VZ100/300/500

/R port Thread type Stations A port side P port M5 01 C4 C6 B3 B7 2 stations 02 M5 x 0.8 1/8 Tube Nil Rc G NPT NPTF F N T 20 stations 20 One-touch fitting for 4 One-touch fitting for 6 A port M5 x 0.8, 1/8, C4, C6, B3, B7 One-touch fitting for 5/32" One-touch fitting for 1/4 Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port.

SQ1000/2000

42 P. 49 C6 L6 Terminal number D-sub connector SOL.

5 Port Solenoid Valve SY Series

-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN202-02 AN200-02 AN200-02 Conditions [When using SGP (steel pipe)] Conditions [When using SGP (steel pipe)] Body ported Base mounted Series CS1 SGP10A x 1 m AS420-03 AN200-02 Series CS1 SGP10A x 1 m AS420-03 AN300-03 SY9120-03 Tubing bore x Length Speed controller Silencer SY7140-03 Tubing bore x Length Speed controller Silencer SY9140-04 Tubing

Table of Contents

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

light 37 <42> < >: AC 4-14-9 Body Ported 10 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ32(R)-G-C6/C8/C10/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

Table of Contents

1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(For type 20, 41, 42 and 45) Pilot pressure range SS5YA Fill the same as SS5Y . 3 5 7 3 5 7 Pilot pressure MPa Specify the part numbers for valves and options together beneath the manifold base part number. (Example) SS5YA5-42-03-02 1 set (Type 42, 3 station manifold base part no.) SYA5140 1 set (Single air operated valve part no.) SYA5240 1 set (Double air operated valve part no.)

Fieldbus System

Specified layout Note 2) (Available up to 32 solenoids) 20 20 stations Symbol A, B port P , E port A, B port size (Metric) Symbol A, B port P , E port A, B port size (Inch) Applicable series Applicable series C3 C4 C6 C4 C6 C8 C6 C8 C10 M N1 N3 N7 N3 N7 N9 N7 N9 N11 M 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting

VQ7-6/7-8

) 50 (63) 32 (42) 5 3 5 3 38 (53) 38 (53) 1 23 (30) 1 23 (30) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P Rc1/8 Port X (PE) Rc1/8 Port X (PE) 30 (42) 30 (42) 30 (42) 30 (42) Dimensions inside ( ) are for Rc3/4 Dimensions inside ( ) are for Rc3/4 Dimensions inside are for rubber seals 20 Series VQ7-8 Construction DIN Connector

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Type 41 Applicable solenoid valve SYJ514-SYJ514M-SYJ524-SYJ524M-How to Order SS3YJ5--41-05 -C6 R port 1/8 Stations P, R port thread type A port size 02 : 20 P port 1/8 2 stations : 20 stations A A M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 Nil Rc G NPT NPTF Applicable blanking plate assembly SYJ500-10-3A F N T 4 one-touch fitting 6 one-touch fitting A port M5 x 0.8, 1/8, C4, C6 5/32" one-touch fitting

Table of Contents

VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

52 75 85.5 L1 L2 L3 L4 4-14-37 Base Mounted 38 Series VQZ100/200/300 Dimensions: VQZ300 VV3QZ35Stations Port size C Grommet (G) (35) (5.5) 2-4.5 mounting hole 43.5 (11) C6: One-touch fitting for 6 n-C6, C8, C10, 02 34 (7.5) (3) DIN rail clamp screw 23.5 C8: One-touch fitting for 8 C10: One-touch fitting for 10 02: Rc1/4 U side n A 2 A 2 5 Manual override 4 (L4) 3 (L3) L2 L1 2 P = 20 P =

ARM10/11

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal w o ARM2500 -A-02 ARM2500 -B-02 ARM3000 -A-03 ARM3000 -B-03 1 Regulator Regulator Replacement Parts 1 1 1 End plate R End plate L O-ring !0 !1 !2 Description Material Part no. No.

ARM10/11

Common IN Individual IN Common IN Individual IN Bonnet Polyacetal w o ARM2500 -A-02 ARM2500 -B-02 ARM3000 -A-03 ARM3000 -B-03 1 Regulator Regulator Replacement Parts 1 1 1 End plate R End plate L O-ring !0 !1 !2 Description Material Part no. No.

Table of Contents

60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 48 70 47 10 60 121 188 94 32 8-15-42 42 Series CY1R Magnetically Coupled Rodless Cylinder Direct Mount Type Centralized Piping Type: 10, 50, 63 CY1RG Bore size H Stroke L Note) Type L is not available for 10.

0.4

One-touch fitting assembly C6: 6 One-touch fitting assembly 2 x Rc 1/8, 1/4, C6, C8 ( 9.5) ( 9.5) 80 39.5 (For C6, C8) (For C6, C8) 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 4.5 2 x M4 mounting hole 2 x M6 mounting hole IN IN IN IN 5.5 (5) 69.5 (40) 6.5 58 10.5 80 37.5 Residual pressure release manual override (For C6, C8) 22 20.5 7 Stations 1 2 3 n U side D side ( 9.5)

VQ7-6/7-8

) 23(30) 32(42) 23(30) 1 1 2-3/8, 1/2, 3/4 2-3/8, 1/2, 3/4 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 3/8, 1/2, 3/4 R1, R2 port X(PE) port 1/8 30(42) 30(42) 30(42) 30(42) P port P port ( ): 3/4 Dimensions inside are for rubber seals. ( ): 3/4 3-10-24 25 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Prewired Connector Type 2 position single : VQ7-8-FG-S-SC single (Reverse

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

42

C6 6 One-touch fitting C8 8 One-touch fitting C10 10 One-touch fitting C12 12 One-touch fitting 02 1/4 03 3/8 B Bottom ported 1/4 CM Mixed N7 1/4" One-touch fitting N9 5/16" One-touch fitting N11 3/8" One-touch fitting Symbol Protocol type SI Unit part no.