8 43.3 21 32.8 22 12 20.9 83 81 AS421F-N04-11SD AS421F-04-10SD 3/8" 17.9 33.6 47.9 21 47.9 33.6 21 10 18.5 141 141 24 28.6 12.4 1.2 55.8 1/2" NPT 1/2 23.8

Flow Control Equipment

Tube size AQ 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 ASV Body size AS1001F AS2001F AS2051F AS3001F AS4001F TMH-01J TMH-03J AK TMH-05 TMH-07 TMH-09 ASS TMH-11 TMH-13 Dimensions Model D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Symbol Metric Inch TMH-23J TMH-04J 1/8J 1/32J 3/16 6 1/4 8 5/16 10 3/8 12 1/2 8.4 9.3 11.7 11.6 13.1 13.5 15.5 18.5 18.8 21.2 22 TMH-01J TMH-03J TMH-05 3.3 4.5

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

For double solenoid For 3 position type: For 4 position type SX100-40-4DNegative common specifications Electric circuit diagram (With positive common and light/surge voltage suppressor) For single solenoid: SX100-41-4SFor double solenoid For 3 position type: For 4 position type SX100-41-4D[SOL.b] () Coil How to Order Lead wire length 2000 mm 10-SZ3160-5MO-M5 SX100-40-4S-20 COM (

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

18.5 29.5 55.3 23 9.8 49.3 R 1/4 1.2 19 21.8 AS321F-02-10SD AS321F-N02-07SD 1/4" 13.2 27.8 39.3 17 10 18.5 43.3 21 31.8 AS321F-02-12SD AS321F-N02-09SD NPT 1/4 19 23 9.8 21.8 55.3 1.2 49.3 12 5/16" 15.2 29.5 41 18.5 20.9 44.3 22 32.8 AS321F-03-06SD AS321F-N02-11SD 6 17.9 31.8 43.3 21 3/8" 12.8 39.3 17 27.8 AS321F-03-08SD AS321F-N03-07SD 8 15.2 41 18.5 29.5 1/4" 13.2 27.8 39.3 17 53.7 23 9.8

VM

12 x 17 Miniature pneumatic indicator VR3200 Pneumatic-electric relay Dimensions VR3200: 17 x 49 x 71 VR3201: 25 x 86 x 89 VR3201 VR4151 Relay valve 7 5 Metal Spool Dimensions Side piping: 30 x 53 x 91 Bottom piping: 30 x 48 x 91 VR4152 INDEX Mechanical Valves Page Series VM1000 P . 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

Vacuum System Peripherals:

Section code Note) Mounting SUP/EXH block assembly When the location is non-standard, indicate both SUP/EXH block assembly part no., quantity and manifold part number. 13-14-41 41 Date issued: Photo copying this page is recommended.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.