Vacuum

manifold assembly: sta. 1-4) NZXl101-KlsLZ-EC-M NZZXlO4-TB-A Parl Number / Configuration Six station manitold assembly: sra. 1) NZX 1071 -K3sMZ-F-M sta. 2-5) NZX1071-K1sLZ-EC-M sta. 6) zx'l-BABI NZZXl O6-TB-A 4tl 2 ' Part Number / Configuratlon Four station manifold assembly: sta. 1-2) NZX'I101-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

-20 Applicable manifold base (sub-plate) SS5YJ3-41 SS5YJ3-S41 SS5YJ3-46 SS5YJ3-S46 SS5YJ3-31 SS5YJ3-S31 SS5YJ3-32 SS5YJ3-S32 Manifold gasket Manifold gasket SS5YJ3-31 SS5YJ3-S31 SS5YJ3-32 SS5YJ3-S32 VJ3000-14-3 VJ3000-14-2 Note) Manifold gasket "VJ3000-14-2" can be used with the following manifold bases.

SYJ300-OMU0003

-20SS5YJ3-21PSS5YJ3-21SA 3SYJ3000-33-1 R SYJ312SYJ312M SYJ300 3 SYJ322SYJ322M SYJ300 3 SS5YJ3-31-S31SS5YJ3-32-S32SS5YJ3-32SA SS5YJ3-46-S46SS5YJ3-32P SYJ3000-33-1 SYJ3000-33-1 3 R R 3AB SYJ314SYJ314M SYJ324SYJ324M SS5YJ3-41-S41 3SYJ3000-33-1 R 3AB SYJ314SYJ314M SYJ324 SYJ324M SS5YJ3-20 SS5YJ3-41 B3 A B3 A M1.7 : 0.12N.m 17 No.SYJ300-OMU0003 Assy SYJ32(R)(-Q)) (SYJ34(R)(-Q)) SYJ300

2

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

Table of Contents

(inch) Weight (g) Model d L M2 M1 Applicable tubing Applicable KQ2N01-03 KQ2N01-05 KQ2N03-05 KQ2N03-07 KQ2N05-07 KQ2N05-09 KQ2N07-09 KQ2N07-11 KQ2N09-11 KQ2N09-13 KQ2N11-13 36.5 37 37.5 38 38.5 41 41.5 45 46.5 47.5 50 16 16.5 16.5 17 17 18.5 18.5 21 21 22 22 0.2 0.4 0.4 0.6 0.6 1 1 1 11 22 24 5 32 15.5 2.2 1 8 tubing 3 16 3 16 5 32 16 2.5 1 4 1 4 16.5 3.5 3 16 5 16 5 16 1 4 17 4.6 3 8 3

Table of Contents

-02-08 21 8 15.2 36.4 20 41 27.2 36 18.5 63 15.2 29.5 5/16" 1/4 23 21.8 48.8 37.8 42.8 43.8 AS221F-02-11 AS321F-02-10 21 18.5 43.2 20 10 33.9 43.3 17.9 36 21 67 31.8 3/8" AS321F-02-07 AS321F-02-12 20.9 12 44.3 17 39.3 27.8 22 69 32.8 60 13.2 1/4" 19 AS321F-02-09 AS321F-03-06 12.8 6 39.3 18.5 63 15.2 41 29.5 17 55 27.8 23 43.8 21.8 48.8 42.8 37.8 5/16" AS321F-02-11 AS321F-03-08 31.8 15.2 41

Air Fittings & Tubing

N L1 L2 Port B Min. port size Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KM11-03-09-6 KM11-03-09-10 KM11-07-11-6 KM11-07-11-10 KM11-09-13-6 KM11-09-13-10 6 65 10 19 40 18 29.5 19.5 27 12 16 18.5 6 10.6 5 32 5 16 10 86 6 77.8 10 104 6 85 10 115 26 61.5 30 48 19.5 31.5 21.5 30.5 13 17 21 7 13.2 10 1 4 3 8 40 73.5 41 52.8 23.7 37.7 25 35.9 15 18.5 22 9.5 15.2 12.7 5 16 1 2 57 83 KM12 H (Hex.

