3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS

Table of Contents

32 40 50 ZP50U 53 7 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

D A L Series Part no. 10-SZ3000 SZ3000-114-2A Dimensions Applicable fitting size d Model A L D 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-03 10-KQP-07 10-KQP-09 4 16 32 6 6 18 35 8 8 20.5 39 10 5/32" 16 32 6 1/4" 18 35 8.5 5/16" 20.5 39 10 383 Cassette Type Manifold 10-SZ3000 Manifold Option DIN rail dimensions / Weight D-sub connector (25 pins) / Cable assembly Directional Control Valves Air Grippers

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10 16 4.3 2-3.2 Mounting holes Manual override 24.5 7.8(C3, C4, C6) (M5: 5.7) Cover dia 1.6 Cross section 0.34mm2 (Lead wire) 34 35 300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (7.8) (24.5) 2-3.4 Mounting holes 41 Foot bracket M5 X 0.8 P port M5 X 0.8 R port R 3 P 1 10.7 9 M5 X 0.8 External pilot port 32 (Only external pilot style (R)) L plug connector (L): VQZ115-lLl-C3, C4, C6, M5-PR M plug connector

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

(A) 2 Port size {2(A) port} 1 1 (P) 3 (R) One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 M5 thread (Replaceable type) C3 C4 C6 M5 Note) For the inch-size One-touch fittings, refer to page 4-14-18.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

S A A : : F G -+ -+ -+ -+ R port Applicable solenoid valve 10-SYJ314M-(-Q) 10-SYJ324M-(-Q) 20 20 stations R P 1/8 A port N NPT M5 x 0.8, C4 P port P port T NPTF A port size A 1/8 1/8 M5 M5 x 0.8 R port Applicable blanking plate assembly Refer to page 610. 1/8 A port M5 x 0.8, C4 C4 4 One-touch fitting N3 5/32" One-touch fitting Note) For more than 8 stations, supply/exhaust air to/from both

smcmaintenancepartslist

Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 53 Recommended length Part No.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Vacuum System Peripherals:

Section code 13-14-18 Date issued: 18 Photo copying this page is recommended.

5 Port Solenoid Valve SY Series

O.D.: 4, 5/32" : 6, 1/4" (27) (35) (For mounting) 23.2 N7:37.4 C6:33.6 (3.2) (Light/surge voltage suppressor) 13.1 (35.5) (32) + 25 16.9 28.5 [35.5] 0.8 2 P EA (15) 10 For manifold gasket positioning 21.5 die-cast hole 19 (P, EA, EB port) M5 x 0.8 L plug connector (L): SY3 20-L(-F2) 3 4 5 M plug connector (M): SY3220-M(-F2) C4, N3 C6, N7 C4, N3 C6, N7 M8 connector (W0): SY3 20-W0(-F2) C4

SZ3000

KQ2P-04 KQ2P-06 KQ2P-08 4 6 32 16 6 8 35 18 8 10 39 20.5 A A A B A B A FREE LOCK 1-3-11 12 Series SZ3000 Manifold Option DIN rail dimensions/Weight D-sub connector (25 pins)/Cable assembly AXT100-DS25015 030 050 VZ1000-11-1Refer to the L dimension tables Enter a number from the DIN rail dimension table below.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

) C8 (8 One-touch fitting) M5 x 0.8 Rc(PT) 1/4 Port size C4 (4 One-touch fitting) C8 (8 One-touch fitting) Ports A, B C6 (6 One-touch fitting) C10 (10 One-touch fitting) PA/B 9.2 (0.51) A/BR 10.3 (0.57) PA/B 5.2 (0.29) A/BR 3.8 (0.21) PA/B 8.1 (0.45) A/BR 8.5 (0.47) PA/B 9.2 (0.51) A/BR 9.5 (0.53) PA/B 18 (1.0) A/BP 18 (1.0) PA/B 17.6 (0.98) A/BP 14.4 (0.8) PA/B 18 (1.0) A/BP 17.1 (0.95)

7.4

(B) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting Manual override 79.3 300 (Lead wire length) 300 (Lead wire length) 28.5 10.5 7.4 83.6 39.7 41.8 Manual override 9.2 31.5 22.9 22.8 20.4 10.5 22 8 8 3 x C2, C4, N1, N3 <1(P), 5(EA), 3(EB) port> C2: 2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32

VZ100/300/500

DXT170-34-1B Note With screw (For VZ32) Refer to pages 4-6-18 to 4-6-28 for manifold use.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

VZS

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail 12.5 (Pitch) 5.25 7.5 AXT100-DR-l VQ Enter suffix the number from DIN rail dimensions table below.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Type 41 Applicable solenoid valve SYJ514-SYJ514M-SYJ524-SYJ524M-How to Order SS3YJ5--41-05 -C6 R port 1/8 Stations P, R port thread type A port size 02 : 20 P port 1/8 2 stations : 20 stations A A M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 Nil Rc G NPT NPTF Applicable blanking plate assembly SYJ500-10-3A F N T 4 one-touch fitting 6 one-touch fitting A port M5 x 0.8, 1/8, C4, C6 5/32" one-touch fitting

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Model A L D KQ2P-04 KQ2P-06 KQ2P-08 4 6 32 16 6 8 35 18 8 10 39 20.5 A A A A A B B 6 Cassette Type Manifold Series SZ3000 Manifold Options DIN rail dimensions/Weight table D-sub connector (25 pins)/Cable assembly AXT100-DS25015 030 050 VZ1000-11-1Refer to the L dimension tables Enter a number from the DIN rail dimension table below in the .

VCC

VCC VCC TQ L1 = n / 2 x 30 + 16 L2 = n / 2 x 30 + 32 n = Number of valves (cleaning valve + gate valve + other valves) n: Stations (mm) 2 n 4 6 8 10 12 14 16 18 20 22 24 26 28 30 32 34 36 38 40 L1 L2 76 106 136 166 196 226 256 286 316 346 376 406 436 466 496 526 556 586 616 46 92 122 152 182 212 242 272 302 332 362 392 422 452 482 512 542 572 602 632 62 651 VCC Series Dimensions SUS316L