VQZ1000/2000/3000

Ported 10 10 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 position double Grommet (G): VQZ1220 1-G-C3/C4/C6/M5 300 95 (Lead wire length) 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 mounting hole 0.8 4 8.6 10 SMC SMC 2 R2 Cover diameter 1.6 25.8 2-C3, C4, C6, M5 Cross section 0.34 mm2 60.3 C3: One-touch fitting for 3.2 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5

Proposals for Energy Saving

VM-33A Push button (Flush) VM130-01-33 VM132-M5-33 VM-34AR Red VM130-01-34R VM130-01-34B VM130-01-34G VM130-01-34Y VM132-M5-34R VM132-M5-34B VM132-M5-34G VM132-M5-34Y Selector (2 position) VM-34AB Black VM-34AG Green VM-34AY Yellow VM-36A Key selector (2 position) VM130-01-36 VM132-M5-36 Red VM151-01-35R VM151-01-35B VM151-01-35G VM151-01-35Y VM153-M5-35R VM153-M5-35B VM153-M5-35G VM153-M5

Dual Rod Cylinder Series CXSJ/CXS

2 x M5 x 0.8 with thread depth 7.5 NN Q R T U 2 x M5 x 0.8 with thread depth 4 2 x M5 x 0.8 with thread depth 4 2 x M5 x 0.8 with thread depth 4 2 x Rc1/8 with thread depth 5 SS Bore size (mm) 2 x 2 x 4.3 through 2 x 2 x 8 counterbore with depth 4.3 CXT 15 19 70 52 17 8.5 2 x M5 x 0.8 42 25 5 10 2.5 20 8 9.5 38 9 57.5 54 2 x 2 x 5.5 through 2 x 2 x 9.5 counterbore with depth 5.3 CXSJ 20

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C3: One-touch fitting ass'y for 3 2n-C3, C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

female thread ZS-46-A1 ZS-46-5L M5 Lead wire with connector (5-core, 2 m lead wire) A1 Bracket A (Vertical mounting) Piping port J Without waterproof cover R1/8 ZS-46-A2 01 * For the lead wire with M12 connector, refer to p. 38.

High-Precision Digital Pressure Switch

Compact: Max. 17.5 mm shorter Lightweight: Max. 21 g lighter (When an M5 female thread is used.) (When an M5 female thread is used.)

PSE540/560

M5 female thread, through type M3 M3 x 0.5 ISA2 IM5 M5 M5 x 0.8 IS Option/Part No. M5 female thread, through type (With mounting hole) 01 R 1/8 (With M5 female thread) IM5H Note Description Part no. N01 NPT1 /8 (With M5 female thread) ZSM Connector for PSE200 1 pc. ZS-26-E-4 R04 4 plug-in reducer Connector for PSE300 1 pc.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

ZSE30/ISE30

kPa PRESSURE kPa PRESSURE kPa PRESSURE kPa PRESSURE kPa PRESSURE OUT OUT OUT OUT OUT SET SET SET SET SET With One-touch fitting (4, 6, 5/32", 1/4") Reduced dimensions in piping direction 17.8 mm reduction Straight type 12.4 mm reduction Elbow type 14.4 22.4 12.4 mm 17.8 mm 32.2 34.8 KQ2H06-M5 KQ2L06-M5 Comparison when One-touch fittings (KQ2H06-M5 / KQ2L06-M5) are connected to the piping

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

and Japanese NPT1/4 (M5 female threaded) N02 Option 1 G1/4 (M5 female threaded) Rc1/8 URJ1/4 TSJ1/4 Note) Fixed unit ISE80H: MPa Others : MPa, kPa With unit display switching function Fixed SI unit Note) F02 Nil C01 A2 B2 M P Initial value psi Option 2 Bottom ported R1/4 (M5 female threaded) Nil None 02L With bracket NPT1/4 (M5 female threaded) N02L A C01L A2L B2L Rc1/8 ZS-24-A ZS-35-A URJ1

ZSE30/ISE30

Note Lead wire length: 2m With mounting screws (M3 x 5L: 2 pcs.)

