Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

ZSE F/ISE

ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings

F/ISE

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

Table of Contents

E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.8 2.5 7 8 8.5 9.5 12.5 13.5 16.5 17.5 M5 x 0.8 Hose Elbow: M-5HLH-4/-6 Width across flats 7 Weight (g) Effective area (mm2) 1.4 4.5 6.6 2.4 I H G F E D A B C Model 7 8 15 16 5.5 6 6.5 8.5 1.8 2.5 7 8 12 13.5 8.5 9.5 15.5 17.5 M-5HLH-4 M-5HLH-6 M5 x 0.8 Elbow: M-5L Tee: M-5T Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

HRX-OM-R016

Model number: HRS030-F-20 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

KJ

E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.8 2.5 7 8 8.5 9.5 12.5 13.5 16.5 17.5 M5 x 0.8 Hose Elbow: M-5HLH-4/-6 Width across flats 7 Weight (g) Effective area (mm2) 1.4 4.5 6.6 2.4 I H G F E D A B C Model 7 8 15 16 5.5 6 6.5 8.5 1.8 2.5 7 8 12 13.5 8.5 9.5 15.5 17.5 M-5HLH-4 M-5HLH-6 M5 x 0.8 Elbow: M-5L Tee: M-5T Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Air Fittings & Tubing

F (inch) Part No.

HRX-OM-M090

Model number: HRS0-F-0 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

MLU

Please contact SMC for more information. 9-13-6 6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9-13-7 7 Plate Cylinder with Lock Series MLU 25, 32, 40, 50 How to Order B 25 30 D F MLU Without auto switch With auto switch B 25 30 D F J79W S MDLU Number of auto switches

Plate Cylinder with Lock Series MLU

MLU B 25 30 D F J79W S MDLU With Auto Switch Number of auto switches Built-in magnet 2 pcs. 1 pc.

Series M Miniature Fittings M3, R(PT) 1/8, M5

Effective orifice(mm2 Weight (g) ) I H G F D E B C A 15 16 7 8 5.5 6 6.5 8.5 1.8 2.5 12 13.5 8.5 9.5 7 8 15.5 17.5 M-5HLH-4 M-5HLH-6 1.4 4.5 6.6 2.4 Elbow: M-5L Tee: M-5T Weight: 4.2g Weight: 3.5g Universal elbow: M-5UL Universal tee: M-5UT Effective orifice: 2.4mm 2 Weight: 5.3g Effective orifice: 2.4mm 2 Weight: 4.8g Extention fitting: M-5J Nipple: M-5N 303 Stainless Steel Effective orifice

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: None, Port Size: N7 (1/4" One-touch Fitting)

Function: 2 Position Single, Piping: Body Ported, Exhaust: Individual, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: None, Manual Override: None, Port Size: 1/4" One-touch Fitting, Thread: -, Option: -, CE Compliant: -

•

"F: 1 , 0 F . Model M' ;8 C R ~ !F. G ;K '.

AC

Use nothing for Rc(PT), N for NPT and F for G(PF).

F

F E R E N T D I A.

PSxx-OML0002CN

> [F 2] [F 1] OUT1(2729) 1[-], [F 3] <> [F 3] [F 3] -30No.PS-OML0002CN-G [F 4] <> [F 4] 1000 100 [F 4] [MPa]/[kPa(ZSE)]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg] 26[F 0] -31No.PS-OML0002CN-G [F 5] <> [F 5] [F 5] -32No.PS-OML0002CN-G OUT1 AP1 (OUT1AP1 1AP2) OUT1 OUT1 OUT1 A1L A1H (A1L 1AP2) OUT2 P_1 H_1(n_1 H_1)AP2 (OUT2AP2 1 ) OUT2 OUT2OUT1OUT2

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

( Body Ported Type 2 Position Single : NVJA3120-M3(-F) 2 Position Double : NVJA322O-M3(-F) M3x0.5 2 po.ts (Piot r 0.07(1.8)Dia 2 Mounting hotes 0.13(3.2) Dia 2 Mounting holes \. I f---a I \ -"j f!'-ll L?

o

(M5) subplate <-\ J ] \ \ W 0Jlm0-22-l) Manifokl Base: How ta Order Same as NVJ3000 series (Refer to page 22). ( Body Ported Type 2 Position Single : NVJA3120-M3(-F) 2 Position Double : NVJA322O-M3(-F) M3x0.5 2 po.ts (Piot r 0.07(1.8)Dia 2 Mounting hotes 0.13(3.2) Dia 2 Mounting holes \. I f---a I \ -"j f!'-ll L?

o

(M5) subplate <-\ J ] \ \ W 0Jlm0-22-l) Manifokl Base: How ta Order Same as NVJ3000 series (Refer to page 22). ( Body Ported Type 2 Position Single : NVJA3120-M3(-F) 2 Position Double : NVJA322O-M3(-F) M3x0.5 2 po.ts (Piot r 0.07(1.8)Dia 2 Mounting hotes 0.13(3.2) Dia 2 Mounting holes \. I f---a I \ -"j f!'-ll L?