LEC-OM02704CN

3.7.1 .42 3.7.2 .45 3.7.3 .46 3.7.4 .47 3.7.5 .50 3.7.6 .53 3.8 .56 3.8.1 1 .56 3.8.2 1 .57 3.8.3 2 .59 3.8.4 2 .60 3 1 3CC-Link 3 CC-Link 3.1 CC-Link DC5V CC-Link Ver.1.10 10M/5M/2.5M/625K/156Kbps NRZI CC-Link BUS(EIA RS-485) CRC(X16X12X51) CC-Link Ver.1.10() HDLC 164 156kbps 625kbps 2.5Mbps 5Mbps 10Mbps () 1200m 900m 400m 160m 100m 0.2m 42(1/)(2/32) .

LEC-OM07605CN

PE_ _ ]). 5-42 5.2.6 3([Pr. PF_ _ ]). 5-43 5.2.7 4([Pr.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

13 (12.7) 36.6 35 31.1 29.5 13.3 18 (19) AS23l1FG-02-07(S)A 1/4" 11.2 19 33.8 (33.9) 21.4 43.9 20 (21) AS23l1FG-02-09(S)A 5/16" 13.2 34.9 (35) 23.5 46 14.2 21 (22) AS23l1FG-02-11(S)A 3/8" 15.9 20.9 38.1 (38.2) 24.7 47.3 15.6 23 (23) AS33l1FG-02-07(S)A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 50 48.4 44.5 42.9 13.3 42 (42) AS33l1FG-02-09(S)A 5/16" 13.2 37.1 23.5 59.9 14.2 43 (43) AS33l1FG

ARM10/11

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure

ARM10/11

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure

Table of Contents

Note 6) Refer to SMC catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-41 VV5Z5-42 Before using, refer to page 3-3-8.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 10-SS5Y3-41(-Q) 10-SS5Y3-42(-Q) 10-SS5Y5-41(-Q) 10-SS5Y5-42(-Q) 10-SS5Y7-42(-Q) 10-SY340 10-SY540 10-SY740 Single base/B mount Common SUP, Common EXH 2 to 20 stations Note 1) Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations A, B port Location Direction Base Side Porting specifications 1 4 1 4 M5 x 0.8, 1 8 P, EA, EB port

VM

VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB Black VM120

2/3 Port Valve

L 108 117 130 135 N 93 102 N 79.5 87.5 1 4 3 8 , 50 63 80 90 35 35 40 40 52 60 68 73 25.5 33 41 44 11 14 18 21 6 7 7 7 89 97 112 117 25 25 28 28 67 75 87 92 40 52 65 70 7.5 8.5 9 9 22 28 36 42 5.5 6.5 6.5 6.5 24 33 42 47 1.6 2.3 2.6 2.6 26 30 38 43 14 17 22 22 23 23 25.5 25.5 28 35 43 45 1 2 3 4 1 101.5 115.5 106.5 120.5 4.1-82 VXZ22/23 Conduit: C FN.C.E Normally closed EN.O.F Normally open

Series KV2 Fittings

-33S KV2Y03-34S KV2Y03-35S KV2Y07-11-35S KV2Y07-34S KV2Y07-35S KV2Y07-36S KV2Y11-07-35S KV2Y11-07-36S KV2Y11-35S KV2Y11-36S KV2Y11-37S KV2Y13-07-37S KV2Y13-11-36S KV2Y13-11-37S KV2Y13-35S KV2Y13-36S KV2Y13-37S KV2Y15-37S 14.29 14.29 14.29 14.29 19.00 14.29 14.29 17.46 19.00 19.00 19.00 19.00 22.23 23.80 23.80 22.23 19.00 19.00 22.23 23.80 13.2 13.2 13.2 13.2 17.9 13.2 13.2 13.2 17.9 17.9

ZP

135 186 B 42 C 100 A B C D E F G H Y 63 65 14.5 26 41 63 103 154 3.5 Model ZPX63HJ25-B01-A18 ZPX63HJ50-B01-A18 ZPX63HJ75-B01-A18 ZPX80HJ25-B01-A18 ZPX80HJ50-B01-A18 ZPX80HJ75-B01-A18 63 65 14.5 26 41 63 136 189 3.5 40 ZPX40HJ75-B01-A18 42 171 222 63 65 14.5 26 41 63 172 225 3.5 50 ZPX50HJ25-B01-A18 52 100 151 80 82 16.5 28 43 65 105 156 4.5 50 ZPX50HJ50-B01-A18 52 135 186 80 82 16.5 28 43

ZP

M10 x 1.5 B 42 ZF (mm) B 42 50 ZPT50H-A14 52 Model A 40 ZPT40H-A14 ZP 50 ZPT50H-B8 52 M8 x 1.25 50 ZPT50H-B10 52 M10 x 1.5 ZCU AMJ 63 80 ZPT H-B (Female thread) 63 80 ZPT 6380H-A16 (Male thread) Misc.

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Compact Manifold Regulator

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM10F-08 ARM10-08 (One-touch fittings

ZP

48 58 11 14.5 20.5 12.8 14.2 16.6 24.5 27 31 42 48 58 11 14.5 20.5 12.8 14.2 16.6 8 8 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Compact manifold regulator ARM5 Series

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at knob locked) 55 (at knob locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side IN

EXxx-OMS0026CN

12 byte 6 byte Diagnostic mode 1 (MSB-LSB) 1 Byte0 byte0 DYB(1) 07 Byte1 byte1 DYB(2) 07 Byte2 byte2 07 Byte3 byte3 815 SEN3(5) Byte4 AXA 0 Hi byte 1623 (0) Byte5 Lo byte 2431 Byte6 AXA 1 Hi byte (0) Byte7 Lo byte Byte8 DXB(3) 07 Byte9 07 DXD(4) Byte10 815 Byte11 Padding 12 byte 6 byte 1(42 ) -61No.EX-OMS0026CN SI ( ) 0 0 byte 1 + 4 byte -62No.EX-OMS0026CN byte Bit No. 0 1 2 3 0

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel