Series AP3500

(P.124) 100 Series AP3500 Diaphragm Valve for Ultra High Purity Air operated type (For low pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material H S Wetted Parts Body Surface finish Diaphragm Seat Hastelloy C-22 Electropolish 316L SS secondary remelt Electropolish

SL5200

If a back pressure regulator requires repair, contact SMC. 97 Technical Data/Glossary of Terms AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators 1. Applications [Tied-diaphragm] This is a regulator design in which the diaphragm and poppet are linked together.

Vacuum

Applicable valve: NvJr(n (N.C.) / NzxloGKi 6)@@O-F SpcQ| l,/ZXl-Sl Spscs 1 .1, .r"iF. stde .orri"tg) 9 i!

Vacuum

enie MffiIE Applicable valve: NvJr(n (N.C.) / NzxloGKi 6)@@O-F SpcQ| l,/ZXl-Sl Spscs 1 .1, .r"iF. stde .orri"tg) 9 i!

Series AK1000

Please contact SMC. 3) Mass, including individual boxed weight, may vary depending on connections or options. 46 Series AK1000 Single Stage Regulator for General Applications Low to intermediate flow AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Option High flow Higher flow capacity

BP1000

If a back pressure regulator requires repair, contact SMC. 97 Technical Data/Glossary of Terms AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators 1. Applications [Tied-diaphragm] This is a regulator design in which the diaphragm and poppet are linked together.

BP1000

Please contact SMC. 95 Process Gas Equipment / Back Pressure Regulator Specific Product Precautions AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Be sure to read before handling.

KT10

If a back pressure regulator requires repair, contact SMC. 97 Technical Data/Glossary of Terms AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators 1. Applications [Tied-diaphragm] This is a regulator design in which the diaphragm and poppet are linked together.

Series AP3100

Elgiloy PCTFE (Option: Vespel) PCTFE 114 Series AP3600 Diaphragm Valve for Ultra High Purity Manually operated type AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Dimensions inch (mm) AP3600 AP3625 2.12 (53.8) 2.05 (52.1) 0.94 (23.9) 1.48 (37.6) 2.94 (74.7) 3.0 (76.2) 0.44 (11.2) 0.44

Pneumatic Purification

Test button for maintenance check UL and CSA approved PART NUMBER DESCRIPTION SL-W Timer, cord, filterstop, 3/8 valve 24 to 240 VAC/DC SL-WVX1/2 As above, but with SMC 1/2 NPT VXD valve and no filterstop 110 VAC* SL-WVX3/4 As above, but with 3/4 NPT VXD valve and no filterstop 110 VAC* SL-WVX1 As above, but with 1 NPT VXD valve and no filterstop 110 VAC* FS Filterstop only MK111 Timer and

SMC Basic Pneumatics

The delinitive study ot pneumatics on an inlernational scale requires familiarity and competence with either set of units; therefore this document will employ both English and Sl units. Quantity Symbol SI Unlt Ngme Remarks 1 .

%silltr

The delinitive study ot pneumatics on an inlernational scale requires familiarity and competence with either set of units; therefore this document will employ both English and Sl units. Quantity Symbol SI Unlt Ngme Remarks 1 .

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Z L H LZ HZ Nil W L H 1 2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

Table of Contents

Z L H LZ HZ Nil W L H 1 2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

O

i vi t y Sensi t i vi t y Sharp D ul l Set t i ng of sensi t i vi t y SL. 0 SL. 1 SL. 2 Sw i t ch out put The f ol l ow i ng operat i on t ypes are avai l abl e by set t i ng P_1 and P_2.

O

i vi t y Sensi t i vi t y Sharp D ul l Set t i ng of sensi t i vi t y SL. 0 SL. 1 SL. 2 Sw i t ch out put The f ol l ow i ng operat i on t ypes are avai l abl e by set t i ng P_1 and P_2.

ITV-E

i vi t y Sensi t i vi t y Sharp D ul l Set t i ng of sensi t i vi t y SL. 0 SL. 1 SL. 2 Sw i t ch out put The f ol l ow i ng operat i on t ypes are avai l abl e by set t i ng P_1 and P_2.

Process Gas Diaphragm Valve

Direction of a raised rectangular section indicate open/close status Open Close Air Operated Type AP SL Series AZ3542 and 4542 Height Weight 55mm AZ AZ Compact and lightweight by making the actuator shorter AK 220g BP M5 actuation port 1107 Series AZ Air operated type Manually operated type Series AZ3542/AZ4542 Series AZ3652/AZ4652 Body material User-friendly forged body Rounded corner for

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

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-fl Seies

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