Lubrication Equipment

Description Material Part No. # pieces 3 port switching valve (For operation control) VOA301-M VO307E, D-X56 1 e Relay valve Pressure gauge Diaphragm assembly Valve assembly NLP seal PNY seal Wear ring O ring VR4152-00-0 GA46-10-01 12702A 12705A NLP-100A PNY-25 SW-100 X 6 X 2 JIS B2401P3 1 1 1 1 2 2 2 1 r t y u i o !0 !

ZL3-OM00801

N06 NPT3/4 5/16(inch) N04 2xNPT1/2 6) 5 DC24V *1G JIS B0202 ISO1603 ISO1179 8) Z 7 L L 0.3(m) 11) A NPN LO B PNP M M 0.3(m) MO 12) 9) M SI (kPa) D P (:psi) E 10) 14 GN (G) B G *7ZL212 27mm ZL212 (2 /1 , 4 ) E (2 ) F (2 ) V (1 ) 13 G 2m) W (2m) 5 No.ZL3-OM00801-A 2. 2.1 (1/P) (2/V) ZL3 ZL6 (3/E) // / (G) (2/V) 2.2 ZL6 1 ZL6 (ZL6-SC1-A) 2), 6 No.ZL3-OM00801-A 3. 3.1

VCS

Series 2 3 4 Class 2 Class 3 Class 4 OUT port size Symbol 01 02 Port size 1/8 (6A) Stations 2 3 4 5 n Uside D side 1/4 (8A) Material All IN ports are 3/8.

Cylinder

In case of ~ 6 A In case 01 10,15 r I rn .' (ffi\ I I \ VJ / \.\WJ A A Parts List No. Description MBt~~ial Q., Flange busb Resin Trul'lnionlpin Stainless ... . Mate

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(CVRB1BW80, 100) Note 1) Solenoid valve in external appearance is in the case of VZ 140-1G.

Table of Contents

(CVRB1BW80, 100) Note 1) Solenoid valve in external appearance is in the case of VZ 140-1G.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(CVRB1BW80, 100) Note 1) Solenoid valve in external appearance is in the case of VZ 140-1G.

VP300/500/700

VT Port size Type of actuation VP342 VP344 VP542 VP544 VP742 VP744 Port size Rc Without sub-plate Nil VP Symbol Common use to normally closed and normally open (Pilot) 4 VG Body type 01 1 8 02 1 4 03 3 8 1 2 04 Body ported 2 Base mounted 4 VP Valve option VP344, VP544, or VP744 only.

Power Valve: Economy Valve Series VEX5

Basic type Select type Model VEX5504 06 10 VEX57-10 12 VEX59-14 20 P1 P1 VEX VEX Description Bracket (With bolt and washer) G46-10-01 VEX7-32A VEX5-32A VEX9-32A Air operated External pilot solenoid valve 3(R) 3(R) Pressure gauge 1(P) 3(R) 3(R) 1(P) P2 P2 P3 P1 P1 3(R) 3(R) 3(R) 3(R) 1(P) 1(P) P2 P2 Note) With this valve, the port 3(R) is a supply port and port 1(P) is an exhaust port. 2441

Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 1 (100VAC 50/60HZ), Lead Wire: G (Grommet Lead Wire 0.3m)

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: AC100V, Specification: Standard, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Open, Pipe Port Type: -, Port Size: -, Connecting Tube Diameter: -, Pressure Rating(MPa): 0.15 to 0.7, Driving

High Vacuum Angle Valve

CYV Chemraz VMQ FKM for Plasma ULTIC ARMOR Example) XLCV-16-M9NA-1G-XAN1A UA4640 Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

Aluminum High Vacuum Angle Valve

CYV Chemraz Example) XLCV-16-M9NA-1G-XAN1A VMQ FKM for Plasma ULTIC ARMOR Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

CV/MVGQ

Calculation: (Example) CVM3L32-100-1G (32, 100 stroke, Spring return) Basic weight0.73 (kg) CV Weight of brackets0.16 (kg) 0.73 + 0.16 = 0.89 kg MVGQ Minimum Stroke for Auto Switch Mounting (mm) CC No. of auto switches mounted RB Auto switch model 2 n 1 Same side Same side Different sides Different sides 3. Do not touch the cylinder during operation.

CV/MVGQ

Calculation: (Example) CVM3L32-100-1G (32, 100 stroke, Spring return) Basic weight0.73 (kg) CV Weight of brackets0.16 (kg) 0.73 + 0.16 = 0.89 kg MVGQ Minimum Stroke for Auto Switch Mounting (mm) CC No. of auto switches mounted RB Auto switch model 2 n 1 Same side Same side Different sides Different sides 3. Do not touch the cylinder during operation.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

(Blow port: Bottom) Port size OUT (blow) port 2 x Port size IN port JSXM 1G-F(Blow port: Front) Port size OUT (blow) port JSXM 1G(Blow port: Bottom) CS: Conduit GS: Grommet with PCB D 500 K F D 300 K F NPT1/2 C E C E J G J G B B [mm] Size Port size A B C D E F G 20 1/8, 1/4 42 40 77.6 36 17.5 18 15.5 30 1/4, 3/8 53 53 94.5 42 21.5 21 18 40 1/4, 3/8, 1/2 71 70 102.5 42 25.5 21 22.5 Size

Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Screwdriver Operated Style), Port Size: 01 (Base Mounted w/Sub-plate 1/8)

Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 1 (100VAC 50/60HZ), Lead Wire: D (DIN Terminal w/Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: 01 (Base Mounted w/Sub-plate 1/8)

Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 2 (200VAC 50/60HZ), Lead Wire: D (DIN Terminal w/Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: 01 (Base Mounted w/Sub-plate 1/8)

Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 4 (220VAC 50/60HZ), Lead Wire: D (DIN Terminal w/Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: 01 (Base Mounted w/Sub-plate 1/8)