V

Wiring Specs 08 08 Applicable up to 8 Solenoids 26 Pole (P) Connector Symbol Station Note 02 2 Single .. ..

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

How to Order Manifold [Option] VV5Q 1 0 08 C6 1 T 10 CE compliant CE compliant Nil Q Note) For CE compliant models, DC-type only.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

How to Order Manifold [Option] VV5Q 1 0 08 C6 1 T 10 CE compliant CE compliant Nil Q Note) For CE compliant models, DC-type only.

V100

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

0.4

How to Order Manifold VV5Q 1 1 08 C6 FU1 CE-compliant Series Nil CE-compliant VQ1000 1 Q Note) For CE-compliant models, DC-type only.

Compact 5-Port Solenoid Valve

6.5 mm, and 9 mm for C6.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

42

How to Order [Option] VV5Q 08 C8 1 4 F U1 CE-compliant Nil Q CE-compliant Note) CE-compliant: For DC only.

Table of Contents

C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

VFR

C8 (A, B port) D side Bottom ported: VV5FR2-01TStation 2Port size C6, C8 Light/Surge voltage suppressor (At FZ) 2-Rc 1/8 (PE port) 2-G 3/4 (Electrical entry) C6: Max. 6 C8: Max. 6.5 6-Rc 1/4 (P, EA, EB port) With terminal block (One-piece junction cover): VV5FR2-01T1Station 1Port size U side 5n-Rc 1/8 (Pitch) P = 28 Stations 2n-Rc 1/8, 1/4 C6, C8 (A, B port) D side Bottom ported: VV5FR2-

Series SV

Specification SV2000 SV1000 Applicable series SV4000 SV3000 Manifold type Tie-rod base manifold 1(P: SUP)/3, 5(E: EXH) type Common SUP, EXH Valve stations (maximum) 20 stations Max. number of solenoids 32 points Port size 1(P)/3, 5(E) port C10, N11 C8, N9 C12, N11, 03 C12, N11 C4, C6, C8 N3, N7, N9 C3, C4, C6 N1, N3, N7 C8, C10, C12 N9, N11, 02, 03 C6, C8, C10 N7, N9, N11 4(A)/2(B) port Flow

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C6: 6 (SMC) N7: 1/4" (SMC) Applicable tubing O.D. C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.

0.4

FD1 C6 kit F P M L T VV5QC 1 1 08 SDQ C6 S kit Base mounted plug-in VQC1000 series Enter EX600-compliant S kit only.

A

NRBC100 H O W T O O R D E R C A P T Y P E S P A R E P A R T N U M B E R S (O U T E R C A P O N LY) S E R I E S NRB NRB 08 C A P P L I C A B L E M O D E L C A P 08 NRBC031/NRBC037 10 NRBC050 14 NRBC056/NRBC075 20 NRBC100 D I M E N S I O N S S E E N E X T P A G E Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 !

SV

Manifold Specifications SV1000 SV2000 SV3000 SV4000 Applicable series Manifold type 1 (P: SUP)/3, 5 (E: EXH) type Valve stations (maximum) Max. number of solenoids Tie-rod base manifold Common SUP, EXH 20 stations 32 points 1(P), 3/5(E) port C8, N9 C3, C4, C6 N1, N3, N7 C10, N11 C4, C6, C8 N3, N7, N9 C12, N11 C6, C8, C10 N7, N9, N11 C12, N11, 03 C8, C10, C12 N9, N11, 02, 03 Port size 4(A)

VQC

VQC4000 VVQC4000-2A-1 Thread type Nil F T Rc G NPT/NPTF 22 Manifold Specification Sheet Series VQC1000: Base-Mounted Type/Plug-in Unit q How to order manifolds VV5QC 1 1 08 FD1 B C6 F P T Kit / / 1 2 3 8 VV5QC 1 1 08 SDQ B C6 S Kit Fill out for I/O serial kit only.

5 Port Solenoid Valve, Series VQC

VQC4000 VVQC4000-2A-1 Thread type Nil F T Rc G NPT/NPTF 22 Manifold Specification Sheet Series VQC1000: Base-Mounted Type/Plug-in Unit q How to order manifolds VV5QC 1 1 08 FD1 B C6 F P T Kit / / 1 2 3 8 VV5QC 1 1 08 SDQ B C6 S Kit Fill out for I/O serial kit only.

VQZ1000/2000/3000

, C8 C6: One-touch fitting assembly for 6 B B B 4 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 VQD 2 A C8: One-touch fitting assembly for 8 B 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 80 ( 9.5) 2-M4 mounting hole (For C6, C8) (For C6, C8) 4.5 2-M6 mounting hole IN IN IN IN 5.5 80 6.5 (40) 69.5 58 37.5 39.5 Residual pressure

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Proposals for Energy Saving

-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 O.D.