High Vacuum Angle Valve

(Refer to page 18.) * Standard lead wire length is 0.5 m. Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

Fieldbus System

Select a valve from R, U, NS or NZ when the SI Unit common is negative common. 18 Series SY3000/5000 Dimensions: Type 10/For EX600 (M12 Connector)/Series SY3000 (mm) C2 C3, N1 C4, N3 C6, N7 2 4 SS5Y3-10S6l l(D) Stations U D B D side U side L3 L4 (DIN rail mounting hole pitch: 12.5) 5.3 Manual override Note 2) (L5) L1 ( ) 4(A) port side : Blue (For rubber seal) : Gray (For metal seal) 2(B)

3 Port Solenoid Valve Series SYJ300/500/700

Station n L1 L2 3 46 39 Station 20 224.5 217.5 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 Station 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 11 Series SYJ300 C4 N3 Type 42 Manifold: Side Ported/SS3YJ3-42Stations -M5, [ ] for AC Grommet (G) For M5 C4 N3 For (Built-in one-touch

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Flat ribbon cable connector SOL.A () (+) 20 1 station SOL.B () 18 (+) SOL.A 20 19 () 16 (+) 2 stations SOL.B 18 17 () 14 (+) 16 15 SOL.A 12 () (+) 3 stations 14 13 SOL.B () (+) 10 12 11 SOL.A 8 () (+) 10 9 4 stations SOL.B () 6 (+) 8 7 Connector terminal no.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS

SYA3000/5000/7000

Single Double 2 position 0.29 0.18 0.64 0.34 0.72 0.17 0.28 0.15 0.59 0.30 0.59 0.15 C4 Closed center Exhaust center Pressure center 48 SYA320-C4 M5 x 0.8 M5 x 0.8 One-touch 0.35 0.16 0.42 [0.41] 0.34 [0.37] 0.63 0.11 [0.11] 3 position fitting for 4 0.76 [0.46] 0.42 [0.34] 0.21 [0.12] 0.59 0.29 0.15 40 42 Single Double 2 position 0.30 0.19 0.65 0.39 0.76 0.17 0.55 0.24 0.60 0.33 0.76 0.16

5 Port Air Operated Valve SYA3000/5000/7000 Series

Single Double 2 position 0.72 0.18 0.64 0.34 0.29 0.17 0.59 0.15 0.59 0.30 0.28 0.15 Closed center Exhaust center Pressure center C4 48 SYA320-C4 One-touch M5 x 0.8 M5 x 0.8 0.63 0.16 0.42 [0.41] 0.34 [0.37] 0.35 0.11 [0.11] 3 position fitting for 4 0.76 [0.46] 0.21 [0.12] 0.59 0.29 0.42 [0.34] 0.15 40 42 Single Double 2 position 0.76 0.19 0.65 0.39 0.30 0.17 0.76 0.24 0.60 0.33 0.55 0.16

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) F (h9) E1 (g6) E2 (h9) R (RC) Model A1 A2 B C D G H J K L M1 M2 N P Q S T U V W X Y Z CRB1BW50CRB1BW50-E CRB1BW63CRB1BW63-E CRB1BW80CRB1BW80-E CRB1BW100CRB1BW100-E 18 M6 x 1 depth 9 26 14 0 0.043 0.006 0.017 12 1/8 R6 0 0.052 67 70 3 10 13 5 50 34 66 46 5.5 6.5 78 19.5 39.5 13.5 11 60 11.9 25 21 18 22 29 15 M8 x 1.25 depth 10 1/8 R7.5 82 80 3 12 14 5 60 39 83 52 8 9 98 21 45 17 14 0.006

Table of Contents

(mm) E1 (g6) E2 (h9) F (h9) R (RC) Model A1 A2 B C D G H J K L M1 M2 N P Q S T U V W X Y Z CRB1BW50CRB1BW50-E CRB1BW63CRB1BW63-E CRB1BW80CRB1BW80-E CRB1BW100CRB1BW100-E 18 M6 x 1 depth 9 26 14 0 0.043 0.006 0.017 12 1/8 R6 0 0.052 67 70 3 10 13 5 50 34 66 46 5.5 6.5 78 19.5 39.5 13.5 11 60 11.9 25 21 18 22 29 15 M8 x 1.25 depth 10 1/8 R7.5 82 80 3 12 14 5 60 39 83 52 8 9 98 21 45 17 14 0.006

