ZR

1/8 PV port Common air supply pressure port Stations (mm) 1 85 104 2 118 137 3 151 170 4 184 203 5 217 236 6 Symbol L1 52 71 L2 13-3-46 46 Series ZR Large Size Vacuum Module: Vacuum Pump System Circuit diagram Individual spacer (ZR1-R1-4) PV PD EXH PS Function plate (ZR1-RV3-4) ZX X X X X X PS PE ZR SOL.C ZM SOL.A SOL.B Vacuum switch X X X X PD PV ZH Release valve ZU Vacuum switch valve

Fieldbus System

, N1, N3 <4(A), 2(B) port> C2: 2 One-touch fitting C3: 3.2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting DIN rail clamping screw L2 = L1 10.5 L3 = 8.5 x n1 + 46 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 8.5 x n1 + 31 L7 = 47 x n2 + 86.1 (mm) L1: DIN Rail Overall Length Valve stations (n1) I/O Unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11

Intrinsically Safe Valve

stations 18 stations 19 stations 20 stations 388 L1 L2 55 74 93 112 131 150 169 188 207 226 245 264 283 302 321 340 359 378 397 46 65 84 103 122 141 160 179 198 217 236 255 274 293 312 331 350 369 17 Body Ported Series 53-SY5000/7000 Manifold Options Type 20 Blanking Plate Assembly Gasket Assembly Part No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 SQ2000 Applicable tubing O.D. (mm) VQ4 SQ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 Built-in silencer direct exhaust (-S) SSQ1000-SE SSQ2000-SE 3.2 4 6 8 Part numbers above are for a set of ten elements.

VCC

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 25 Series SYJ500 C4, N3 C6, N7 [ ] for AC Type 41 Manifold: Side Ported/SS3YJ5-41Stations Grommet (G) (Pitch) P=16 17 20.5 10.5 Approx. 300 (Lead wire length) 35 (DIN 36.2) 21.5 R P R P 37.9 57.1 [59.3] 2-4.5 (For mounting) (4.9) 1/8 (P, R port) Manual override L2 4.5 L1 (Station 1) (Station n) (Light/surge voltage suppressor) + + + + 54.1 [61.1] 38.7 25.5 A A (Pitch) P=16 17 One-touch

Table of Contents

A1 (mm) F (h9) R (RC) E (g6) G2 H (R) M1 Model A1 A2 B C G1 J M2 N U K P Q T X Z D V L S Y W CDRB1BW5018 26 21 29 27 30 29 35.5 38 M6 x 1 depth 9 14 18 15 25 20 30 24 38 12 0.006 0.017 25 0 0.052 1/8 R6 R22.5 70 67 39.5 3 32.5 13.5 60 66 5.5 6.5 32 11 5 50 46 34 6.5 78 CDRB1BW50-E CDRB1BW63M8 x 1.25 depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 R30 80 82 45 3 21 17 75 83 8 9 34 14 5 60

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

A1 (mm) F (h9) R (RC) E (g6) G2 H (R) M1 Model A1 A2 B C G1 J M2 N U K P Q T X Z D V L S Y W CDRB1BW5018 26 21 29 27 30 29 35.5 38 M6 x 1 depth 9 14 18 15 25 20 30 24 38 12 0.006 0.017 25 0 0.052 1/8 R6 R22.5 70 67 39.5 3 32.5 13.5 60 66 5.5 6.5 32 11 5 50 46 34 6.5 78 CDRB1BW50-E CDRB1BW63M8 x 1.25 depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 R30 80 82 45 3 21 17 75 83 8 9 34 14 5 60

CRB2/CRBU2/CRB1

Symbol: C4 Symbol: C1 Add connecting ports on Body (A). (An additionally machined port will have an aluminum surface since it will be left unfinished.) Change of rotation.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

A1 (mm) F (h9) R (RC) E (g6) G2 H (R) M1 Model A1 A2 B C G1 J M2 N U K P Q T X Z D V L S Y W CDRB1BW5018 26 21 29 27 30 29 35.5 38 M6 x 1 depth 9 14 18 15 25 20 30 24 38 12 0.006 0.017 25 0 0.052 1/8 R6 R22.5 70 67 39.5 3 32.5 13.5 60 66 5.5 6.5 32 11 5 50 46 34 6.5 78 CDRB1BW50-E CDRB1BW63M8 x 1.25 depth 10 15 0.006 0.017 28 0 0.052 22 1/8 R7.5 R30 80 82 45 3 21 17 75 83 8 9 34 14 5 60

PFxx-OMJ0005CN

C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(The standard valve has an individual exhaust for the pilot valve.) 1.12-58 Series VQZ Base Mounted Replacement Parts One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting Size Series VQZ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C8 VQZ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 VQZ3000 SY VVQ2000-51A-C6 Note) Order is accepted in

ARM10/11

17 5.

ARM10/11

17 5.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

PSxx-OMM0006CN

g -62No.PS-OMM0006CN-E (M8(3 )71 ) 01/N01 5 4 M5/C4/C6 M5 5 -63No.PS-OMM0006CN-E W1/WF1 4 ( ISO228-1) -64No.PS-OMM0006CN-E A 01/N01 W1/WF1 -65No.PS-OMM0006CN-E B W1/WF1 -66No.PS-OMM0006CN-E D 01/N01 W1/WF1 -67No.PS-OMM0006CN-E 01/N01 W1/WF1/M5/C4/C6 -68No.PS-OMM0006CN-E + 01/N01 W1/WF1/M5/C4/C6 -69No.PS-OMM0006CN-E 36n +4n -1 -70No.PS-OMM0006CN-E 01/N01 (M8(3 )) 5 4

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

marking No.1 (+), No.2 () 0.75 mm2 5.9 14 ATEX Compliant Base Mounted Type Series 52-SY5000 Dimensions 2-position double L plug connector (L) 52-SY5240 (R) -L-02 19 18 9.5 2 x 4.3 (Mounting holes) 37.2 M5 x 0.8 (External pilot port) 15.5 15.5 4 48 Manual override 4 Insulation: Black () B A 17.5 17.5 A B PE X P EB EA Insulation: Red (+) 35 17 17 56 65.4 62.5 M5 x 0.8 (Pilot EXH. port)

VK3000

3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 VFN L2 Body ported (Top ported) Type 21 Manifold Grommet: G DIN terminal: D VV5K3-21Station (P port) (P port) n1 = Number of VK3000 n2 = Number of VK300 L Dimension n: Stations n L 1 38 27 2 57 46 3

VK3000

Refer to the above drawing for DIN terminal dimensions. n L 1 50 27 2 69 46 3 88 65 4 107 84 5 126 103 6 145 122 7 164 141 8 183 160 9 202 179 10 221 198 11 240 217 12 259 236 13 278 255 14 297 274 15 316 293 16 335 312 17 354 331 18 373 350 19 392 369 20 411 388 L1 L2 1428 VK3000 Series Specific Product Precautions Be sure to read this before handling the products.

VK300

) 2 x 4.5 VV061 Max.5.5 (Pitch) (Mounting hole) Manual override (Non-locking) VV100 V100 (Station 1) (Station n) S070 (Pitch) n x Rc 1/8 (A port) VQD VQD-V (Pitch) n x One-touch fitting C4: Applicable tubing T0425 C6: Applicable tubing T0604 (A port) VK VK VT Refer to the above drawing for DIN terminal dimensions.