LEY-OM007

ESTOP SVRE SETON 2) 2 EMG TB/ ON OFF TB SETON [1.] []INP ON -31- 4.4.

LEF-OM002xx

mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 To CN4 200 1000 200 1000 2 2 50 200 50 200 3 3 To CN3 or (4) Actuator cable (6) Teaching box PC To CN2 (7) Controller setting kit (3) Power supply plug (2)Controller To CN1 Table 2.

LEH_C

OUT5 INP BUSY No.1 3 DRIVE 3) 5) IN0 IN1 IN2 IN3 IN4 IN5 OUT0 OUT1 OUT2 3)4) OUT3 OUT4 OUT5 INP BUSY No.2 4 DRIVE 3) 5) 5 SVON SVRE SETON 2) INP 4 - 1) ON OFF 2) 2 3) DRIVEON OUT* DRIVEOFF IN*OUT* 4) (LEC ) EMG()RESET 5) PLC 15ms(30ms) 2) EMG() / P.52 8.3 1. 2 ESTOP SVRE SETON 1 EMG (TB/) ESTOP SVRE SETON 2) 2 EMG (TB/) 1) ON OFF TB

LEF-OM006xx

ESTOP[ ] SVRE SETON 1 EMG: TB/:) ESTOP[] SVRE SETON 2) 2 EMG : (TB/:) ON OFF TB SETON -26- 3.

Table of Contents - Tubing

Tube Reel Tube Stand: TB-2 TB-3VS Vertical Stand Applicable tube size mm Model 4, 6 8 10 12 TBR-1 TBR-2 TBR-3 TBR-4 TB-3VS Vertical Stand Dimension: 37 1/4" W x 27 9/16" D x 68 11/16" H Designed for high capacity and reel size flexibility. This stand comes with two cross bars.

JXCx-OMT0032CN

N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 CN4 CN4 No. No.

JXCx-OMT0034CN

N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 CN4 CN4 No. No.

2

(See Fig. 2.)

LEC-OM07605CN

DC24V (2) 3.10.2Pr.PC02 ]OFF (Tb) 3 29 3. 3.10.2 (1) [Pr. PA04]2 _ _ _() (a)ON ()ON/OFF ONOFF,Tb[ms] Tb 1.5 0 r/min (95 ms) Tb ON OFF (95 ms) MBR ( ) (1) ON MBR (1) OFF ON ON () () OFF ON () Ready ON () OFF (3) (3) () () 0 r/min +(2) + (2) 1. ON OFF 2. 14 3. 3 30 3.

Table of Contents

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

REA/REB

axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products

REA/REB

CC RB J D-X 20Data 10-2-33 33 Series REAS Dimensions: 15 to 40 ta tb EA ta EA Port cover FB EB FA TT T S + Stroke 2-P FA Hollow shaft for piping Counterbore dia.

Electric Actuator with Integrated Guide

2) Note 2) Be sure to use a regenerative absorption unit (LC7R-K1A) with this controller (with brake).

REA/REB

2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

JXCx-OMT0061CN

() 2 () * ) () 3 11.1 12 64 ()() No. 1 2 mm 2 2 mm/s mm mm/s mm/s % % mm mm mm/s % 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 47 - () TB No. No. 063 No.

Vacuum

Station 1 Examples :W:: ir:t:*tatt:t:la r:ui ::ut:t:tl Part Number / Configuration Four station manifold assembly: sta. 1-4) NZXl101-KlsLZ-EC-M NZZXlO4-TB-A Parl Number / Configuration Six station manitold assembly: sra. 1) NZX 1071 -K3sMZ-F-M sta. 2-5) NZX1071-K1sLZ-EC-M sta. 6) zx'l-BABI NZZXl O6-TB-A 4tl 2 ' Part Number / Configuratlon Four station manifold assembly: sta. 1-2) NZX'I101

Vacuum

Station 1 Examples :W:: ir:t:*tatt:t:la r:ui ::ut:t:tl Part Number / Configuration Four station manifold assembly: sta. 1-4) NZXl101-KlsLZ-EC-M NZZXlO4-TB-A Parl Number / Configuration Six station manitold assembly: sra. 1) NZX 1071 -K3sMZ-F-M sta. 2-5) NZX1071-K1sLZ-EC-M sta. 6) zx'l-BABI NZZXl O6-TB-A 4tl 2 ' Part Number / Configuratlon Four station manifold assembly: sta. 1-2) NZX'I101

IDX-OM-W032

IEC 11-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 11-3 ON ON/OFF 3 3 5 () IDFA Series 11-1 11 1 IDX-OM-W032 11 T 11-4 1) 2) 3) 4) 1 2 3 PE L.N: PE: M3 6.5mm 2 :1.25mm :17 :17 11-5 3 5-2 IDFA55E/75E-23 IDFA Series 11-4 11 2 IDX-OM-W032 11 T 11-6 IDFA22E, 37E-23-T IDFA55E, 75E-23-T GFCI R GFCI R GFGI For Option R 1 2 3 L N PE L N 1 2 3 PE TB TB MC TDR MC CM C01

IDX-OM-W053

1 . i-2 i-2-2 . i-3 i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5

IDX-OM-W020

and their components *2) JIS B8370 URLhttps://www.smcworld.com/ i i-1 . i-1 i-1-1 . i-1 i-2 . i-2 i-2-1 . i-2 i-2-2 . i-3 i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 / . i-8 1 1-1 . 1-1 2-1 . 2-1 2-2 . 2-2 2-2-1 . 2-2 2-2-2 . 2-3 2-2-3 . 2-3 2-2-4 . 2-3 2-2-5 . 2-4 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3