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) E1 (g6) E2 (h9) F (h9) R (RC) Model A1 A2 B C D G H J K L M1 M2 N P Q S T U V W X Y Z CRB1BW50CRB1BW50-E CRB1BW63CRB1BW63-E CRB1BW80CRB1BW80-E CRB1BW100CRB1BW100-E 18 M6 x 1 depth 9 26 14 0 0.043 0.006 0.017 12 1/8 R6 0 0.052 67 70 3 10 13 5 50 34 66 46 5.5 6.5 78 19.5 39.5 13.5 11 60 11.9 25 21 18 22 29 15 M8 x 1.25 depth 10 1/8 R7.5 82 80 3 12 14 5 60 39 83 52 8 9 98 21 45 17 14 0.006

CRB2/CRBU2/CRB1

M1 M2 Body (B) N Body (A) 2-R A port S N A port B port 2-R Y Y A1 M1 SMC A2 SMC J 27 H X A1 (mm) R (RC) F (h9) E (g6) H (R) U Model A1 J A2 B G2 V K M2 N C W L D X P G1 Y S Z T M1 Q CDRB1BW 5026 21 29 27 30 29 35.5 38 18 14 18 15 25 20 30 24 38 M6 x 1 depth 9 12 0.006 0.017 25 0 0.052 1/8 67 78 3 6.5 R6 11 32.5 70 34 5 32 66 13.5 39.5 46 50 5.5 60 6.5 R22.5 CDRB1BW 50-E CDRB1BW 63M8 x 1.25

ARM10/11

(for L and R sides) AXT100-DR-9 123 AXT100-DR-11 148 AXT100-DR-13 173 AXT100-DR-16 210.5 AXT100-DR-18 235.5 AXT100-DR-20 260.5 AXT100-DR-22 285.5 53 AXT100-DR-25 323 33.5 AXT100-DR-27 348 18 14 OUT IN IN OUT IN AXT100-DR-29 373 ARM11AA1-12-A Handle position: Top/Common supply block with pressure switch L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 5.3 56 5.5 84 0.1 0.3 0.2 0.4 0.5 0.6 SMC MPa SMC

ARM10/11

(for L and R sides) AXT100-DR-9 123 AXT100-DR-11 148 AXT100-DR-13 173 AXT100-DR-16 210.5 AXT100-DR-18 235.5 AXT100-DR-20 260.5 AXT100-DR-22 285.5 53 AXT100-DR-25 323 33.5 AXT100-DR-27 348 18 14 OUT IN IN OUT IN AXT100-DR-29 373 ARM11AA1-12-A Handle position: Top/Common supply block with pressure switch L2 L2-10.5 L1=(28 x n)+56 18 20 28 28 5.3 56 5.5 84 0.1 0.3 0.2 0.4 0.5 0.6 SMC MPa SMC

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

5 Port Solenoid Valve SY Series

One-touch fitting for 4 C4 SY3000 2 position double One-touch fitting for 6 C6 One-touch fitting for 4 C4 2 One-touch fitting for 6 C6 For DC SY5000 One-touch fitting for 8 C8 5 24 VDC 6 12 VDC SY9000 has no bracket.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4

VCC

Symbol Description Surface treatment Note Material A VCC12(D)-00 For VVCC12-1A-02FC4 C6 PPS resin C4 C6 VVCC12-1A-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for 2 port valve Manifold block q Hard anodized containing PTFE For VVCC12-1G-02FC4 C6 Aluminum C O-ring Special FKM w C4 C6 VVCC12-1G-02F Pilot port C4: 4 piping C6: 6 piping Manifold block assembly for gate

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

9.5 2 x 4.3 (Mounting holes) Manual override 60.3 37.2 8.3 48 M5 x 0.8 (External pilot port) 15.5 15.5 4 Insulation Black () B A 17.5 A B 35 X P EB EA Insulation Red (+) E P 17 4.3 56 17 M5 x 0.8 (Pilot EXH. port) 65 62.5 109.1 66.5 (For E type) L (Lead wire length) 0.3 mm2 1.55 22 9.5 18 18 5 x 1/4" (Piping ports) 28 L plug connector with cover (LL) 52-SY5140 (

PSxx-OMM0006CN

No.PS-OMM0006CN-E // ZSE40A(F) ISE40A 2 9 12 13 16 16 18 20 23 23 25 25 25 F0 27 F1 OUT1 28 F2 OUT2 31 F3 33 F4 34 F5 / 36 F6 38 F11 39 F80 40 F81 41 42 F90 42 F97 44 F98 46 F99 48 49 52 52 53 60 60 63 -1No.PS-OMM0006CN-E (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

VK300

Refer to page 4-18-4.) Ambient and fluid temperature Response time (at 0.5 MPa) (1) 10 ms or less (Standard), 15 ms or less (Low power consumption type) Non-locking push type Not required (Use turbine oil Class 1 ISO VG32, if lubricated.)