ZP tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter
108 49 14 30.7 14 108 54 14 33.2 14 110 64 14 36.5 15 121 77 14 41 16 136 92 17 46.2 16 139 100 17 53.2 23 165 115 23 62.2 23 165 140 26 72.7 Specifications other than above are the same as standard type.
85 174.5 8 4 147 159 MXQ8B-100Z 36 14 66 36 100 42 110 199.5 10 5 172 184 MXQ 8BL-mZ Symmetric type 2 x M3 x 0.5 thread depth 5 13 20 27 40 42 21.7 Pilot port side 23 * Dimensions other than those listed above are the same as those for the standard type. 59 Air Slide Table/Low Thrust with High Rigidity Type MXQB Series Dimensions: MXQ 8B [Adjuster Option] MXQ 8B-m With adjuster option (8
(mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S CD LH LT LW LX X Y Z SS e f Q 32 M10 x 1.25 58 109 38 14 21 15 11 37 31 3/8 39 130 11 35 14 13 88 29 14 98 57 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 118 45 10 21 15 11 36 30 3/8 42 130 11 37.5 14 13 95 29 14 98 57 52 12 15 25 to 1400 50 M10 x 1.25 76 145 52 10 27 19 11 43 35 1/2 46 142 14 45
Double solenoid SX3240-5MO Single solenoid Common connector assembly SX100-42-4D SX3140-5MO Common connector assembly SX100-42-4S Common connector assembly (With common lead wire) SX100-40-4S SS5X3-41-04-C6 1 set SX3140-5MO 2 set SX3240-5MO 2 set SX100-40-4S 1 set (Single solenoid with lead wire for common) SX100-42-4S 1 set (Single solenoid) SX100-42-4D 2 set (Double solenoid, 3 position
Vacuum regulator 13-14-2 Series IRV 13-14-3 Controls the vacuum pressure in accordance with external electric signals.
13 14 1 ZPY16CT 16 17 Dimensions of D, E are the same.
0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4 13 0.31 3.2 14 [13] 14 [13] 0.32 [0.30] 3.6 [3.2] 14 0.30 3.7 0.32 [0.30] 3.6 [3.2] 13 [5.0] 0.27 [0.42] 3.2 [1.3] 13 0.28 3.1 15 [5.3] 0.22 [0.42] 3.7 [1.5] 13 0.28 3.3 0.30 2 position 3 position Single 5 50 or less VFR420 VFR421 VFR424 Double 5 50 or less VFR430
24 30 42 53 51 60 82 71 74 91 118 113 125 14 10.4 13.4 16 13.4 4 17 14 6 12.8 13.4 17 13.4 24.5 17 19 8 18.5 15.2 17.6 15.9 28.5 21 10 21 21 18.5 20.6 19.2 31.5 12 26 34 22 20.9 25.2 21.6 Reference dimensions after R(PT) thread installation.
Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without
R +0.058 0 0.2 0.4 8 8 0.2 0.4 10 0.3 0.5 18 I-G02 I-G03 I-G04 Y-G02 Y-G03 Y-G04 +0.058 0 8 +0.4 +0.2 8 16 20 22 34 41 42 20 25, 32 40 8.5 10.5 14 25 30 30 M8 X .25 M10 X .25 M14 X 1.5 10.3 12.8 12 11.5 14 14 16 20 22 21 34 41 42 25 30 30 10.3 12.8 12 20 8.5 M8 X .25 11.5 14 14 16 20 36 IY-G02 IY-G03 IY-G04 +0.058 0 10 +0.058 0 10 +0.4 +0.2 10 +0.5 +0.3 18 25, 32 40 10.5 16 M10 X 1.25 M14
TL TIL Dimensions TLM TILM Union Flange: LQ3F TD TID TH TIH Metric Size (S) Model E E H L1 L1 L2 L2 M P Q R S T W N Min. port size LQ3F22 17 16 16 32.1 30.9 56.1 54.9 20 58 42 43 14 10 14 4 4 LQ3F42 24 22 24 49 46.8 73 70.8 29 58 42 43 14 10 22 9.5 9.5 LQ3F43 69 LQ3F51 26.5 24 32 58 55.3 80 77.3 37 53 42 43 12 10 30 16 16 LQ3F52 82 79.3 58 14 LQ3F53 69 LQ3F62 30 26 41 68.5 64.2 92.5 88.2
tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter
A MM A1 E1 L1 NDH10 NX I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 22 28 38 44 20 25, 32 40 50, 63 80 100 8.5 10.5 14 18 21 21 10.3 12.8 12 16 21 24 25 30 30 40 50 55 M8 x 1.25 11.5 14 14 20 27 31 34 41 42 56 71 79 Applicable bore (mm) 8 10 10 14 18 22 8 10 18 22 28 32 +0.058 0 0.2 0.4 R1 U1 ND Applicable pin part no. L MM NZ NX Part no.
Connection thread Model D1 D2 L1 L2 *A M Nylon M5x0.8 KXL04-M5 8 22.5 24 11 4 10.4 13 22 16 2.5 3.5 18 KXL04-01S 12 23 25 16 18 KXL06-01S 25 28 20 6 14 12.8 15 24 17 4 8.6 14 KXL06-02S 28 29 26 18 KXL08-01S 29 32 28 14 KXL08-02S 32 33 34 8 17 15.2 17 27 18.5 6 21.6 38 KXL08-03S 33 34 43 14 KXL10-02S 38 42 69 38 KXL10-03S 39 42 77 10 22 18.5 23.5 32 21 7 30.5 95 12 KXL10-04S 42 43 38 KXL12
(SNJ-016B for 10, SNKJ-016B for 16) LB KA MM H LZ GB LY GA LX Z F LT S BA CB LH NN Y A BB CA LC NA NB X Bore size (mm) 10 16 4.2 28 42 5 25 8 33 74 8 2.3 46 14 14 9 15 17 5.5 9.5 6 15 12 21.5 12.5 M4 x 0.7 M10 x 1.0 5.2 28 42 5 25 8 33 75 8 2.3 47 20 14 9 15 20 5.5 9.5 6 18.3 18.3 23 12.5 M5 x 0.8 M12 x 1.0 6-3-36 37 37 Series CJ2K Air Cylinder: Non-rotating Rod Type Double Acting, Single
78 (81.5) 4 20 32 33 42 18 32 86 (89.5) 16 5.5 6 14 84 (87.5) 99.5 (103) 115 (118.5) 4 20 32 33 42 18 32 92 (95.5) 107.5 (111) 123 (126.5) 20 6.6 8 17 96 146 171 5 25 40 42 54 19 36 103 153 178 25 6.6 8 17 96 147.5 172.5 5 25 40 42 54 23 40 110 158.5 183.5 ( ): For built-in magnet Refer to page 12 of Standard Type Single Rod for details of accessories (rod end, double knuckle joint,
225 250 262.5 275 287.5 300 300 58.1 42.6 7.5 34.5 48.4 L3 91.5 81 102 112.5 123 133.5 144 154.5 70.5 181.5 192 202.5 213 223.5 234 L4 14 13 12 15 16 17 12 13 14 13 14 15 16 17 11.5 Two SUP/EXH blocks are provided for models with 11 stations or more.