Series SV

189 15 260.5 250 227 20 199.5 16 273 262.5 237.5 21 210 17 285.5 275 248 22 220.5 18 298 287.5 258.5 23 231 19 310.5 300 269 24 241.5 20 310.5 300 279.5 19 252 L1 L2 L3 L4 L5 69 69 Series SV Flat Ribbon Cable Dimensions: Series SV2000 for Flat Ribbon Cable Stations 1in = 25.4mm C4, N3 C6, N7 C8, N9 Tie-rod base manifold: SS5V2-10 D (S, R, RS) P PG PH 1 2 U D B (-D) When P, E port outlets

0.4

This allows for viable connections to take place without necessarily specifying whether the manifold station is double, single, or mixed wiring. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM.

SV

273 262.5 237.5 21 210 17 285.5 275 248 22 220.5 18 298 287.5 258.5 23 231 19 310.5 300 269 24 241.5 20 310.5 300 279.5 18.5 252 L1 L2 L3 L4 L5 1-2-71 68 Series SV Dimensions: Series SV2000 for D-sub Connector U D B 1 2 C4, N3 C6, N7 C8, N9 Stations Tie-rod base manifold: SS5V2-10FD (S, R, RS) (-D) When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite

VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

V

22 ASV310F-01-08S 8 R(PT)1/8 10 19.3 15.2 17.6 73.8 67.8 71.8 65.8 45.8 39.8 27.4 23.4 19 21 23 ASV310F-02-06S 6 R(PT)1/4 14 16.8 12.8 17.6 71.9 65.9 69.9 63.9 45.8 39.8 31.4 25.4 17 19 30 ASV310F-02-08S 8 R(PT)1/4 14 19.3 15.2 17.6 73.8 67.8 71.8 65.8 45.8 39.8 31.4 25.4 19 21 31 ASV410F-01-08S 8 R(PT)1/8 12 19.3 15.2 24 83.1 75.6 81.1 73.6 52.8 45.3 30.7 26.7 19 21 39 ASV410F-01-10S 10

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

5 Port Solenoid Valve, Series VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

0.4

Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) To CYL port VP4 VQ 1/2 VQ 1/2 Dimensions VQ 4/5 Single unit Manifold VQC 1/2 2n x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting 2 x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting VQC 4/5 VQZ M3 mounting hole M2.5 mounting hole SQ VFS VFR VQ7 Residual pressure release manual override DIN rail clamp screw Residual

Vacuum System Peripherals:

For vacuum pump servies: Series ZX 13-14-19 3. Series ZM 13-14-20 4.

VQZ1000/2000/3000

C6: One-touch fitting for 6 VVQZ2000-10A-2 VV5QZ22-05C 2-7-19 Body Ported 20 20 Series VQZ1000/2000/3000 Dimensions: VQZ1000 VV5QZ12Stations C Grommet (G) 27.5 (11) (35) 44.5 mounting hole n-C3, C4, C6, M5 20 (7.5) DIN rail clamp screw C3: One-touch fittings for 3.2 (5.5) C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread n Manual override 5 4 4 SMC SMC P = 10.5 47 2

SZ3000

When the port size of the external pilot block assembly is 4, indicate with C4 in section (c).

Series VQ Base Mounted Metal Seal/Rubber Seal

C4 Refer to p.1.10-195 for cylinder port fittings.

Fieldbus System

Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations Symbol A, B port P , E port A, B port size (Metric) Symbol A, B port P , E port A, B port size (Inch) Applicable series Applicable series C3 C4 C6 C4 C6 C8 C6 C8 C10 M N1 N3 N7 N3 N7 N9 N7 N9 N11 M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting

Table of Contents

For details, refer to pages 3-7-19 and 3-7-20.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note 2) Refer to page 19 for manifold dimensions with elbow fitting.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Description Material Aluminum die-casted Note Body q Spool/Sleeve Stainless steel Metal seal w Spool valve Aluminum/HNBR Rubber seal Piston Resin e r Pilot valve assembly For How to Order Pilot Valve Assembly, refer to page 4-14-19. 4-14-7 Body Ported 8 Series VQZ100/200/300 Dimensions: VQZ100 Single unit Grommet (G): VQZ115-G-C3/C4/C6/M5-PR C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VS7 C6: Onetouch fitting for 6 VVQZ200010A2 VV5QZ2205C 1.12-19 VQZ1000/2000/3000 Body Ported Dimensions: VQZ1000 VV5QZ12 C Station Grommet (G) 27.5 (11) (35) 44.5 Mounting holes (5.5) n-C3, C4, C6, M5 C3: One-touch fittings for 3.2 C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread 20 (7.5) DIN rail clamp screw U side n 5 4 4 4 4 4 SMC SMC 14 P=10.5 2 2 2 2 (L4) (L3)

SZ3000

For SYJ details, refer to page 1-3-19.)

Table of Contents

C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24