AC10B to 60B Page 7 Air Filter + Mist Separator + Regulator AC20C to 40C Page 9 Filter Regulator + Mist separator AC20D to 40D Page 11 Page 13 Spacers and Brackets: Accessories Page 18 Page 20 AW10 to 40 Page 56 Page 61 Filter Regulator with Back Flow Mechanism AW20K to 40K Page 63 Mist Separator Regulator AWM20 to 40 Page 67 Micro-Mist Separator Regulator AWD20 to 40 Page 71 AFD20 to 40
L3 dimensions inside ( ) are for MP . 3-10-19 20 Series VQ7-6 Manifold Option Parts Interface regulator ARB250-00Residual pressure release valve spacer AZ503-82 P A B A B Interface regulator 254 P A B ARB250-00127 SMC SMC 193.5 (165.5) 205.5 (177.5) 195.5 (167.5) 183.5 (155.5) Manual override E R Residual pressure release valve spacer (AZ503-82 ) A B 65 (37) 105 (77) 14 PA 12 PB B 1 95 (67
(Example) SS3YJ3-20-03 . 1 set (manifold base) SYJ312-5LZ-M3 . 2 sets (valve) SYJ300-10-1A . 1 set (blanking plate assembly) SS3YJ3-42R-03-C4 . 1 set (manifold base) SYJ314R-5G . 2 sets (valve) SYJ300-10-2A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.
Copper, fluorine and silicone-free + Low particle generation 67-1 A AF-D Series Specific Product Precautions Be sure to read this before handling the products. Refer to the back cover for safety instructions.
Q , R ;S ZPR40 64 67 64 67 65 68 64 67 J . 4 4 20.6 15.6 1 0.4 ZPRSO 66 69 67 70 66 69 1 "6 6 21.6 I 16.6 12.8 17 Series ZPR/Without Buffer Connection One-Touch Tube Fitting Pad Type Flat, Flat with rib, Deep Vacuum Entry Horizontal Type Mounting Male Thread Flat type Flat type Q Width across lIats (!)! (M6 :S, M8 :t2) Width BCIOSS lIa ts . ,(M6:s..
Note) Electric current should be 1A or less (including the mounted valves).
2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !0 03 04 Non plug-in type VVF4000-1A-2VVF4000-2A-1 VVF4000-2A-2 Plug-in type End plate (U side) assembly !1 Non plug-in type VVF4000-3A-1 Plug-in type End plate (D side) assembly !
P P Model Orifice size (mm) Model Connecting port size Rc(PT) VXA3114 , 1 8 1 4 , 1 8 1 4 , 1 8 1 4 , 1 4 3 8 , 1 4 3 8 , 1 4 3 8 1.5 2.2 VXA3124 VXA3134 VXA3224 VXA3234 3 2.2 3 MaterialO Body Seal Brass, Stainless steel NBR, FPM, EPR 4 VXA3244 4.1-67 VXA31/32 Common (C.O.)
121538-1A-S1 [IS400-1 (Float switch only)] 121538-1A-S2 [IS400-2 (Float switch only)] 1000 cm3 tank Metal bowl with level gauge Note) Bowl O-ring (or seal) is included for the AL20 to AL60.
SOL.A () (+) 1A Station 1 SOL.B () (+) 1B Step 1. Removing the terminal block cover Loosen mounting screws (4 pcs.) on the terminal block cover and remove the cover. SOL.A () (+) 2A Station 2 SOL.B () (+) 2B SOL.A () (+) 3A Station 3 Step 2. Wiring Loosen screws on the terminal block, connect wiring and complete it by tightening screws.
SOL.A () (+) 1A Station 1 SOL.B () (+) 1B Step 1. Removing the terminal block cover Loosen mounting screws (4 pcs.) on the terminal block cover and remove the cover. SOL.A () (+) 2A Station 2 SOL.B () (+) 2B SOL.A () (+) 3A Station 3 Step 2. Wiring Loosen screws on the terminal block, connect wiring and complete it by tightening screws.
Output Specifications 25 (L) 1 output NPN open collector 30 V, 80 mA or less Analog output (1 to 5 V) ZSE4 ZSE4B 26 (L) 67 (L) 1 output PNP open collector 80 mA or less 26 (L) Analog output (1 to 5 V) ZSE4E 27 (L) 2 outputs NPN open collector 30 V, 80 mA or less 67 (L) 2 outputs PNP open collector 80 mA or less 13-3-16 16 Series ZR Large Size Vacuum Module: Ejector System ZX ZR ZM ZH ZU Courtesy
VP300-27-1A VP500-27-1A VP700-27-1A Series VPA342 VPA542 VPA742 Bracket (With screw) Only VPA344, VPA544 and VPA744 Specifications Fluid Type of actuation Air N.C. or N.O. (Can be switched.) Note) Standard Vacuum Operating pressure range (MPa) 0.2 to 0.8 N.C.
VP300-27-1A VP500-27-1A VP700-27-1A Series VPA342 VPA542 VPA742 Bracket (With screw) Only VPA344, VPA544 and VPA744 Specifications Fluid Type of actuation Air N.C. or N.O. (Can be switched.) Note) Standard Vacuum Operating pressure range (MPa) 0.2 to 0.8 N.C.
Applicable manifold base model VP300-25-1A VV3PA3 Blanking plate assembly (With a gasket and two mounting bolts) VP700-25-1A VV3PA7 VP500-25-1A VV3PA5 1569 VPA300/500/700 Series How to Order Valve (With a gasket and two mounting bolts) VPA 3 4 4 1 A Type of actuation A B N.C. (Normally closed) N.O.
Switch characteristics Contact point configuration Maximum contact point capacity Operating voltage: AC, DC 1a AC2VA, DC2W 100V or less 12 to 24VAC or VDC: 50mA 48VAC or VDC: 40mA 100VAC or VDC: 20mA Maximum operating current How to Order 30 IS1000M Option X201 X202 Lead wire length: 3m Pressure switch Regulating pressure range: 0.1 to 0.6MPa Lead wire length: 3m; Regulating pressure range
Example: SS5YJ3-20-03 1 set (Manifold base) SYJ3120-5G-M3 2 sets (Valve) SYJ3000-21-1A 1 set (Blanking plate assembly) SS5YJ3-S41-03-C4 1 set (Manifold base) SYJ3140-5LZ 2 sets (Valve) SYJ3000-21-2A 1 set (Balnking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
Name Detail Method (Note3, display Detail name 4) 17.1 Board error 1 DB Alarm 17.3 Board error 2 DB 17 Board error 17.4 Board error 3 DB 17.5 Board error 4 DB 17.6 Board error 5 DB 17.8 Board error 6 (Note 5) EDB 19.1 Flash-ROM error 1 DB 19 Memory error 3 (FLASH-ROM) 19.2 Flash-ROM error 2 DB 1A.1 Servo motor combination error DB 1A Servo motor combination error 1A.2 Servo motor control
Example: SS5YJ3-20-03 1 set (Manifold base) SYJ3120-5G-M3 2 sets (Valve) SYJ3000-21-1A 1 set (Blanking plate assembly) SS5YJ3-S41-03-C4 1 set (Manifold base) SYJ3140-5LZ 2 sets (Valve) SYJ3000-21-2A 1 set (Balnking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
A 1A () (+) SOL. B 1B () (+) Station 1 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL. A 2A () (+) SOL. B 2B () (+) Station 2 SOL. A 3A () (+) 1.