ITV0000

Tightening of M3, M5, and M6 connection threads 1) M3 After tightening by hand, tighten an additional 1/4 rotation with the correct tool. 2) M5 and M6 After tightening by hand, tighten an additional 1/6 rotation with the correct tool. Overtightening can cause damage to the threads and/or air leakage due to deformation of the gasket.

Process Pump

Use two M5 bolts (four M6 bolts for foot bracket) to mount the pump. If the bolts are not tightened firmly, the pump could be exposed to the vibration and eventually damage. 2) Piping Perform flushing enough for piping to avoid intrusion of cutting chips and sealant debris created by screwing the piping and fitting.

Process Pump

Use two M5 bolts (four M6 bolts for foot bracket) to mount the pump. If the bolts are not tightened firmly, the pump could be exposed to the vibration and eventually damage. 2) Piping Perform flushing enough for piping to avoid intrusion of cutting chips and sealant debris created by screwing the piping and fitting.

Air Cylinder Series MB

Bore size (mm) 32 40, 50, 63 80, 100 Thread size M2.5 x 0.45 x 25 l M3 x 0.5 x 30 l M5 x 0.8 x 40 l Stroke (mm) 2 3 3 Pulling force 4.9 N 10 N 24.5 N e Release lock when mounting or adjusting the cylinder. Remove bolt under normal operations. It may cause malfunction of locking and release.

2

AS-FS 7.2 5 AS12l1FG-U10/32-01A AS12l1FG-M5-03A 5/32" 8.2 AS12l1FG-U10/32-03A AS12l1FG-M5-07A 1/4" 11.2 18.6 23.1 16.5 6 AS12l1FG-U10/32-07A 17.2 21.7 16.9 M5 x 0.8 10/32UNF 8 9.4 26.5 25.4 23.5 22.4 13.3 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation INDEX 478 Series AS-FG For M5, 10-32UNF Dimensions/ Universal type Seal method: Gasket seal For M5

Compact Cylinder Series CQS

x 40L M3 x 45L M5 x 50L M3 x 55L M5 x 35L M3 x 40L M5 x 45L M3 x 50L M5 x 55L M3 x 60L M5 x 65L M3 x 70L M5 x 75L M3 x 80L 6.5 6.5 Mounting bolt Secure the cylinder by using the OA screws that are provided with the cylinder tube.

MXS

62 48 26 6 1 N-M5 X 0.8 thread 6 deep (Helisert) 6 12 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end Stroke adjuster at extension end KA 21 NA-M5 X 0.8 thread 5.5 deep 10 21 5.5 K 10 5.5 9.5 12 6 12 5.5 J 10 Max. 13.5 (With stroke adjuster at retraction end) I Operating port 2-M5 X 0.8 11 3 2-M5 X 0.8 thread 5.5 deep 5H9 4 deep +0.030 0 HA GA 5H9 4 deep +0.030

5

(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8

Hydraulic

Example: M5 x 50l 4pcs.

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

Aluminum High Vacuum Angle Valve

Rc1/8 Pilot port size XLAV M5: Port 1(P), Port 3(R) Rc1/8: Port 1(P), M5: Port 3(R) XLA 0.25 0.45 1.1 1.6 2.9 5.0 10.6 18.5 Weight (kg) XLAV 0.29 0.49 1.14 1.64 2.96 5.06 10.7 18.6 Note 1) Conductance is the value for an elbow with the same dimensions.

XL

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61

Title not found

And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

High Vacuum Angle Valve, XL Series

(10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating solenoid valve recommended Cv factor (XLC) Service life (Million cycles) 2 0.25 (0.55) 0.46 (1.01) 1.1 (2.43) 1.6 (3.52) 2.9 (6.39) 5.0 (11.02) XLA Weight kg (lb) XLAV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.64 (3.61

Compact Hydraulic Cylinder

Bore size (mm) 20 32 40 50 63 80 100 M5 x 0.8 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M10 x 1.5 2 4 4 4 4 4 4 3 3 3 6 11.5 24 34 7. Do not use two cylinders facing one another horizontally or vertically in such a way that their piston rods strike each other. 8.

CXS

x 0.8 thread depth 4 (Piping port) OUT IN Steel balls 8-28-25 25 Series CXSJ Dimensions: 15 to 32 Standard Piping U Q R T ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2

CXS

x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2 x 2-4.3 through 2 x 2-8 counterbore with depth 4.3 2 x 2-5.5 through 2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70 52 17 8.5 2-M5 x 0.8

Secondary Batteries

Action D B T Port thread type Double acting Double acting with spring loaded Single acting (Spring extend) 20 to 50 Nil TN TF Rc NPT G Note) TF for 20 indicates M5.

CHKD/CHKG

Body mounting bolt tightening torques Tightening torque (Nm) 2.5 4 7 16 30 40 70 100 Bore size (mm) Mounting bolt size M5 M5 M6 M8 M10 M12 M14 M16 20 25 32 40 50 63 80 100 Magnetic body (steel plate, etc.) 268 JIS Standard Compact Hydraulic Cylinder: 10 MPa CHKD Series Construction r !0 !1 q y !3 o i !4 !