KJ

(inch) Weight (g) Model d L M2 M1 Applicable tubing Applicable KQ2N01-03 KQ2N01-05 KQ2N03-05 KQ2N03-07 KQ2N05-07 KQ2N05-09 KQ2N07-09 KQ2N07-11 KQ2N09-11 KQ2N09-13 KQ2N11-13 36.5 37 37.5 38 38.5 41 41.5 45 46.5 47.5 50 16 16.5 16.5 17 17 18.5 18.5 21 21 22 22 0.2 0.4 0.4 0.6 0.6 1 1 1 11 22 24 5 32 15.5 2.2 1 8 tubing 3 16 3 16 5 32 16 2.5 1 4 1 4 16.5 3.5 3 16 5 16 5 16 1 4 17 4.6 3 8 3

F

Applicable Thread Model H D1 D2 L1 L2 A M Minimum Weight Tube OD UNF (Hex) Hole (g) (Inch) NPT Diameter 1/8 1/8 KQW01-34S 11.11 9.6 10 17.5 37 38 15.5 2.5 19 1/8 1/4 KQW01-35S 14.29 9.6 10 17.5 43 42 15.5 2.5 41 5/32 1/8 KQW03-34S 11.11 10.4 10 18 37.5 38.5 16 3 19 5/32 1/4 KQW03-35S 14.29 10.4 10 18 48.5 42.5 16 3 41 3/16 1/8 KQW05-34S 11.11 11.4 10 19.5 38 40 16.5 3.5 41 3/16 1/4 KQW05-

Speed Controller with Indicator

, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Speed Controller with One-touch Fitting

03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

TABLE OF CONTENTS

PORTS . (2) PLACES 1.00 (25.4) .30 (7.5) Standard valve porting is NPT. .56 (14.3) .20 (5.2) .41 (10.3) .30 Nominal Power: (7.5) Mtg.

LEC-OM02704CN

PD07 *DI3 3(CN6-3) CN6-3 PD06 000Ah 0 0 CN6-3 CN6-3 PD08 *DI4 4(CN6-4) CN6-4 PD06 000Bh 0 0 CN6-4 CN6-4 6 33 6 PD09 *DO1 1(CN6-14) CN6-14 0002h 0 0 CN6-14 CN6-14 () 00 OFF 02 RD 03 ALM 04 INP 05 MBR 06 DB 07 TLC 08 WNG 09 BWNG 0A SA 0C ZSP 0F CDPS 23 CPO 24 ZP 25 POT 26 PUS 27 MEND 38 1 PT0 39 2 PT1 3A 3 PT2 3B 4 PT3 3C 5 PT4 3D 6 PT5 3E 7 PT6 3F 8 PT7 .

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

AS22l1FG-02-03(S)A 5/32" 8.2 AS22l1FG-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 18 (18) AS22l1FG-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 19 (20) AS32l1FG-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS32l1FG-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS32l1FG

LEC-OM07605CN

PB26](_ _ _ 1) 5 28 5. [] PB45 CNHF _ _ x x 5.5 00h _ x _ _ 5.6 0h x _ _ _ 0h 5.5 [Hz] [Hz] [Hz] 00 20 70 40 17.6 01 2250 21 66 41 16.5 02 1125 22 62 42 15.6 03 750 23 59 43 14.8 04 562 24 56 44 14.1 05 450 25 53 45 13.4 06 375 26 51 46 12.8 07 321 27 48 47 12.2 08 281 28 46 48 11.7 09 250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

43.3 55 17 27.8 39.3 12.8 17.9 6 3/8" 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 15.2 13.2 8 1/4" 17 55 23 41.5 46.5 20.9 19 40.2 35.2 R 3/8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19 29.5 20.9 41 59 21 31.8 43.3 18.5 15.2 10 5/16" 46.5 41.5 40.2 35.2 18.5 57 23 AS321FG-03-12 AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 20.9 17.9 12 3/8" 21 59 AS421FG-04-10 AS421FG-N04-11 33.6

JXCx-OMT0061CN

- [] PLC RWw RWw bit 10.1.2 0 (2) [OUT]()[] (P.41) 1 ON OFF OFF 2 10.1.2 (2) [OUT]()[] (P.41) 3 4 5 0 6 ON ON *1 7 *1 8 *2 9 *1 *2 A *2 B (*1*2) C 17.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 29.5 19.8 19 41 59 21 45.4 31.8 43.3 40.2 40.4 10 18.5 5/16" 15.2 35.2 18.5 57 23 AS321FG-03-12 AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 12 20.9 3/8" 17.9 21 59 AS421FG-04-10 AS421FG-N04

7ND9071en

9.4 Adjustment.41 9.5 Removal of the limit switches for accessing the valve controller.41 9.6 Circuit diagrams.41 9.7 Maintenance .41 10 TOOLS.41 11 ORDERING SPARE PARTS .41 12 DRAWINGS AND PARTS LISTS.42 12.1 Exploded view ND9100, ND9400, ND7100 .42 12.2 Exploded view ND9100_/D__, ND9100_/I__, ND9100_/K0_ and ND9100_/B06.43 12.3 Exploded view ND9200, ND9300, ND7200 44 12.4 Exploded view

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19.8 29.5 19 41 59 21 45.4 31.8 43.3 40.4 40.2 10 18.5 5/16" 15.2 35.2 18.5 57 23 AS321FG-03-12 AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 12 20.9 3/8" 17.9 21 59 AS421FG-04-10 AS421FG-N04