Fieldbus System

2 05 U Refer to the SY3000/5000 series catalog (CAT.ES11-103) for Type 11/Bottom ported dimensions.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

VK3000

: Base mounted (A, B port side ported) Applicable solenoid valve VK3140-(-Q) VK334-(-Q) Type VK3140 VV5K3 05 42 01 Type VK334 VV061 Solenoid direction Valve stations 01 1 station Applicable blanking plate assembly VK3000-7-1A Solenoid on opposite side of A and B port VV100 Nil A port: Rc 1/8 B port: Rc 1/8 P port: Rc 1/8 R port: Rc 1/8 Thread type Type S42 20 20 stations Solenoid on same

Vacuum

05 5 stations Exhaust Adapler/Port size 04 1t2 06 3/4 S-lntegral ZZNr-SA silencer (included) i i l0 -10 stations (Max.) Note: Order proper body types for manifold use (NzMOO3; NZMOO4) (NZMOOS; NzMOO6) Ex6mple (2) 4-stalion eiector manifolds NZZi/04-T04Fi (2). (Manifolds) NZM1O3HT-J5LZ (6) .(stations'l-", NZMo53HT-J5LZ (2) .

Vacuum

05 5 stations Exhaust Adapler/Port size 04 1t2 06 3/4 S-lntegral ZZNr-SA silencer (included) i i l0 -10 stations (Max.) Note: Order proper body types for manifold use (NzMOO3; NZMOO4) (NZMOOS; NzMOO6) Ex6mple (2) 4-stalion eiector manifolds NZZi/04-T04Fi (2). (Manifolds) NZM1O3HT-J5LZ (6) .(stations'l-", NZMo53HT-J5LZ (2) .

VK3000

Nil F N T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (A, B port top ported) How to Order Applicable solenoid valve VK3120M5 VK312001 VK332M5 VK33201 A port: Rc 1/8, M5 x 0.8 VV5K3 21 05 A, B port: Rc 1/8, M5 x 0.8 VK3120 VK332 Thread type Valve stations Nil F N T

Secondary Batteries

C6 X121 90-VQ1000 Series compatible with secondary batteries For blanking manual specification 90 Material restriction OUT side port size One-touch fitting for 4 One-touch fitting for 6 C4 C6 IN side port size One-touch fitting for 4 One-touch fitting for 6 C4 C6 *Specifications and dimensions for the 90-series are the same as standard products. 90 X121 VQ2000 FPG 01 01 90-VQ2000 Series

ARM10/11

ARM 2500 05 A 02 G1 AV AU Accessory None (With plug) Nil G1 G2 Regulator for manifold AF G33-10-01 GA33-10-01 AR Pressure gauges are shipped together (but not assembled).

ARM10/11

ARM 2500 05 A 02 G1 AV AU Accessory None (With plug) Nil G1 G2 Regulator for manifold AF G33-10-01 GA33-10-01 AR Pressure gauges are shipped together (but not assembled).

Plug-in Unit

mA), 0.5 W DC (21 mA) 24 VDC 12 VDC Power consumption (Current) 1 W DC (83 mA), 0.5 W DC (42 mA) Note 1) Use dry air to prevent condensation at low temperatures.

Series VQ Base Mounted Metal Seal/Rubber Seal

VVQ1000-19AC3 C4 C6 M5 C3 C4 C6 M5 F P L VS VS7 Check valve for prevention of back pressure assembly [-B] VVQ1000-57A DIN rail mounting bracket [-D] VVQ1000-AR-1 Regulator unit VVQ1000-R-1-C6 Individual EXH spacer VVQ1000-18A Refer to p.1.10-157 for cylinder port fittings.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

solenoid valve VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction Port size 01 C4 C6 Rc 1/8 4 cassette 6 cassette Solenoid on opposite A port Nil 1(P) port: Rc 1/8 3(R) port: Rc 1/8 Solenoid on same side as A port 2(A) port: Rc 1/8 S Valve stations Type S42 (Solenoid on same side as port A) 01 1 station 1(P) port: Rc 1/8 3(R) port: Rc 1/8 20 20 stations

VKF300

Valve stations None With bracket (not mounted) Nil 1 station 01 Bracket VK300-43-1A F 20 stations 20 Port A: Rc(PT) 1/8 Port size 01 Rc(PT) 1/8 Type 42/for base mounted type (Port A side ported) How to Order Applicable solenoid valves VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction Port size Rc(PT) 1/8 4 cassette 6 cassette 01 C4 C6 Solenoid on side

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Valve stations None With bracket (not mounted) Nil 1 station 01 Bracket VK300-43-1A F 20 stations 20 Port A: Rc(PT) 1/8 Port size 01 Rc(PT) 1/8 Type 42/for base mounted type (Port A side ported) How to Order Applicable solenoid valves VKF334Applicable blanking plate assembly VK300-42-1A VV3KF3 05 01 42 Solenoid direction Port size Rc(PT) 1/8 4 cassette 6 cassette 01 C4 C6 Solenoid on side

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

C4, C6, M5 C3: One-touch fitting ass'y for 3.2 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 C6: One-touch fitting ass'y for 6 45.5 2.5 M5: M5 thread M5: M5 thread 10.5 (5) 21.5 Dimensions Equation L1 = 11n + 20 n: Station (Max. 24 stations) 7.5 L n 1 2 3 4 5 6 7 8 11 9 10 12 29 18 31 42 53 64 75 86 97 108 141 L1 L2 L3 119 130 152 50 62.5 75 87.5 100 112.5 125 125 162.5

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

light 37 <42> < >: AC 4-14-9 Body Ported 10 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ32(R)-G-C6/C8/C10/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2

Table of Contents

(mm) A B C D E (g6) F (h9) G H K L M N R S1 S2 T U V W X Y Z Model 1 1 3 3 5 0.004 0.012 6 0.004 0.012 8 0.005 0.014 12 0 0.043 14 0 0.043 16 0 0.043 CDRBU2W15-D 48 36 29 3 21 10.5 10.5 0.5 10 15.5 1.5 18 34 25 29 M5 x 0.8 3.5 24 30 M3 x 0.5 18.5 CDRBU2W20-D 59 44 36 4 26 11 11.5 0.5 10 17 1.5 20 42 34.5 30 M5 x 0.8 4.5 M4 x 0.7 25 25.5 34.5 CDRBU2W30-D 69 52 42 4.5 29 13 12 1 12 17.5 2 22

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

ZQ-OM01401

ZQ 05 1U A-K15L B-EA M G -3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10)(11)(12) (1) (7) 05 0.5 5) 07 0.7 M SI (kPa) 10 1.0 5) (:psi) P 5) (99 10 ) (2) (8) 1U 3M G (2m) (9) (10) (V ) 6) (3) 0 (M5x0.8) 7) K1 N.C. N.C. K 1 3.2 () K2 N.O. N.C. 6) 2 4 () J1 N.C. 3 6 () J2 N.O. 4 3.2 () 1) ()(N.C.)