Table of Contents

(mm) <M5> Note) Weight (g) D L1 L2 L3 A M P Q1 Q2 KGLU04-M5 KGLU04-01 KGLU04-02 KGLU06-M5 KGLU06-01 KGLU06-02 KGLU06-03 KGLU08-01 KGLU08-02 KGLU08-03 KGLU10-02 KGLU10-03 KGLU10-04 KGLU12-02 KGLU12-03 M5 x 0.8 12 10 11 10.4 18.5 24 26.5 30.5 29.5 32 36 25.5 27.5 16 10.4 18.5 10 30 26.5 33 29.5 4.3 4.1 4 1 8 1 4 6.0 4.1 14 21 13 M5 x 0.8 4.3 4.3 13 12.8 21 17 12.8 20.5 12 1 8 15 22 35 29.5

Table of Contents

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

ZP

Form w 1 Material e Vacuum inlet Construction p. 117 Adapter Assembly p. 121 10 13 21 2.5 M5 x 0.8 5 8 16 21.5 20 25 23 4 32 23.5 10 13 B5 21 2.5 M6 x 1 6 8 16 21.5 20 25 23 4 32 23.5 40 32 4.9 12 50 33 20 25 B8 B6 N S U F GN GS ZP T U 29 3.5 M8 x 1.25 8 12 32 29.5 40 32 6.6 50 33 10 13 27 2.5 16 27.5 20 25 29 3.5 32 29.5 40 32 7 50 33 Rc1/8 NPT1/8 NPTF1/8 12 B01 N01 T01 1 N: NBR, S: Silicone

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D L P Z E F G H I K1 K2 Th9 J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 3.5 25 1.5 32 5.2 5 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 1.5 6 3.5 29 38 6 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 2 8 4.5 36 47 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

Table of Contents

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

ZP

/Thin flat with ribs Flat with ribs Deep Bellows 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20, 25, 32, 40, 50 Pad dia.

ZP

32 (27) (25) 30 (28) 32 (26) (20) ZPT40 30 (29) 32 (27) (25) 32 (30) 34 (29) (27) P . 13-11-65 to 13-11-68 ZPT50 ( ): Figures for female thread connections Model Applicable pad form Connection/Thread dia.

CQ2

40 10 2 10 12 12 5 M6 X 1.0 M5 X 0.8 15 5 M5 X 0.8 0 0.052 32 5.5 34 53.5 39.5 12.5 M8 X 1.25 21.5 49.5 4.5 60 45 14 2 14 13 16 7 14 21 10 to 50 RC(PT)1/8 Refer to p.2.3-18 for details rod end nut and optional bracket.

V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

Air Slide Table

D A A MXQ16B 57 31 17 30 16 13 MXQ20B 64 32 14 31 13 18 The MXQ6(A, B) is not available.

Smooth Cylinder/Low Speed Cylinder

20 to 32 RHC RZQ (mm) FL A B2 C2 D H2 I FD AL E F FT B FX B1 FY FZ G H H1 Bore size (mm) 20 13 26 30 5 8 10.5 18 8 28 7 15.5 13 4 34 60 0 0.033 75 8 41 20 25 17 32 37 6 8 10.5 22 10 33.5 7 19.5 13 4 40 0 0.033 60 75 8 45 26 32 17 32 37 6 8 10.5 22 12 37.5 7 19.5 13 4 40 0 0.033 60 75 8 45 26 40 22 41 47.3 8 10 13.5 24 14 46.5 7 21 16 5 0 0.039 52 66 36 82 11 50 32 P S KA N NA Z K NN ZZ

ZP

-B5-B5 [Weight: 7.0 g] ZP3-Y08B;-B5-B5 [Weight: 7.1 g] 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 2 2 8 8 2 M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 24 24 24 4 4 4 13 3 13 13 8 3 1.8 1.8 1.8 2.2 5.2 3.4 4 8 6 4.5 7 9 8 8 8 8 8 8 Vacuum Inlet Dimensions ZP3-Y04B;-B5-U4 ZP3-Y06B;-B5-U4 ZP3-Y08B;-B5-U4 ZP3-Y04B;-B5-U2 ZP3-Y06B;-B5-U2 ZP3-Y08B;-B5-U2 Width across flat 7 Barb fitting One-touch fitting 0.9 1.8 Width

Air Cylinder

x 0.8 18 15.5 40 13 14 8 12 2 5.5 6 28 35 5 26 M4 x 0.7 5 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 44 17 16.5 10 14 2 5.5 7 32 40 6 31 M5 x 0.8 5.5 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 53 17 20 12 18 2 6.6 7 38 40 6 38 M5 x 0.8 5.5 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 61 19 26 16 25 2 6.6 8 46 50 8 47 M6

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Air Fittings & Tubing

Weight (g) L A M d 7 34 32 KQ2N04-M5 KQ2N04-01S KQ2N06-M5 KQ2N06-01S 2 6 2 5 M5 X 0.8 29 13 4 2.5 1 8 M5 X 0.8 10 30 14 33 35 37.5 39 41 46 2.5 7 30 31 13 14 6 1 8 10 4.5 1 4 14 14 31.5 33 14.5 14.5 KQ2N06-02S 14 1 4 KQ2N08-02S 17 8 6 3 8 KQ2N08-03S 17 17 7.5 34.5 39.5 16 18.5 30 31 10 3 8 KQ2N10-03S Nipple: KQ2N Part No.

Table of Contents

-04 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 17.3 22.2 7 9.3 22.1 9.6 4 25 25.8 22.1 28.6 9.3 17.3 AS121F-U10/32-04 AS121F-U10/32-03 5/32" 10-32UNF 10-32UNF AS121F-M5-06 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 11.4 21.3 26.1 7 16.5 13.5 11.7 22.9 11.6 18.1 6 AS121F-U10/32-06 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 22.2 25 9.6 AS221F-01-23 AS2 1F-M5-07 20.4 16 9.3 27.5 3.2 1/4

SX

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Made to Order

13 15 20 26 32 40 22 24 32 40 50 62 11 12 13 16 20 24 20.5 22 28 33 43.5 51.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 6 7 6 8 10 12 14 15 18 20 28 32 10.5 11.5 15.5 19.5 24.5 30.5 (mm) F H Z Z Z Double acting Single acting (Spring return) Single acting (Spring extend) Action Without switch With switch Without switch With switch Without switch With switch Bore size (mm) 5st

A

Bore size A B C DA DB E F G GA GB H J K L MM ML NN P PW 12 39 39 29 6 8 0 8 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 7 16 43 43 33 8 10 0 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 5 20 47 47 37 10 12 0 8 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 1/8 7 S L I D E B E A R I N G 25 47.5 47.5 37.5 12 16 0 8 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 1/8 8 32 71.5 47.5 37.5 16 20 24