Digital Flow Switches

Sensor 1l/min 5l/min 10l/min 20l/min 50l/min 100l/min 200l/min 500l/min Flow rate range 1l/min 10l/min PF2A510 0.5l/min 10.5l/min 5l/min 50l/min PF2A550 52.5l/min 2.5l/min 10l/min 100l/min PF2A511 105l/min 5l/min 20l/min 200l/min 210l/min 10l/min PF2A521 50l/min 500l/min 525l/min 25l/min PF2A551 Sensor Flow rate range 0.5l/min 2l/min 5l/min 10l/min 20l/min

Digital Pressure Switch

Description Part number Remarks Bracket A ZS-38-A1 Mounting screw (M3 x 5L, 2 pcs.) Bracket B ZS-38-A2 Mounting screw (M3 x 5L, 2 pcs.) Bracket C ZS-38-A3 Mounting screw (M3 x 5L, 2 pcs.) Panel mount adapter ZS-27-C Mounting screw (M3 x 8L, 2 pcs.) Panel mount adapter + Front protective cover ZS-27-D Mounting screw (M3 x 8L, 2 pcs.)

HRX-OM-X084

/min) / 0.11(at 5L/min) Pump capacity (50/60Hz) For option T10.35(at 5L/min) / 0.35(at 5L/min Rated fiow (50/60Hz) 7 L/min 5 / 5 For option T15 / 5 Flowdisplay range21 L/min 2 to 16 Circulating fluid system Electric conductivity display range S/cm 0.1 to 48(For option -DM) Electric conductivity setting range S/cm 0.5 to 45(For option -DM) Particle filter nominal filtration rating20 m 35 Bypass

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 10-SS5YJ3-32-M5 10-SS5YJ3-32-C4 10-SYJ333 1/8 10-SS5YJ3-S32-M5 10-SS5YJ3-S32-C4 Base mounted for internal pilot 10-SS5YJ3-41-M5 10-SS5YJ3-41-C4 10-SYJ343 1/8 10-SS5YJ3-S41-M5 10-SS5YJ3-S41-C4 10-SS5YJ3-46-M5 1/8 M5 x 0.8 10-SS5YJ3-46-C4 10-SYJ343 10-SS5YJ3-S46-M5 10-SS5YJ3-S46-C4 Note) Value at manifold base mounted, 2

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

SS5YJ310-SYJ333 M5 x 0.8 M3 x 0.5 0.9 Type 10-SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 0.19 0.18 0.26 0.21 0.25 0.28 0.29 0.27 0.25 0.27 0.25 0.34 0.060 0.059 0.060 0.057 0.081 0.079 0.082 0.079 0.048 0.050 0.048 0.057 0.32 0.30 0.29 0.27 0.33 0.35 0.34 0.34 0.10 0.21 0.19 0.10 0.25 0.27

SYJ3000/5000/7000

SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 0.19 0.18 0.26 0.21 0.25 0.28 0.29 0.27 0.25 0.27 0.25 0.34 0.060 0.059 0.060 0.057 0.081 0.079 0.082 0.079 0.048 0.050 0.048 0.057 0.32 0.30 0.29 0.27 0.33 0.35 0.34 0.34 0.10 0.21 0.19 0.10 0.25 0.27 0.15 0.18 0.19 0.24 0.17 0.24 0.12 0.13 0.16

125

Applicable cable O.D. 3.5 to 7 63.9 Max. 10 101.7 56.4 45.1 VEX3121: M5 VEX3122: None (Port PA/Pilot air) M5 (Port PE/ Pilot exhaust) Pg7 M5 (Port P1/Pilot air) M5 (Port P2/Pilot air) Manual override A B P2 P1 102.6 PA 3 R A 2 A 2 64.1 61.8 59.1 58.6 58.1 58.1 1 P 1730 3 Port 3 Position Valve VEX3 Series Dimensions: Body Ported/VEX332 External pilot solenoid: VEX3321 Internal pilot solenoid