Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Standard Specifications Weight Table (g) Pad diameter (mm) Vacuum entry (One-Touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Connection Vacuum entry Connection M5 x 0.8 19 18 Female thread One-Touch fitting 10 to 16 M5 x 0.8 22 23 4 tube M5 x 0.8 20 to 32 10 to 16 M8 x 1.25 21 22 6 tube Pad diameter M5 x 0.8 58 60 6 tube M5 x 0.8 40, 50 (mm) M8

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (One-touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Mounting Vacuum entry port Connection M5 x 0.8 19 18 Female thread One-touch fitting 10 to 16 M5 x 0.8 22 23 4 tube 10 to 16 20 to 32 M5 x 0.8 M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 6 tube 40, 50 M5 x 0.8 Pad dia.

MY1

GA (Hexagon socket head plug) TT UU (Hexagon socket head plug) G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 1.1 (WW) QQ (Hexagon socket head plug) (WW) M5 x 0.8 M5 x 0.8 GA PP (Hexagon socket head plug) (Port) XX XX G Centralized piping type Centralized piping type 2 x M5 x 0.8 2 x M5 x 0.8 (Hexagon socket head plug) VV VV (Hexagon socket head plug) S WX 8.4 Bottom ported (Applicable

Cylinder

, , 17 8 M4XO.7. ,M12x,.o 12 2D . ~17 : gl ' 1, 5. . 13 t 8 20 \ 7 6.5 , 8 1 5 +0. ~ 0;" '" ~ 065 18.5 15 12 14 , 20 24.5 15.5 6 M5 XO.8 M14 X1.0 6 8 1 0 6 "'2 . 24 \ 9 8 22 8.~ I --Series CJP Trunnion Mount: CJPTi Without Auto Switch u ex ~ lrllnl'l'O(1 Mount T Bore size S I z r zz ~ (mm) 5" 1081 15" 20 91 3pst !

Transfer

Stroke adjustment unit mounting diagram Stroke adjustment unit Stroke Adjustment Unit Symbol Right side stroke adjustment unit Intermediate fixing spacer Example of L6L7 attachment Left side Right side L: With low load shock absorber + Adjustment bolt L unit Short spacer L unit Long spacer Without unit With short spacer With long spacer SL L L6L L7L SL6 LL6 L6 L7L6 SL7 LL7 L6L7 L7 Without

17

x 0.8 KK 9 NH NW 53 NE NF MY1B25 MY1B32 MY1B40 110 9 5.5 16 24.5 54 M6 x 1 9.5 5.6 18 40.2 39 110 40.5 55 42 9 M5 x 0.8 30 MY3A MY3B 140 11 6.6 19 M8 x 1.25 2 28.5 68 M5 x 0.8 16 10 6.8 22 50.2 49 64 140 70 52 50 12 M6 x 1 37 170 14 8.5 23 M10 x 1.5 2 35 84 M6 x 1 15 13 170 8.6 85 26.5 62.7 62 61.5 75 64 12 M6 x 1 45 MY3M Centralized piping YW P PA PB Q PP RR QW T TT WW XXX YH Z ZZ Model

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

high load shock absorber + adjustment bolt Without unit With short spacer With short spacer With short spacer With long spacer With long spacer With long spacer MY3M Spacer length SH7 AH7 A6H7 A7H7 LH7 L6H7 L7H7 HH7 H6H7 H7 SH6 AH6 A6H6 A7H6 LH6 L6H6 L7H6 HH6 H6 H7H6 SH AH A6H A7H LH L6H L7H H H6H H7H SL7 AL7 A6L7 A7L7 LL7 L6L7 L7 HL7 H6L7 H7L7 SL6 AL6 A6L6 A7L6 LL6 L6 L7L6 HL6 H6L6 H7L6 SL

, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: M9NW, Lead Wire Length(m): 0.5, Lead Wire Connector: M8 3‑pin plug connector, The number of the switches: 2, Custom-made Specifications: 0.2 to 0.8, End Block: SL, Custom-made: None

, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: None, Lead Wire Length(m): -, Lead Wire Connector: -, The number of the switches: -, Custom-made Specifications: 0.2 to 0.8, End Block: SL, Custom-made: None

, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: None, Lead Wire Length(m): -, Lead Wire Connector: -, The number of the switches: -, Custom-made Specifications: 0.2 to 0.8, End Block: SL, Custom-made: None

, Cushion: Air cushion, Specification: Magnet built-in, Auto Switches: None, Lead Wire Length(m): -, Lead Wire Connector: -, The number of the switches: -, Custom-made Specifications: 0.2 to 0.8, End Block: SL, Custom-made: None

Series AP500

volume Mass 1) 14 to 194F (10 to 90 C) for Vespel seat. 2) Tested with Helium gas inlet pressure 100 psig (0.7 MPa). 3) Mass, including individual boxed weight, may vary depending on connections or options. 2 Single Stage Compact Regulator for Ultra High Purity Series AP500 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL

AZ1000

If a back pressure regulator requires repair, contact SMC. 97 Technical Data/Glossary of Terms AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators 1. Applications [Tied-diaphragm] This is a regulator design in which the diaphragm and poppet are linked together.

SL5200

If a back pressure regulator requires repair, contact SMC. 97 Technical Data/Glossary of Terms AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators 1. Applications [Tied-diaphragm] This is a regulator design in which the diaphragm and poppet are linked together.

BP1000

If a back pressure regulator requires repair, contact SMC. 97 Technical Data/Glossary of Terms AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators 1. Applications [Tied-diaphragm] This is a regulator design in which the diaphragm and poppet are linked together.

BP1000

Please contact SMC. 95 Process Gas Equipment / Back Pressure Regulator Specific Product Precautions AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Be sure to read before handling.

KT10

If a back pressure regulator requires repair, contact SMC. 97 Technical Data/Glossary of Terms AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators 1. Applications [Tied-diaphragm] This is a regulator design in which the diaphragm and poppet are linked together.

Pneumatic Purification

Test button for maintenance check UL and CSA approved PART NUMBER DESCRIPTION SL-W Timer, cord, filterstop, 3/8 valve 24 to 240 VAC/DC SL-WVX1/2 As above, but with SMC 1/2 NPT VXD valve and no filterstop 110 VAC* SL-WVX3/4 As above, but with 3/4 NPT VXD valve and no filterstop 110 VAC* SL-WVX1 As above, but with 1 NPT VXD valve and no filterstop 110 VAC* FS Filterstop only MK111 Timer and

SMC Basic Pneumatics

The delinitive study ot pneumatics on an inlernational scale requires familiarity and competence with either set of units; therefore this document will employ both English and Sl units. Quantity Symbol SI Unlt Ngme Remarks 1 .

%silltr

The delinitive study ot pneumatics on an inlernational scale requires familiarity and competence with either set of units; therefore this document will employ both English and Sl units. Quantity Symbol SI Unlt Ngme Remarks 1 .